GaN SEMICONDUCTOR DEVICE STRUCTURE AND METHOD OF FABRICATION BY SUBSTRATE REPLACEMENT
US-2016380090-A1 · Dec 29, 2016 · US
US10427984B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10427984-B2 |
| Application number | US-201815874284-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 18, 2018 |
| Priority date | Sep 5, 2014 |
| Publication date | Oct 1, 2019 |
| Grant date | Oct 1, 2019 |
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Methods for fabricating a ceramic matrix composite are disclosed. A fiber preform may be placed in a mold. An aqueous solution may be added to the fiber preform. The aqueous solution may include water, carbon nanotubes, and a binder. The preform may be frozen. Freezing the preform may cause the water to expand and separate fibers in the fiber preform. The carbon nanotubes may bond to the fibers. The preform may be freeze dried to remove the water. The preform may then be processed according to standard CMC process.
Opening claim text (preview).
The invention claimed is: 1. A ceramic matrix composite formed by a process comprising: inserting a fiber tow in a mold; introducing an aqueous solution comprising water, carbon nanotubes, and a binder into the mold; freezing the aqueous solution, wherein the freezing the aqueous solution separates fibers within the fiber tow; freeze drying the aqueous solution, wherein the freeze drying removes the water from the mold; heat treating the fiber tow in the presence of a boron-bearing precursor and nitrogen gas to produce boron nitride nanotubes; and processing the mold via at least one of slurry casting, chemical vapor infiltration, polymer infiltration and pyrolysis, or melt infiltration. 2. The ceramic matrix composite of claim 1 , wherein the carbon nanotubes are bonded to the fibers. 3. The ceramic matrix composite of claim 1 , wherein the carbon nanotubes form an interfacial region surrounding the fibers. 4. The ceramic matrix composite of claim 1 , wherein the boron-bearing precursor is boron oxide. 5. The ceramic matrix composite of claim 4 , wherein the heat treating the fiber tow proceeds through the reaction B 2 O 3 +3C(CNTs)+N 2 →2BN(BNNTs)+3CO, wherein CNTs represent carbon nanotubes, and BNNTs represent boron nitride nanotubes.
Hollow fibers, e.g. nanotubes · CPC title
Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint · CPC title
Carbon fibres in a carbon matrix · CPC title
Fibres, filaments, whiskers, platelets, or the like · CPC title
Drying · CPC title
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