Flash memory having water vapor induced air gaps and fabricating method thereof

Patent metadata

Field	Value
Publication number	US-10418370-B2
Application number	US-201615331467-A
Country	US
Kind code	B2
Filing date	Oct 21, 2016
Priority date	Oct 28, 2015
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

In some embodiments, a flash memory and a fabricating method thereof are provided. The method includes proving a substrate including multiple memory transistors and selecting transistors; forming a functional layer covering outer surfaces of the memory transistors and selecting transistors, and surfaces of the substrate between adjacent memory transistors and selecting transistors; performing a surface roughening treatment to the functional layer to provide a roughed surface of the functional layer that absorbs water; and forming a dielectric layer using a chemical vapor deposition (CVD) process, the absorbed water is evaporated from the functional layer during the CVD process to form an upward air flow that resists the deposition of the dielectric layer, such that air gaps are formed between adjacent memory transistors, and the dielectric layer covers top surfaces of the plurality of memory transistors and selecting transistors and fills gaps between each selecting transistor and corresponding adjacent memory transistor.

First claim

What is claimed is:

1. A method for fabricating a flash memory, comprising:
providing a substrate including a memory cell region;
forming a memory transistor array including a plurality of memory transistors, and a plurality of selecting transistors in the memory cell region, wherein each selecting transistor is used for selecting one column of memory transistors in the memory transistor array;
forming a functional layer covering outer surfaces of the plurality of memory transistors and outer surfaces of the plurality of selecting transistors, as well as surfaces of the substrate between adjacent memory transistors and selecting transistors;
performing a surface roughening treatment to the functional layer to provide a surface of the functional layer, the roughened surface being able to absorb water;
absorbing by the roughened surface of the functional layer, introduced water; and
forming a dielectric layer using a chemical vapor deposition process on the functional layer, wherein the absorbed water is evaporated from the roughened surface of the functional layer during the chemical vapor deposition process to form an upward air flow that resists the deposition of the dielectric layer, such that air gaps are formed between adjacent memory transistors, and the dielectric layer covers top surfaces of the plurality of memory transistors and selecting transistors and fills gaps between each selecting transistor and a corresponding adjacent memory transistor.

2. The method of claim 1 , wherein:
the memory transistor array includes a plurality of first gate stack structures of the plurality of memory transistors, and a plurality of first source regions and drain regions on both sides of the first gate stack structures; and
each selecting transistor includes a second gate structure, a second source region and a second drain region on both sides of the second gate structure;
wherein a first gap distance between adjacent first gate stack structures of the plurality of memory transistors is smaller than a second gap distance between one second gate structure of the selecting transistor and a corresponding adjacent first gate stack structure of one memory transistor.

3. The method of claim 2 , further comprising:
forming a plurality of logic transistors in a peripheral circuit region of the substrate; and
each logic transistor includes a third gate structure, a third source region and a third drain region on both sides of the third gate structure;
wherein the first gap distance between adjacent first gate stack structures of the plurality of memory transistors is smaller than a third gap distance between one second gate structure of the selecting transistor and a corresponding adjacent third gate structure of one logic transistor, and is also smaller than a fourth gap distance between adjacent third gate structures of the plurality of logic transistors; and
wherein the dielectric layer further covers the top surfaces of the plurality of logic transistors and the plurality of selecting transistors and fills gaps between each selecting transistor and a corresponding adjacent logic transistor, and fills gaps between adjacent logic transistors.

4. The method of claim 1 , wherein absorbing by the roughened surface of the functional layer the introduced water is realized by placing the functional layer in an aqueous environment for 1 day to 10 days.

5. The method of claim 1 , wherein:
a material of the functional layer is silicon oxide;
a thickness of the functional layer is in a range from 20 Å to 100 Å;
the functional layer is formed by using an atomic layer deposition method; and
the surface roughening treatment to the functional layer is a dry etching process.

6. The method of claim 5 , wherein:
an etching gas of the dry etching process is NF 3 ;
a gas flow rate of the dry etching process is in a range from 10 mL/min to 50 mL/min;
a power of the dry etching process is in a range from 100 W to 500 W; and
an etching time of the dry etching process is in a range from 5 s to 10 s.

7. The method of claim 1 , wherein:
a material of the dielectric layer is silicon oxide;
the chemical vapor deposition process uses tetraethyl orthosilicate or silanel to form the dielectric layer; and
a temperature of the chemical vapor deposition process is in a range from 400° C. to 600° C.

8. The method of claim 3 , wherein:
the first gate stack structure of each memory transistor, from bottom to top, includes a first tunneling dielectric layer, a first floating gate, a first inner gate dielectric layer, and a control gate;
a material of the first tunneling dielectric layer is silicon oxide;
a material of the first floating gate is doped polysilicon;
the first inner gate dielectric layer is a first three-layer structure including silicon oxide, silicon nitride, and nitrogen oxide; and
a material of the control gate is doped polysilicon.

9. The method of claim 8 , wherein:
the second gate structure of each selecting transistor, from bottom to top, includes a second gate dielectric layer, a second bottom gate electrode, a second inner dummy gate dielectric layer, and a selecting gate;
the inner dummy gate dielectric layer has a second opening, the second bottom gate electrode and the selecting gate are electrically connected through the second opening;
a material of the second gate dielectric layer is silicon oxide;
a material of the second bottom gate is doped polysilicon;
the second inner dummy gate dielectric layer is a second three-layer structure including silicon oxide, silicon nitride, and nitrogen oxide; and
a material of the selecting gate is doped polysilicon.

10. The method of claim 9 , wherein:
the third gate structure of each logic transistor, from bottom to top, includes a third gate dielectric layer, a third bottom gate electrode, a third inner dummy gate dielectric layer, and a logic gate;
the third inner dummy gate dielectric layer has a third opening, the third bottom gate electrode and the logic gate are electrically connected through the third opening;
a material of the third gate dielectric layer is silicon oxide;
a material of the third bottom gate is doped polysilicon;
the third inner dummy gate dielectric layer is a third three-layer structure including silicon oxide, silicon nitride, and silicon oxide; and
a material of the logic gate is doped polysilicon.

11. The method of claim 10 , wherein:
a metal silicide layer is formed on top of the first gate stack structure of each memory transistor, the second gate structure of each selecting transistor, and the third gate structure of each logic transistor; and
the control gate, the selecting gate, and the logic gate are word lines.

12. The method of claim 3 , wherein:
the memory transistors and the selecting transistor in the memory cell region, as well as the logic transistors in the peripheral circuit region are formed simultaneously during same fabricating processes.

Assignees

• Semiconductor Mfg Int Shanghai Corp
• Semiconductor Mfg Int Beijing Corp

Inventors

• Chen Liang
• Chiu Shengfen

Classifications

• H10P50/283

  by chemical means · CPC title

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6681

  the precursor containing a compound comprising Si · CPC title

• H10P14/6546

  to change the surface groups of the insulating materials · CPC title

• H10P14/6534

  by exposure to a liquid · CPC title