Resonating measurement system using improved resolution

Patent metadata

Field	Value
Publication number	US-10416003-B2
Application number	US-201715499292-A
Country	US
Kind code	B2
Filing date	Apr 27, 2017
Priority date	Apr 29, 2016
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

A resonating measurement system having at least a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) is provided, including an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating elementl; excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm; an injection device configured to inject a light beam, having an intensity modulated at frequency of f1=fm+Δf, in the optomechanical device; and a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at frequency of Δf.

First claim

The invention claimed is:

1. A resonating measurement system having at least a microelectromechanical system (MEMS) and/or a nanoelectromechanical system (NEMS), comprising:
an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr, and at least one optical element having an optical index sensitive to displacement of the at least one resonating element;
excitation circuitry configured to excite the at least one resonating element at at least at one operating frequency of fm;
an injection device configured to inject a light beam, having an intensity modulated at a frequency of f 1 =fm+Δf, into the optomechanical device; and
a photodetection device configured to measure an intensity of a light beam transmitted from the optomechanical device, the intensity having at least one component at a frequency of Δf.

2. The resonating measurement system according to claim 1 , wherein the at least one operating frequency of fm is such that fr−(2fr/Qm)≤fm≤fr+(2fr/Qm), where Qm is a mechanical quality factor of the at least one resonating element.

3. The resonating measurement system according to claim 2 , wherein a ratio fr/Δf is such that 10<fr/Δf<Qm.

4. The resonating measurement system according to claim 1 , wherein the optomechanical device includes a wave guide and an optical ring optically coupled to the wave guide, the wave guide being configured to receive the light beam injected by the injection device and to send a transmitted light beam via the optomechanical device to the photodetection device.

5. The resonating measurement system according to claim 4 , wherein the at least one resonating element is positioned in a vicinity of the optical ring.

6. The resonating measurement system according to claim 4 , wherein the at least one resonating element is formed by the optical ring.

7. The resonating measurement system according to claim 1 , wherein the excitation circuitry is an electrostatic excitation circuitry.

8. The resonating measurement system according to claim 1 , wherein the excitation circuitry is an optical excitation circuitry.

9. The resonating measurement system according to claim 1 , wherein the light beam transmitted from the optomechanical device also has a component at a frequency of 2fm+Δf and/or fm+Δf, the photodetection device comprising at least one photodetector having a bandwidth such that a component at the frequency 2fm+Δf and/or fm+Δf is outside said bandwidth.

10. The resonating measurement system according to claim 1 , wherein the photodetection device has at least one photodetector and a bandpass filter so that the light beam transmitted from the optomechanical device also has a component at a frequency of 2fm +Δf and/or fm+Δf that is outside of a bandwidth of said bandpass filter.

11. The resonating measurement system according to claim 1 , wherein the injection device comprises a light source formed by a laser.

12. The resonating measurement system according to claim 11 , wherein the injection device includes modulation means of a laser supply current.

13. The resonating measurement system according to claim 11 , wherein the injection device comprises a laser diode.

14. The resonating measurement system according to claim 1 , wherein the injection device comprises a light source and an optical modulator positioned between the light source and the optomechanical device and is configured to modulate to a frequency of f 1 the light beam injected into the optomechanical device.

15. The resonating measurement system according to claim 1 , further comprising an electrical connection between the at least one resonating element and an electrical ground of the resonating measurement system.

16. The resonating measurement system according to claim 1 , further comprising additional circuitry either disposed directly at an output of the photodetection device, or at the output of the photodetection device through a component, configured to generate a signal on based on a mixture of the component at the frequency of Δf of a photodetection device output signal and a signal at the frequency of f 1 =fm+Δf, so as to generate a self-oscillating measurement system.

17. The resonating measurement system according to claim 16 , wherein the additional circuitry is connected to the output of the photodetection device through an amplifier or a filter.

18. The resonating measurement system according to claim 1 , further comprising additional circuitry disposed either in an output of the photodetection device through a component, configured to generate a signal corresponding to a sum of the component at the frequency of Δf of a photodetection device output signal and a signal at the frequency of f 1 =fm+Δf, so as to generate a self-oscillating measurement system.

19. The resonating measurement system according to claim 18 , wherein the additional circuitry is connected to the output of the photodetection device through an amplifier or a filter.

Assignees

• Commissariat Energie Atomique

Inventors

• Leoncino Luca
• Hentz Sebastien
• Jourdan Guillaume
• Sansa Perna Marc

Classifications

• G01P15/097

  by vibratory elements · CPC title

• G01P15/093

  by photoelectric pick-up · CPC title

• G01N2291/0256

  Adsorption, desorption, surface mass change, e.g. on biosensors · CPC title

• G01N2291/015

  Attenuation, scattering · CPC title

• G01N29/2418

  using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics (photoacoustic cells G01N21/1702; measuring characteristics of vibrations by using radiation-sensitive means G01H9/00; acousto-optical conversion techniques for short-range imaging G01S15/8965; sound-producing devices using laser bundle G10K15/046) · CPC title