Micro electrical mechanical system (MEMS) valve

Patent metadata

Field	Value
Publication number	US-10415721-B2
Application number	US-201815869648-A
Country	US
Kind code	B2
Filing date	Jan 12, 2018
Priority date	Jan 12, 2018
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

A micro electrical mechanical system (MEMS) valve is provided. The MEMS valve includes first and second bodies, a medium and a thermal element. The first body defines a first channel and a second channel intersecting the first channel. The second body defines a third channel and is movable within the first channel between first and second positions. When the second body is at the first positions, the second and third channels align and permit flow through the second and third channels. When the second body is at the second positions, the second and third channels misalign and inhibit flow through the second channel. The medium is charged into the first channel at opposite sides of the second body. The thermal element is proximate to the first channel and is operable to cause the medium to drive movements of the second body to the first or the second positions.

First claim

What is claimed is:

1. A micro electrical mechanical system (MEMS) valve, comprising:
a first body defining a first channel having a first side and a second side and a second channel intersecting the first channel between the first and second sides;
a second body defining a third channel and being disposed to slide within the first channel between:
first axial positions with the second and third channels axially aligned to permit flow through the second and third channels, and
second axial positions with the second and third channels axially misaligned to inhibit flow through the second channel;
a medium charged into the first channel at opposite sides of the second body; and
first and second thermal element parts proximate to the first and second sides of the first channel, respectively, and comprising excitable components which are excitable by exposure to radiation to adjust relative temperatures and pressures of the medium at the opposite sides of the second body to drive a sliding of the second body to the first or the second axial positions.

2. The MEMS valve according to claim 1 , wherein the MEMS valve further comprises an external element disposed at an exterior of the first body and configured to emit radiation toward the excitable components of the first and second thermal element parts.

3. The MEMS valve according to claim 1 , wherein the first body further defines an additional channel fluidly communicative with the second channel.

4. The MEMS valve according to claim 1 , wherein the second body is self-sealing such that fluid in the second and third channels is prevented from leaking into within the first and second sides of the first channel.

5. The MEMS valve according to claim 1 , wherein an exterior surface of the second body is scalloped.

6. The MEMS valve according to claim 1 , wherein:
at least one of the first axial positions permits flow through the axially aligned second and third channels, and
at least one of the second axial positions inhibits flow through the second channel.

7. The MEMS valve according to claim 1 , further comprising stoppers disposed within the first channel to interfere with the sliding of the second body.

8. The MEMS valve according to claim 1 , further comprising hydrophobic film lining at least intersecting portions of the first and second channels.

9. A micro electrical mechanical system (MEMS) valve, comprising:
a first body defining a first channel and a second channel intersecting the first channel;
a second body defining a third channel and being disposed to slide within the first channel between:
first axial positions with the second and third channels axially aligned to permit flow through the second and third channels, and
second axial positions with the second and third channels axially misaligned to inhibit flow through the second channel;
a medium charged into the first channel at opposite sides of the second body; and
a thermal element proximate to the first channel and operable to adjust relative temperatures and pressures of the medium at the opposite sides of the second body to drive a sliding of the second body to the first or the second axial positions,
wherein an exterior surface of the second body comprises concave sections arranged side-by-side along a longitudinal axis of the second body, each concave section being adjacent to at least one neighboring concave section.

Assignees

• IBM

Inventors

• Xin Yongchun
• Piper Daniel
• Fry Jonathan
• Sim Jang

Classifications

• F16K99/0011

  Gate valves or sliding valves · CPC title

• F16K99/004 Primary

  using radiation · CPC title

• F16K2099/0074

  using photolithography, e.g. etching · CPC title

• F16K2099/0088

  Implanted devices · CPC title

• F16K2099/0084

  Chemistry or biology, e.g. "lab-on-a-chip" technology · CPC title