Crucible for electron-beam evaporator

Patent metadata

Field	Value
Publication number	US-10415134-B2
Application number	US-201615204311-A
Country	US
Kind code	B2
Filing date	Jul 7, 2016
Priority date	Aug 10, 2015
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

Disclosed is a crucible that exhibits stable evaporation efficiency and durability with respect to Al, is used in an evaporation source of an electron-beam evaporator, and includes a storage unit, which includes a wall and a bottom and in which a deposition material is placed, and a wetting prevention unit that includes another wall, which is taller than the wall of the storage unit, and another bottom, and is combined with an exterior of the storage unit. The wetting prevention unit is provided so that only the wall of the storage unit is wet with Al, and accordingly, the lifespan of the crucible is lengthened. Further, contact with the ceramic material in order to prevent wetting is minimized, thereby preventing a reduction in the physical properties of the thin film due to the impurities mixed with the deposited Al.

First claim

What is claimed is:

1. A crucible for an electron-beam evaporator, which is used in an evaporation source of the electron-beam evaporator, the crucible comprising:
a storage unit which includes a wall and a bottom and in which a deposition material is placed;
a wetting prevention unit which is combined with an exterior of the storage unit; and
a bolt including an electrical conductive material,
wherein the wetting prevention unit includes two combined parts having an internal unit and an external unit, the internal unit includes a ceramic material, and the external unit includes an electrical conductive metal material,
wherein the external unit is electrically connected to the storage unit,
wherein the internal unit includes a wall combined with the wall of the storage unit and a bottom combined with the bottom of the storage unit, and the external unit includes a wall combined with the wall of the internal unit and a bottom combined with the bottom of the internal unit,
wherein the bottom of the storage unit includes an upper surface and a lower surface,
wherein the bottom of the internal unit includes an upper surface and a lower surface,
wherein the bottom of the external unit includes an upper surface and a lower surface,
wherein the lower surface of the bottom of the storage unit is entirely covered by the upper surface of the internal unit,
wherein the lower surface of the bottom of the internal unit is entirely covered by the upper surface of the external unit,
wherein a first through hole is formed through the bottom of the storage unit, a second through hole is formed through the bottom of the internal unit, and a groove is formed in the bottom of the external unit,
wherein the bolt is screwed through the first through hole and the second through hole into the groove formed in the bottom of the external unit such that the external unit is electrically connected to the storage unit via the bolt, and
wherein an internal side of the wall of the internal unit surrounds an external side of the wall of the storage unit and is partially exposed above the wall of the storage unit, and an internal side of the wall of the external unit surrounds an external side of the wall of the internal unit, and each of the wall of the internal unit and the wall of the external unit is taller than the wall of the storage unit.

2. The crucible of claim 1 , wherein the storage unit includes a material that induces a wetting phenomenon of Al, and the wetting prevention unit includes a material that does not induce the wetting phenomenon of Al.

3. The crucible of claim 2 , wherein the storage unit includes any one selected from W, Mo, Ta, and TiB 2 , BN, and TiB 2 .BN materials.

4. The crucible of claim 3 , wherein the wetting prevention unit includes a ceramic material.

5. The crucible of claim 1 , wherein the external unit includes a Cu material.

6. The crucible of claim 1 , wherein the bolt includes a Mo or W material.

7. The crucible of claim 1 , wherein the internal side of the wall of the internal unit is partially exposed due to a difference in height of the wall of the storage unit and the wall of the internal unit so that an exposed portion of the internal unit has a height of 2 mm or more.

8. An electron-beam evaporator for radiating accelerated electrons to evaporate a material and then deposit the material, the electron-beam evaporator comprising:
the crucible of claim 1 as an evaporation source containing the material.

Assignees

• Korea Inst Energy Res

Inventors

• Kim Ki-Hwan
• Cho Jun-Sik
• Cho Ara
• Yun Jae-Ho
• Yoon Kyung Hoon
• Yoo Jin-Su
• Eo Young-Joo
• Ahn Seoung-Kyu
• Ahn Sejin
• Shin Kee Shik
• Park Joo-Hyung
• Gwak Jihye

Classifications

• C23C14/30

  by electron bombardment · CPC title

• C23C14/14

  Metallic material, boron or silicon · CPC title

• C23C14/243 Primary

  Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title