Photosensitive transfer material, pattern formation method, and etching method
US-2015219993-A1 · Aug 6, 2015 · US
US10414918B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10414918-B2 |
| Application number | US-201715641959-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 5, 2017 |
| Priority date | Jul 22, 2016 |
| Publication date | Sep 17, 2019 |
| Grant date | Sep 17, 2019 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A method for preparing a polymer compound including copolymerizing a monomer (m0-1) and a monomer (m0-2) to obtain a first polymer compound and causing the first polymer compound and an acid component to react with each other to obtain a second polymer compound. In the formulae, R 1 and R 2 are each a hydrogen atom, an alkyl group having 1 to 5 carbon atoms and a halogenated alkyl group having 1 to 5 carbon atoms, Va 01 is a divalent hydrocarbon group which may have an ether bond, n a01 is an integer of 0 to 2, Ra 10 is a tertiary alkyl ester-type acid dissociable group, Va 02 is a divalent linking group containing a heteroatom, or a single bond, Ra 07 is a monovalent organic group, n a021 is an integer of 0 to 3, Ra 20 is an acid dissociable group, and n a022 is an integer of 1 to 3.
Opening claim text (preview).
What is claimed is: 1. A method for preparing a polymer compound, comprising: copolymerizing a monomer (m01) represented by general formula (m0-1) and a monomer (m02) represented by general formula (m0-2) to obtain a first polymer compound; and causing the first polymer compound and an acid component to react with each other to obtain a second polymer compound represented by general formula (p0): wherein R 1 is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, Va 01 is a divalent hydrocarbon group which may have an ether bond, n a01 is an integer of 0 to 2, Ra 10 is a tertiary alkyl ester-type acid dissociable group, R 2 is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogenated alkyl group having 1 to 5 carbon atoms, Va 02 is a divalent linking group containing a heteroatom, or a single bond, Ra 07 is a monovalent organic group, n a021 is an integer of 0 to 3, Ra 20 is an acid dissociable group, n a022 is an integer of 1 to 3, and u1, u2, and u3 each independently represent a ratio with respect to all the structural units constituting the second polymer compound and each are a positive number. 2. The method according to claim 1 , wherein Ra 20 is an acid dissociable group represented by general formula (a0-r2-1): wherein Ra′ 1 and Ra′ 2 each independently represent a hydrogen atom or an alkyl group; Ra′ 3 is a hydrocarbon group; Ra′ 3 may form a ring by bonding to any of Ra′ 1 and Ra′ 2 . 3. The method according to claim 1 , wherein the acid component comprises an acid exhibiting a pKa of 0 to 10 in water at 25° C. 4. The method according to claim 3 , wherein the acid component comprises acetic acid. 5. The method according to claim 2 , wherein the acid component comprises an acid exhibiting a pKa of 0 to 10 in water at 25° C. 6. The method according to claim 5 , wherein the acid component comprises acetic acid. 7. The method according to claim 1 , wherein Ra 10 is a tertiary alkyl ester-type acid dissociable group represented by general formula (a0-r1-1): wherein Ya 0 represents a carbon atom; Xa 0 is a group which forms an alicyclic hydrocarbon group together with Ya 0 ; Ra 0 is an aromatic hydrocarbon group which may have a substituent, or a group represented by general formula (a0-f1); Ra 01 to Ra 03 are each independently an aliphatic hydrocarbon group which may have a substituent, or a hydrogen atom, provided that two or more of Ra 01 to Ra 03 may be bonded to each other to form a cyclic structure; and * represents a bond. 8. The method according to claim 2 , wherein Ra 10 is a tertiary alkyl ester-type acid dissociable group represented by general formula (a0-r1-1): wherein Ya 0 represents a carbon atom; Xa 0 is a group which forms an alicyclic hydrocarbon group together with Ya 0 ; Ra 0 is an aromatic hydrocarbon group which may have a substituent, or a group represented by general formula (a0-f1); Ra 01 to Ra 03 are each independently an aliphatic hydrocarbon group which may have a substituent, or a hydrogen atom, provided that two or more of Ra 01 to Ra 03 may be bonded to each other to form a cyclic structure; and * represents a bond. 9. The method according to claim 3 , wherein Ra 10 is a tertiary alkyl ester-type acid dissociable group represented by general formula (a0-r1-1): wherein Ya 0 represents a carbon atom; Xa 0 is a group which forms an alicyclic hydrocarbon group together with Ya 0 ; Ra 0 is an aromatic hydrocarbon group which may have a substituent, or a group represented by general formula (a0-f1); Ra 01 to Ra 03 are each independently an aliphatic hydrocarbon group which may have a substituent, or a hydrogen atom, provided that two or more of Ra 01 to Ra 03 may be bonded to each other to form a cyclic structure; and * represents a bond. 10. The method according to claim 4 , wherein Ra 10 is a tertiary alkyl ester-type acid dissociable group represented by general formula (a0-r1-1): wherein Ya 0 represents a carbon atom; Xa 0 is a group which forms an alicyclic hydrocarbon group together with Ya 0 ; Ra 0 is an aromatic hydrocarbon group which may have a substituent, or a group represented by general formula (a0-f1); Re′ to Ra 03 are each independently an aliphatic hydrocarbon group which may have a substituent, or a hydrogen atom, provided that two or more of Ra 01 to Ra 03 may be bonded to each other to form a cyclic structure; and * represents a bond. 11. The method according to claim 5 , wherein Ra 10 is a tertiary alkyl ester-type acid dissociable group represented by general formula (a0-r1-1): wherein Ya 0 represents a carbon atom; Xa 0 is a group which forms an alicyclic hydrocarbon group together with Ya 0 ; Ra 0 is an aromatic hydrocarbon group which may have a substituent, or a group represented by general formula (a0-f1); Ra 01 to Ra 03 are each independently an aliphatic hydrocarbon group which may have a substituent, or a hydrogen atom, provided that two or more of Ra 01 to Ra 03 may be bonded to each other to form a cyclic structure; and * represents a bond. 12. The method according to claim 6 , wherein Ra 10 is a tertiary alkyl ester-type acid dissociable group represented by general formula (a0-r1-1): wherein Ya 0 represents a carbon atom; Xa 0 is a group which forms an alicyclic hydrocarbon group together with Ya 0 ; Ra 0 is an aromatic hydrocarbon group which may have a substituent, or a group represented by general formula (a0-f1); Ra 01 to Ra 03 are each independently an aliphatic hydrocarbon group which may have a substituent, or a hydrogen atom, provided that two or more of Ra 01 to Ra 03 may be bonded to each other to form a cyclic structure; and * represents a bond.
Oxygen · CPC title
Homopolymers or copolymers of aromatic monomers containing elements other than carbon and hydrogen · CPC title
Oxygen · CPC title
Hydrolysis · CPC title
the macromolecular compound having an alicyclic moiety in a side chain · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.