Semiconductor structure comprising a tensilely stressed suspended membrane including an optical cavity

Patent metadata

Field	Value
Publication number	US-10411434-B2
Application number	US-201816110157-A
Country	US
Kind code	B2
Filing date	Aug 23, 2018
Priority date	Aug 23, 2017
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

each of said optical reflectors is formed of two lateral half-reflectors, which are arranged on either side of a longitudinal axis of the lateral section, so as to at least partially reflect said uneven-order mode.

First claim

The invention claimed is:

1. Semiconductor structure, including:
a semiconductor layer made of a crystalline semiconductor compound, including a membrane suspended above a carrier layer, the suspended membrane being formed:
of a central section, which is tensilely stressed in a plane parallel to the carrier layer, and which forms a waveguide able to support at least one optical mode; and
of a plurality of lateral sections, which are opposite one another with respect to the central section, and which are arranged so as to keep the central section suspended and tensilely stressed, the lateral sections having an average width larger than an average width of the central section; and

at least one optical cavity, bounded by:
two optical reflectors, which are placed in the lateral sections on either side of the central section;

wherein:
the central section is designed to transmit in the direction of the optical reflectors at least one uneven-order mode; and
each of said optical reflectors is formed of two lateral half-reflectors, which are separate from one another and arranged on either side of a longitudinal axis of the lateral section in which they are placed, so as to at least partially reflect said uneven-order mode.

2. Semiconductor structure according to claim 1 , wherein the lateral half-reflectors each have a main separating angle defined between, on the one hand, a median axis passing through a centre of the lateral half-reflector and through an end of the central section located facing the corresponding lateral half-reflector and, on the other hand, the longitudinal axis of the lateral section.

3. Semiconductor structure according to claim 2 , wherein the main separating angle is larger than 25°.

4. Semiconductor structure according to claim 2 , wherein the central section has a local width, at its ends, larger than an average width of the central section, and designed so that the uneven-order mode has a median scattering angle in the direction of the lateral half-reflectors substantially equal to the main separating angle.

5. Semiconductor structure according to claim 2 , wherein the central section has a local width, at its ends, larger than or equal to 0.8 μm, and wherein the lateral half-reflectors each have a main separating angle larger than or equal to 40°.

6. Semiconductor structure according to claim 1 , wherein the uneven-order mode is the first-order mode.

7. Semiconductor structure according to claim 1 , wherein the central section is designed to transmit, in the direction of the optical reflectors, at most the fundamental mode and the first-order mode.

8. Semiconductor structure according to claim 7 , wherein the central section is multimode over its entire length and has at least one transverse dimension such that it permits the transmission of the fundamental mode and at most the first-order mode.

9. Semiconductor structure according to claim 1 , wherein the central section includes a monomode portion designed to support the fundamental mode and, placed between the lateral sections and the monomode portion, mode converters that are designed to convert the fundamental mode into the uneven-order mode.

10. Semiconductor structure according to claim 1 , wherein the crystalline semiconductor compound is a germanium-based compound.

11. Semiconductor structure according to claim 1 , wherein the central section has an average tensile strain such that its energy band structure is direct.

12. Laser source including a semiconductor structure according to claim 1 , wherein the central section forms the gain medium of the laser source.

Assignees

• Commissariat Energie Atomique

Inventors

• Reboud Vincent
• Boutami Salim

Classifications

• G02B6/122

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B2006/12121

  Laser · CPC title

• G02B6/1228

  Tapered waveguides, e.g. integrated spot-size transformers (for coupling with fibres G02B6/305) · CPC title

• G02B2006/12104

  Mirror; Reflectors or the like · CPC title

• G02B6/107

  Subwavelength-diameter waveguides, e.g. nanowires · CPC title