Temperature gradient in microfabricated sensor cavity

Patent metadata

Field	Value
Publication number	US-10409227-B2
Application number	US-201615227929-A
Country	US
Kind code	B2
Filing date	Aug 3, 2016
Priority date	Aug 3, 2016
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

A microfabricated sensor includes a sensor cell with a cell body and a window attached to the cell body. A sensor cavity containing sensor fluid material is located in cell body, open to the window. A signal path extends from a signal emitter outside the sensor cell, through the window and sensor cavity, and to a signal detector. The sensor cell may have an asymmetric thermal configuration, conducive to developing a temperature gradient in the sensor cell. One or more heaters are disposed on the sensor cell, possibly in an asymmetric configuration. Power is applied to the heaters, possibly asymmetrically, so as to develop a temperature gradient in the sensor cell with a low temperature region in the sensor cell, sufficient to condense the sensor fluid in the low temperature region, outside of the signal path.

First claim

What is claimed is:

1. A sensor, comprising:
a sensor cell having a cavity;
an alkali metal disposed in the cavity; and
a heating element disposed adjacent the cavity;
wherein:
an optical signal path extends through the cavity; and
the sensor cell has a thermal configuration conducive to development of a temperature gradient in the cavity in the event that power is applied to the heating element, wherein the temperature gradient defines a location having a minimum temperature which is out of the optical signal path.

2. The sensor of claim 1 , wherein the thermal configuration comprises an asymmetric configuration of the heating element with respect to the cavity.

3. The sensor of claim 1 , wherein the sensor cell has a first heating element disposed on the sensor cell and a second heating element disposed on the sensor cell, and wherein the thermal configuration comprises an asymmetric configuration of the first heating element and the second heating element with respect to the cavity.

4. The sensor of claim 3 , wherein the first heating element has a larger area of conductors than the second heating element.

5. The sensor of claim 1 , wherein the sensor cell has a first heating element disposed on the sensor cell, a second heating element disposed on the sensor cell, and a third heating element disposed on the sensor cell, the second heating element being disposed on the sensor cell opposite from the first heating element with respect to the sensor cavity, and wherein the thermal configuration comprises an asymmetric configuration of the third heating element with respect to the sensor cavity.

6. The sensor of claim 1 , wherein the thermal configuration comprises an asymmetric shape of the cavity with respect to the heating element.

7. The sensor of claim 1 , wherein the thermal configuration comprises a lateral wall of a cell body of the sensor cell between the first heating element and the second heating element which is structurally configured to reduce thermal conductivity between the first heating element and the second heating element.

8. The sensor of claim 1 , further comprising a cell body having an opening defining the cavity and a window attached to the cell body, wherein the thermal configuration comprises a body extension of the cell body on a side of the cavity with thermal connections to a structural member of the sensor.

9. The sensor of claim 1 , wherein the signal path is free of heating elements.

10. A method, comprising:
forming a cavity within a sensor cell;
locating an alkali metal in the cavity; and
disposing a heating element on the sensor cell adjacent the cavity,
wherein:
an optical signal path extends through the cavity;
the sensor cell has a thermal configuration conducive to development of a temperature gradient across the cavity on the condition that power is applied to the first heating element, wherein the temperature gradient defines a spot having a minimum temperature which is out of the optical signal path.

11. The method of claim 10 , wherein the thermal configuration comprises an asymmetric configuration of the heating element with respect to the sensor cavity.

12. The method of claim 10 , wherein the heating element is a first heating element, and the sensor cell has a second heating element disposed on the sensor cell, wherein the thermal configuration comprises an asymmetric configuration of the first heating element and the second heating element with respect to the sensor cavity.

13. The method of claim 12 , wherein the first heating element has a larger area of conductors than the second heating element.

14. The method of claim 10 , wherein the thermal configuration comprises an asymmetric shape of the sensor cavity with respect to the heating element.

15. The method of claim 10 , wherein the heating element is a first heating element, and the sensor cell has a second heating element disposed on the sensor cell, the second heating element being disposed on the sensor cell opposite from the first heating element with respect to the sensor cavity, and further comprising forming a lateral wall of a cell body of the sensor cell between the first heating element and the second heating element which is structurally configured to reduce thermal conductivity between the first heating element and the second heating element.

16. The method of claim 10 , further comprising forming within the sensor cell a cell body having an opening defining the sensor cavity and a window attached to the cell body, wherein the thermal configuration comprises a body extension of the cell body on a side of the sensor cavity with thermal connections to a structural member of the sensor.

17. The method claim 10 , further comprising:
configuring a signal emitter to transmit a signal through the sensor cell; and
configuring a signal detector to receive the signal after the signal passes through the sensor cell.

18. A sensor, comprising:
a sensor cell having a sensor cavity located in the sensor cell;
a sensor fluid material disposed in the sensor cavity;
first, second and third heating elements disposed on the sensor cell;
a signal emitter disposed outside the sensor cell; and
a signal detector disposed outside the sensor cell;
wherein:
a signal path extends from the signal emitter through the sensor cavity to the signal detector; and
the sensor cell has a thermal configuration conducive to development of a temperature gradient in the sensor cell in the event that power is applied to the first heating element, wherein the temperature gradient defines a location having a minimum temperature which is out of the signal path within the sensor cell; and
wherein the second heating element is disposed opposite from the first heating element with respect to the cavity, and the thermal configuration comprises an asymmetric configuration of the third heating element with respect to the cavity.

19. The sensor of claim 18 , wherein the sensor fluid material comprises an alkali metal.

20. The sensor of claim 18 , further comprising a fourth heating element disposed opposite the third heating element with respect to the cavity, the third heating element having a larger area of conductors than the fourth heating element.

Assignees

• Texas Instruments Inc

Inventors

• Parsa Roozbeh
• Mirgorodski Iouri N
• French William
• Brockie Nathan
• Gabrys Ann
• Dyer Terry

Classifications

• G01R33/64

  using cyclotron resonance (G01R33/24 takes precedence) · CPC title

• G01R33/00

  Arrangements or instruments for measuring magnetic variables · CPC title

• G04F5/14 Primary

  using atomic clocks · CPC title