Assembly in a microlithographic projection exposure apparatus
US-2019361362-A1 · Nov 28, 2019 · US
US10408263B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10408263-B2 |
| Application number | US-201314398833-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 3, 2013 |
| Priority date | May 16, 2012 |
| Publication date | Sep 10, 2019 |
| Grant date | Sep 10, 2019 |
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Magnetic bearing that is provided with a radial actuator part and an axial actuator part, whereby the aforementioned radial actuator part comprises a laminated stator stack that is provided with a stator yoke, wherein the stator yoke is linked to a closed ferromagnetic structure that surrounds the stator yoke.
Opening claim text (preview).
The invention claimed is: 1. A magnetic bearing comprising a radial actuator part configured to create radial magnetic forces and an axial actuator part configured to create axial magnetic forces, wherein the aforementioned radial actuator part comprises a laminated stator stack that is provided with a stator yoke, wherein the magnetic bearing comprises at least one closed ferromagnetic structure that surrounds a part of the stator yoke, wherein the axial actuator part comprises at least one axial control coil that surrounds the laminated stator stack, and further comprises a pole yoke and two axial poles; wherein permanent magnets are provided between the stator yoke and both axial poles; the permanent magnets are magnetised in an axial direction; and the magnetisation direction of the permanent magnets is opposite at both axial sides of the stator yoke, and wherein a path of an axial control flux crosses a central hole of a stack of laminated ferromagnetic material. 2. The magnetic bearing according to claim 1 , wherein the closed ferromagnetic structure comprises wound flat ribbon. 3. The magnetic bearing according to claim 1 , wherein the closed ferromagnetic structure comprises a ferrite. 4. The magnetic bearing according to claim 1 , wherein the closed ferromagnetic structure comprises a soft magnetic composite powder. 5. The magnetic bearing according to claim 1 , wherein the closed ferromagnetic structure comprises an amorphous or nanocrystalline material. 6. The magnetic bearing according to claim 1 , wherein the closed ferromagnetic structure comprises a number of interconnected parts.
made from sheets · CPC title
Rotating parts of the magnetic circuit · CPC title
with permanent magnets provided in the magnetic circuit of the electromagnets · CPC title
for manufacturing cores, coils, or magnets (H01F41/14 takes precedence; for dynamo-electric machines H02K15/00) · CPC title
with active support of three degrees of freedom · CPC title
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