Diluted solution production method and diluted solution production apparatus

Patent metadata

Field	Value
Publication number	US-10406493-B2
Application number	US-201515509047-A
Country	US
Kind code	B2
Filing date	Aug 4, 2015
Priority date	Sep 16, 2014
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

A diluted solution production method of the present invention is a diluted solution production method of producing a diluted solution of a second liquid by adding the second liquid to a first liquid, the method including feeding the first liquid to a first pipe; and controlling pressure in a tank that stores the second liquid to add, through the second pipe that connects the tank to the first pipe, the second liquid to the first liquid in the first pipe. Adding the second liquid includes measuring a flow rate of the first liquid or the diluted solution that flows through the first pipe; measuring a component concentration of the diluted solution; and controlling the pressure in the tank, based on the measured values of the flow rate and the component concentration, so as to adjust the component concentration of the diluted solution to a specified value.

First claim

The invention claimed is:

1. A diluted solution production method of producing a diluted solution of a second liquid by adding the second liquid to a first liquid, the method comprising:
feeding the first liquid to a first pipe; and
controlling pressure in a tank that stores the second liquid so as to add, through a second pipe that connects the tank to the first pipe, the second liquid to the first liquid flowing through the first pipe,
adding the second liquid including:
measuring a flow rate of the first liquid or the diluted solution that flows through the first pipe;
measuring a component concentration of the diluted solution;
measuring pressure in the first pipe;
controlling pressure in the tank, based on measured values of the flow rate, component concentration, and the pressure in the first pipe, so as to adjust the component concentration of the diluted solution to a specified value.

2. The diluted solution production method according to claim 1 , wherein
adding the second liquid includes feeding the second liquid to the second pipe in a laminar flow state.

3. The diluted solution production method according to claim 1 , wherein
adding the second liquid includes feeding the second liquid to the second pipe having an inner diameter in a range of more than 0.1 mm and 4 mm or less.

4. The diluted solution production method according to claim 1 , wherein
measuring the pressure in the first pipe includes measuring an in-pipe pressure at a connection between the first pipe and the second pipe.

5. The diluted solution production method according to claim 4 , wherein
adding the second liquid further includes adjusting the in-pipe pressure at the connection to be a specified value based on the measured value of the in-pipe pressure.

6. The diluted solution production method according to claim 1 , wherein
the first liquid is ultrapure water, and the second liquid is an aqueous solution containing dissolved electrolyte.

7. The diluted solution production method according to claim 1 , wherein
the first liquid is ultrapure water, and the second liquid is an ammonia aqueous solution.

Assignees

• Organo Corp

Inventors

• Hayashi Yoshifumi
• Yamashita Yukinari
• Yamanaka Koji
• Yano Daisaku

Classifications

• H10P70/15

  by wet cleaning only (H10P70/52 takes precedence) · CPC title

• G05D11/131 Primary

  by measuring the values related to the quantity of the individual components (G05D11/139 takes precedence) · CPC title

• B01F2215/0431

  Numerical size values, e.g. diameter of a hole or conduit, area, volume, length, width, or ratios thereof · CPC title

• C11D7/04

  Water-soluble compounds · CPC title

• B01F3/088

  Operations & Transport · mapped topic