ESD protection device and method for producing the same

Patent metadata

Field	Value
Publication number	US-10403584-B2
Application number	US-201715831457-A
Country	US
Kind code	B2
Filing date	Dec 5, 2017
Priority date	Jul 1, 2015
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

An ESD protection device includes an insulating ceramic body including a cavity, first and second discharge electrodes disposed so as to partially face each other with the cavity interposed therebetween, and a supporting electrode disposed so as to be at least partially exposed to the cavity and to be electrically connected to the first and second discharge electrodes. A void isolated from the cavity is provided in at least a portion of a boundary region between at least one of the first and second discharge electrodes, the supporting electrode, and the insulating ceramic body.

First claim

What is claimed is:

1. An ESD protection device comprising:
an insulating ceramic body including a cavity;
first and second discharge electrodes disposed so as to partially face each other with the cavity interposed therebetween; and
a supporting electrode disposed so as to be at least partially exposed to the cavity and to be electrically connected to the first and second discharge electrodes; wherein
at least one void isolated from the cavity is provided in at least a portion of a boundary region between at least one of the first and second discharge electrodes, the supporting electrode, and the insulating ceramic body.

2. The ESD protection device according to claim 1 , wherein a principal surface, excluding end surfaces, of the first discharge electrode and a principal surface, excluding end surfaces, of the second discharge electrode are located on different planes.

3. The ESD protection device according to claim 2 , wherein the first discharge electrode includes a first via conductor and the first via conductor exposed to the cavity.

4. The ESD protection device according to claim 3 , wherein the at least one void is provided in at least a portion of a boundary region between the first via conductor, the supporting electrode, and the insulating ceramic body.

5. The ESD protection device according to claim 2 , wherein the first discharge electrode includes a first via conductor, and the second discharge electrode includes a second via conductor, the first via conductor and the second via conductor being exposed to the cavity and facing each other.

6. The ESD protection device according to claim 5 , wherein a first void of the at least one void is provided in at least a portion of a boundary region between the first via conductor, the supporting electrode, and the insulating ceramic body, and a second void of the at least one void is provided in at least a portion of a boundary region between the second via conductor, the supporting electrode, and the insulating ceramic body.

7. The ESD protection device according to claim 1 , wherein the supporting electrode has a toroidal shape including a through hole that defines the cavity and is disposed inside the insulating ceramic body.

8. The ESD protection device according to claim 7 , wherein at least one of the at least one void is provided on at least one principal surface of the supporting electrode.

9. The ESD protection device according to claim 1 , wherein the supporting electrode has a multilayer structure including a top layer, a middle layer, and a bottom layer, and at least one of the top layer and the bottom layer contains a material more sintering-resistant than that of the middle layer.

10. The ESD protection device according to claim 9 , wherein the middle layer has higher conductivity than at least one of the top layer and the bottom layer.

11. A method for producing the ESD protection device according to claim 1 , comprising:
a step of forming a first discharge electrode and a second discharge electrode on one principal surface of a first ceramic green sheet and one principal surface of a second ceramic green sheet, respectively;
a step of forming a through hole defining a cavity in a supporting electrode ceramic green sheet more sintering-resistant than the first and second ceramic green sheets;
a step of forming a multilayer body by laminating the first and second ceramic green sheets and the supporting electrode ceramic green sheet with the supporting electrode ceramic green sheet sandwiched between the first and second ceramic green sheets such that the first and second discharge electrodes are exposed to the through hole and that the first and second discharge electrodes partially face each other with the through hole interposed therebetween; and
a step of firing the multilayer body.

12. The production method according to claim 11 , wherein the supporting electrode ceramic green sheet contains a material having a sintering temperature higher than sintering temperatures of the first and second ceramic green sheets.

13. The production method according to claim 12 , wherein the first and second ceramic green sheets and the supporting electrode ceramic green sheet are laminated with a pore-forming agent sandwiched between the first and/or second discharge electrode and the supporting electrode ceramic green sheet.

14. The production method according to claim 11 , wherein a principal surface, excluding end surfaces, of the first discharge electrode and a principal surface, excluding end surfaces, of the second discharge electrode are located on different planes.

15. The production method according to claim 11 , wherein the first discharge electrode is formed to include a first via conductor and the first via conductor is formed so as to be exposed to the cavity.

16. The production method according to claim 11 , wherein the first discharge electrode is formed to include a first via conductor, and the second discharge electrode is formed to include a second via conductor, the first via conductor and the second via conductor being disposed so as to be exposed to the cavity and to face each other.

17. The production method according to claim 11 , wherein the supporting electrode ceramic green sheet is formed to have a toroidal shape including a through hole that defines the cavity and is disposed the first and second ceramic green sheets.

18. The production method according to claim 11 , wherein the supporting electrode ceramic green sheet has a multilayer structure including a top layer, a middle layer, and a bottom layer, and at least one of the top layer and the bottom layer contains a material more sintering-resistant than that of the middle layer.

19. The production method according to claim 18 , wherein the middle layer has higher conductivity than at least one of the top layer and the bottom layer.

Assignees

• Murata Manufacturing Co

Inventors

• Adachi Jun
• Miki Takeshi
• Sumi Takahiro

Classifications

• H10W42/60 Primary

  protecting against electrostatic charges or discharges, e.g. Faraday shields (integrated devices comprising arrangements for electrical protection H10D89/60) · CPC title

• H01T21/00

  Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs · CPC title

• H01T4/12

  hermetically sealed · CPC title

• H01T2/02

  comprising a trigger electrode or an auxiliary spark gap · CPC title

• H01T1/20

  Means for starting arc or facilitating ignition of spark gap · CPC title