Method of manufacturing a wire grid polarizer for a display apparatus

Patent metadata

Field	Value
Publication number	US-10401676-B2
Application number	US-201715723645-A
Country	US
Kind code	B2
Filing date	Oct 3, 2017
Priority date	Oct 7, 2016
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

A method of manufacturing a wire grid polarizer for a display apparatus includes the steps of forming a first layer on a base substrate including an active area and a peripheral area surrounding the active area, forming a hard mask layer on the first layer, coating an imprint resin on the hard mask layer, forming an imprint resin pattern by imprinting a stamp on the imprint resin, wherein the stamp is larger than the base substrate, forming a hard mask pattern by patterning the hard mask layer using the imprint resin pattern, forming a wire grid pattern layer by pattering the first layer using the hard mask pattern, forming a photoresist pattern in the active area on the base substrate, removing the hard mask pattern and the wire grid pattern layer in the peripheral area using the photoresist pattern, and forming a capping layer on the wire grid pattern.

First claim

What is claimed is:

1. A method of manufacturing a wire gird polarizer for a display apparatus, the method comprising the steps of:
forming a first layer on a base substrate including an active area and a peripheral area surrounding the active area;
forming a hard mask layer on the first layer;
coating an imprint resin on the hard mask layer;
forming an imprint resin pattern by imprinting a stamp on the imprint resin, wherein the stamp is larger than the base substrate;
forming a hard mask pattern by patterning the hard mask layer using the imprint resin pattern;
forming a wire grid pattern layer by pattering the first layer using the hard mask pattern, wherein the wire grid pattern layer includes a plurality of protrusions in the active area and in the peripheral area;
forming a photoresist pattern in the active area on the base substrate, wherein the photoresist pattern does not overlap the hard mask pattern and the wire grid pattern layer in the peripheral area;
removing the hard mask pattern and the wire grid pattern layer in the peripheral area using the photoresist pattern as an etch barrier; and
forming a capping layer on the wire grid pattern.

2. The method of claim 1 , wherein the step of coating the imprint resin comprises:
forming an adhesion promoter layer on the hard mask layer over both the active area and the peripheral area; and
coating the imprint resin on the adhesion promoter layer over both the active area and the peripheral area.

3. The method of claim 1 , further comprising:
forming a photoresist layer on the first layer before forming the hard mask layer;
removing an outer boundary portion of the photoresist layer; and
removing an outer boundary portion of the first layer using the photoresist layer in which the outer boundary portion is removed.

4. The method of claim 1 , wherein the step of forming the first layer comprises forming the first layer from at least one of the aluminum (Al), titanium (Ti), gold (Au), chromium (Cr), silver (Ag), copper (Cu), nickel (Ni), iron (Fe) and cobalt (Co), and
the step of forming the hard mask layer comprises forming the hard mask layer from a silicon compound.

5. The method of claim 1 , wherein the step of forming the wire grid pattern layer comprises forming a plurality of protrusions having substantially the same shape at substantially uniform intervals at a pitch of about 50 nm to 150 nm.

6. The method of claim 1 , wherein step of forming the capping layer on the wire grid pattern comprises forming air gaps between the protrusions of the wire grid pattern.

7. A method of manufacturing a wire gird polarizer for the display apparatus, the method comprising the steps of:
forming a first layer on a base substrate including an active area and a peripheral area surrounding the active area;
forming a hard mask layer on the first layer;
coating an imprint resin on the hard mask layer;
forming an imprint resin pattern in a first area by imprinting a stamp on the imprint resin, wherein the stamp is smaller than the base substrate, wherein the first area is bigger than the active area;
forming a hard mask pattern by patterning the hard mask layer using the imprint resin pattern;
forming a wire grid pattern layer by pattering the first layer using the hard mask pattern, wherein the wire grid pattern layer includes a plurality of protrusions in the active area and in the peripheral area;
forming a photoresist pattern in the active area on the base substrate on which the wire grid pattern is formed, wherein the photoresist pattern does not overlap the hard mask pattern and the wire grid pattern layer in the peripheral area;
removing the hard mask pattern and the wire grid pattern layer in the peripheral area using the photoresist pattern as an etch barrier; and
forming a capping layer on the wire grid pattern.

8. The method of claim 7 , wherein the step of coating the imprint resin comprises:
forming an adhesion promoter layer on the hard mask layer over both the active area and the peripheral area; and
coating the imprint resin on the adhesion promoter layer over both the active area and the peripheral area.

9. The method of claim 7 , further comprising:
forming a photoresist layer on the first layer before forming the hard mask layer;
removing outer boundary portion of the photoresist layer; and
removing outer boundary portion of the first layer using the photoresist layer in which the outer boundary portion is removed.

10. The method of claim 7 , wherein the step of forming the first layer comprises forming the first layer from at least one of the aluminum (Al), titanium (Ti), gold (Au), chromium (Cr), silver (Ag), copper (Cu), nickel (Ni), iron (Fe) and cobalt (Co), and
the step of forming the hard mask layer comprises forming the hard mask layer from a silicon compound.

11. The method of claim 7 , wherein the step of forming the wire grid pattern layer comprises forming a plurality of protrusions having substantially the same shape at substantially uniform intervals at a pitch of about 50 nm to 150 nm.

12. A method of manufacturing a wire gird polarizer for a display apparatus, the method comprising the steps of:
forming a first layer on a base substrate including an active area and a peripheral area surrounding the active area;
forming a hard mask layer on the first layer;
coating an imprint resin on the hard mask layer;
forming an imprint resin pattern in a first area by imprinting a stamp on the imprint resin, wherein the stamp is smaller than the base substrate, wherein the first area is bigger than the active area;
forming a hard mask pattern by patterning the hard mask layer using the imprint resin pattern;
forming a first photoresist pattern in an active area on the base substrate on which the hard mask pattern is formed, wherein the photoresist pattern does not overlap the hard mask pattern and the first layer in the peripheral area;
removing the hard mask pattern and the first layer in the peripheral area using the first photoresist pattern as an etch barrier; and
forming a wire grid pattern layer by patterning the first layer using the hard mask pattern; and
forming a capping layer on the wire grid pattern.

13. The method of claim 12 , wherein the step of coating the imprint resin comprises:
forming an adhesion promoter layer on the hard mask layer over both the active area and the peripheral area; and
coating the imprint resin on the adhesion promoter layer over both the active area and the peripheral area.

14. The method of claim 12 , further comprising:
forming a second photoresist layer on the first layer before forming the hard mask layer;
removing an outer boundary portion of the second photoresist layer; and
removing an outer boundary portion of the first layer using the second photoresist layer in which the outer boundary portion is removed.

15. The method of claim 14 , wherein the step of forming the second photoresist layer comprises forming a positive type photoresist layer, and
wherein in the step of removing the outer boundary portion of the second photoresist layer, the outer boundary portion of the second photoresist layer is exposed and developed to be removed without an additional mask, or the outer boundary portion is exposed and developed using an additional mask to be removed.

16. The method of claim 12 , wherein in the step of forming the first photoresist pattern, a pattern for forming an alignment key is formed in the peripheral area,
and wherein in the step of removing the hard mask pattern and the first layer in the peripheral area, the

Assignees

• Samsung Display Co Ltd

Inventors

• Kim Sungman
• Song Junho
• Yu Hanjun
• Lee Seon Uk
• Lim Seongsu
• Hwang Tae Hyung

Classifications

• G03F7/0007

  Filters, e.g. additive colour filters; Components for display devices · CPC title

• G02F1/133536 Primary

  Reflective polarizers (G02F1/13362 takes precedence) · CPC title

• G03F7/0002

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G03F7/0035

  Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface · CPC title

• G03F7/16

  Coating processes; Apparatus therefor (applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74) · CPC title