Accelerometer

Patent metadata

Field	Value
Publication number	US-10401378-B2
Application number	US-201514919290-A
Country	US
Kind code	B2
Filing date	Oct 21, 2015
Priority date	Oct 21, 2015
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

Accelerometers as disclosed herein include a proof mass assembly and an accelerometer support. In some examples, a combined height and a combined coefficient of thermal expansion (CTE) of the materials of the accelerometer support is configured to substantially match a CTE of material of the non-moving member with a height substantially similar to the combined height of the accelerometer support. In some examples, the accelerometer support is configured to connect to a center raised pad of the proof mass assembly and maintain a capacitance gap between a capacitance plate on a proof mass of the proof mass assembly and a portion of the non-moving member.

First claim

The invention claimed is:

1. A proof mass assembly comprising:
a proof mass;
an inner hoop surrounding the proof mass, the inner hoop defining a plane;
an outer hoop surrounding the inner hoop;
one or more hoop flexures, wherein the one or more hoop flexures flexibly connect the inner hoop to the outer hoop;
a center pad flexure extending from the inner hoop, wherein a first end of the center pad flexure is coupled to the inner hoop and a second end of the center pad flexure that is opposite the first end is coupled to a center raised pad, and wherein the center pad flexure is flexible in a radial direction and is stiff in a direction normal to the plane defined by the inner hoop; and
two or more proof mass flexures, wherein the two or more proof mass flexures flexibly connect the proof mass to the inner hoop and allow the proof mass to move out of the plane defined by the inner hoop.

2. The proof mass assembly of claim 1 , further comprising a coil attached to the proof mass and the center pad flexure, wherein the proof mass comprises a capacitor plate, and wherein a capacitance center of the capacitor plate is located at a tilt center of the proof mass assembly.

3. The proof mass assembly of claim 1 , further comprising a plurality of pad flexures, wherein the plurality of pad flexures are configured to flexibly connect a plurality of raised pads to the outer hoop.

4. The proof mass assembly of claim 3 , wherein the plurality of pad flexures isolate thermal forces and strains caused by a coefficient of thermal expansion (CTE) mismatch between material of a non-moving member and material of the outer hoop.

5. The proof mass assembly of claim 3 , wherein a dimension and a placement of each pad flexure of the plurality of pad flexures maintain resonant modes of the proof mass assembly above two kilohertz (kHz).

6. The proof mass assembly of claim 3 , wherein the outer hoop comprises a circular shape, and wherein each pad flexure of the plurality of pad flexures is flexible in a radial direction of the outer hoop and stiff in a circumferential direction and a direction normal to the plane of the outer hoop.

7. The proof mass assembly of claim 1 , wherein a dimension and a placement of each hoop flexure of the one or more hoop flexures maintains resonant modes of the proof mass assembly above two kilohertz (kHz).

8. The proof mass assembly of claim 1 , wherein the center pad flexure isolates thermal forces and strains caused by a CTE mismatch between materials of an accelerometer support and a material of the inner hoop.

9. The proof mass assembly of claim 1 , wherein the one or more hoop flexures are configured to isolate the proof mass and the inner hoop from forces and thermal strains of the outer hoop, and wherein the two or more proof mass flexures are configured to isolate the proof mass from forces and thermal strains of the inner hoop.

10. The proof mass assembly of claim 1 , wherein a center of mass of the proof mass is located substantially near a geometric center of the proof mass assembly.

Assignees

• Honeywell Int Inc

Inventors

• Dwyer Paul W
• Becka Stephen F

Classifications

• G01P2015/0837

  the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor · CPC title

• G01P2015/0828

  the mass being of the paddle type being suspended at one of its longitudinal ends · CPC title

• G01P15/132

  with electromagnetic counterbalancing means · CPC title

• G01P15/125 Primary

  by capacitive pick-up · CPC title