Laser unit management system

Patent metadata

Field	Value
Publication number	US-10394133-B2
Application number	US-201815914299-A
Country	US
Kind code	B2
Filing date	Mar 7, 2018
Priority date	Oct 19, 2015
Publication date	Aug 27, 2019
Grant date	Aug 27, 2019

Abstract

A laser unit management system may include a server configured to hold first information provided with access limitation that allows an access with a first access authorization, second information provided with access limitation that allows an access with a second access authorization, and third information provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and a laser unit including a laser output section and a controller, the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure, the controller being configured to store the first information, the second information, and the third information in the server. The second information may include wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other.

First claim

What is claimed is:

1. A laser unit management system, comprising:
a server configured to hold first information, second information, and third information, the first information being provided with access limitation that allows an access with a first access authorization, the second information being provided with access limitation that allows an access with a second access authorization, and the third information being provided with access limitation that allows both an access with the first access authorization and an access with the second access authorization; and
a laser unit including a laser output section and a controller,
the laser output section being configured to output pulsed laser light toward an exposure unit that is configured to perform wafer exposure,
the controller being configured to receive a light emission trigger signal from the exposure unit, control the laser output section based on the light emission trigger signal, and store the first information, the second information, and the third information in the server,

wherein the second information includes wafer-exposure-related information on the exposure unit and laser-control-related information on the laser unit that are in association with each other, the wafer-exposure-related information including wafer-identification information and scan-identification information both received from the exposure unit, the wafer-identification information being related to a wafer on which the wafer exposure is to be performed, and the scan-identification information being related to scan exposure included in the wafer exposure.

2. The laser unit management system according to claim 1 , wherein the first information includes data of a control parameter related to control of the laser unit.

3. The laser unit management system according to claim 2 , wherein
the laser output section includes a laser chamber to which a laser gas is to be fed, and
the control parameter includes one or more of:
an energy control parameter related to control of pulse energy of the pulsed laser light;
a spectrum control parameter related to control of a wavelength of the pulsed laser light; and
a gas control parameter related to control of the laser gas.

4. The laser unit management system according to claim 1 , wherein the third information includes log data related to the laser unit.

5. The laser unit management system according to claim 4 , wherein the log data includes a shot number of the pulsed laser light and the laser-control-related information that are in association with each other.

6. The laser unit management system according to claim 4 , wherein the log data includes data of a total shot number of the pulsed laser light.

7. The laser unit management system according to claim 1 , wherein
the laser output section includes a laser chamber to which a laser gas is to be fed, and
the laser-control-related information includes one or more of:
beam-measurement-related data including a beam profile and a beam pointing of the pulsed laser light;
energy-control-related data related to control of pulse energy of the pulsed laser light;
spectrum-control-related data related to control of a wavelength of the pulsed laser light; and
gas-control-related data related to control of the laser gas.

8. The laser unit management system according to claim 1 , wherein the laser unit includes a memory section configured to delete the second information after a lapse of a predetermined time period.

9. The laser unit management system according to claim 8 , wherein the predetermined time period is set with the second access authorization.

10. The laser unit management system according to claim 1 , wherein a range of contents in the second information is changeable with the second access authorization.

11. The laser unit management system according to claim 1 , wherein a range of contents in the first information is changeable with the first access authorization.

12. The laser unit management system according to claim 1 , wherein the controller is configured to perform:
a first control to read data of a control parameter that is set for controlling the laser unit;
a second control to receive the wafer-exposure-related information from the exposure unit;
a third control to receive the laser-control-related information including measured data obtained by measuring the pulsed laser light;
a fourth control to store the data of the control parameter as the first information to be provided with the access limitation that allows the access with the first access authorization;
a fifth control to store the wafer-exposure-related information and the laser-control-related information in association with each other as the second information to be provided with the access limitation that allows the access with the second access authorization; and
a sixth control to store the laser-control-related information as the third information to be provided with the access limitation that allows both the access with the first access authorization and the access with the second access authorization.

13. The laser unit management system according to claim 12 , wherein
the third control includes receiving the laser-control-related information in synchronization with the wafer-exposure-related information, and
the fifth control includes storing the wafer-exposure-related information and the laser-control-related information that is received in synchronization with the wafer-exposure-related information in association with each other as the second information.

Assignees

• Gigaphoton Inc

Inventors

• Minegishi Yuji
• Igarashi Yutaka
• Ohta Takeshi

Classifications

• H01S3/225

  comprising an excimer or exciplex · CPC title

• H01S3/137

  for stabilising of frequency · CPC title

• H01S3/08009

  using a diffraction grating · CPC title

• H01S3/036

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• G03F7/70575

  Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength · CPC title