Superhydrophobic coating material and method for manufacturing the same

Patent metadata

Field	Value
Publication number	US-10392701-B2
Application number	US-201514815797-A
Country	US
Kind code	B2
Filing date	Jul 31, 2015
Priority date	Aug 1, 2014
Publication date	Aug 27, 2019
Grant date	Aug 27, 2019

Abstract

The present disclosure relates to a superhydrophobic coating material and a method for manufacturing the superhydrophobic coating material. The superhydrophobic coating material according to the present disclosure includes a substrate provided with a three-dimensional nano structure; and a coating layer comprising a rare earth metal oxide formed on the three-dimensional nano structure. The method for manufacturing the superhydrophobic coating material according to the present disclosure includes preparing a substrate provided with a three-dimensional nano structure; and forming a coating layer comprising a rare earth metal oxide on the three-dimensional nano structure by supplying a precursor including a rare earth metal and an oxidant one by one onto the substrate, and the temperature of the substrate is controlled in the forming step so that an atomic ratio of a carbon element in the coating layer is less than 1% to form the coating layer with superhydrophobic property.

First claim

The invention claimed is:

1. A method for manufacturing a superhydrophobic coating material by an atomic layer deposition, the method comprising:
preparing a substrate provided with a three-dimensional nano structure; and
forming a coating layer comprising a rare earth metal oxide on the three-dimensional nano structure by supplying a precursor including a rare earth metal and an oxidant one by one onto the substrate,
wherein the forming of the coating layer comprises:
(a) supplying the precursor including the rare earth metal onto the substrate;
(b) purging impurities of remaining precursor after the combination of the rare earth metal onto the substrate;
(c) supplying the oxidant onto the substrate; and
(d) purging remaining impurities after forming the coating layer including the rare earth metal oxide on the substrate,
wherein a coating layer with superhydrophobic property is formed by repeating the steps of (a) to (d),
wherein the forming of the coating layer is conducted by controlling the temperature of the substrate so that an atomic ratio of a carbon element in the coating layer is less than 1% to form a coating layer with superhydrophobic property,
wherein the rare earth metal comprises yttrium, and
the forming of the coating layer is conducted by controlling the temperature of the substrate to 160 to 170° C. so that an atomic ratio of a carbon element in the coating layer is less than 1% to form a coating layer with superhydrophobic property, and
wherein a contact angle of the coating layer with water is greater than 150°, and superhydrophobic property is maintained after heat treatment at a temperature of 500° C. for 2 hours.

2. The method for manufacturing a superhydrophobic coating material of claim 1 ,
wherein the oxidant comprises at least one selected from H 2 O and plasma O2.

Assignees

• Univ Yonsei Iacf
• Univ Incheon Ind Acad Coop

Inventors

• Kim Hyungjun
• Oh Il-Kwon
• Lee Han-Bo-Ram

Classifications

• C23C16/45555

  applied in non-semiconductor technology · CPC title

• C23C16/405 Primary

  of refractory metals or yttrium · CPC title

• C23C16/045

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• B08B17/065

  the surface having a microscopic surface pattern to achieve the same effect as a lotus flower · CPC title

• C23C16/40

  Oxides · CPC title