Pattern Measurement Apparatus and Flaw Inspection Apparatus
US-2018012349-A1 · Jan 11, 2018 · US
US10388010B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10388010-B2 |
| Application number | US-201715745067-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 13, 2017 |
| Priority date | May 15, 2017 |
| Publication date | Aug 20, 2019 |
| Grant date | Aug 20, 2019 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
The present application provides an image acquiring device and a method of correcting coordinates of the image acquiring device, wherein the method includes: detecting a coordinate of a defect detected in a process; initializing a position of a photographing device according to the coordinate of the defect detected in a preprocessing; then adjusting the position of the photographing device according to a position of the defect in the picture currently captured by the photographing device, so that the defect is located at the center of the picture currently captured by the photographing device; recording the coordinate of the defect at the center of the picture; and providing the coordinate of the defect at the center of the picture to a data management system.
Opening claim text (preview).
What is claimed is: 1. A method of correcting coordinates of an image acquiring device, comprising: acquiring a defect in a sample to be photographed detected in a preprocessing and a first coordinate of the defect; initializing a position of a photographing device according to the first coordinate of the defect, and acquiring a picture currently captured by the photographing device; if the defect in the picture currently captured by the photographing device is not located at the center of the picture, adjusting the position of the photographing device according to a position of the defect in the picture currently captured by the photographing device until the defect in the picture currently captured by the photographing device is located at the center of the currently captured picture; if the defect in the picture currently captured by the photographing device is located at the center of the currently captured picture, photographing the defect and recording a current coordinate of the defect as a second coordinate; and providing the second coordinate of the defect to a data management system, so that a subsequent processing locates the defect according to the second coordinate of the defect, and performs a corresponding operation to the defect. 2. The method of claim 1 , wherein the step of adjusting the position of the photographing device according to the position of the defect in the picture currently captured by the photographing device until the defect in the picture currently captured by the photographing device is located at the center of the currently captured picture comprises: calculating a displacement information of the photographing device according to the position of the defect in the picture currently captured by the photographing device; adjusting the position of the photographing device according to displacement information, and acquiring the picture currently captured by the photographing device after adjusting the position; identifying the position of the defect in the picture currently captured by the photographing device after adjusting the position; if the defect in the picture currently captured by the photographing device after adjusting the position is not located at the center of the picture, adjusting the position of the photographing device until the defect in the picture currently captured by the photographing device is located at the center of the currently captured picture; if the defect in the picture currently captured by the photographing device after adjusting the position is located at the center of the picture, photographing the defect and recording the current coordinate of the defect as the second coordinate. 3. The method of claim 1 , wherein the step of providing the second coordinate of the defect to the data management system comprises: updating the first coordinate of the defect in the sample to be photographed detected in the preprocessing as the second coordinate, and providing the second coordinate of the defect after being updated to the data management system. 4. The method of claim 1 , wherein the step of providing the second coordinate of the defect to the data management system comprises: providing the second coordinate of the defect to the data management system, so that the data management system updates the first coordinate of the defect detected by the preprocessing as the second coordinate. 5. The method of claim 1 , wherein, after the step of photographing the defect and recording the current coordinate of the defect as the second coordinate if the defect in the picture currently captured by the photographing device after adjusting the position is located at the center of the picture, the method further comprises: calculating a coordinate offset according to the second coordinate of the defect and the first coordinate of the defect detected by the preprocessing, so that if photographing a defect in another position of the sample to be photographed, the position of the photographing device is initialized according to the first coordinate of the defect at the another position and the coordinate offset. 6. The method of claim 5 , wherein after the step of initializing the position of the photographing device according to the first coordinate of the defect at the another positions and the coordinate offset, the method further comprises: setting the calculated coordinate offset as the coordinate offset of the defect in the image acquiring device and the defect detected in the sample to be photographed, and of a preprocessing machine of the first coordinate of the defect, so that the second coordinates of all defects in the sample to be photographed within the same preprocessing machine is acquired according to the coordinate offset. 7. The method of claim 1 , wherein after the step of initializing the position of the photographing device according to the first coordinate of the defect, and acquiring the picture currently captured by the photographing device, the method further comprises: photographing the defect if the defect in the picture currently captured by the photographing device is located at the center of the picture. 8. The method of claim 1 , wherein after the step of initializing the position of the photographing device according to the first coordinate of the defect, and acquiring the picture currently captured by the photographing device, the method further comprises: moving a preset distance according to current coordinate of the photographing device, if no defect is located in the picture currently captured by the photographing device; and if the defect appears in a visual field of the photographing device after the photographing device moving the preset distance in any one direction, adjusting the position of the photographing device according to the position of the defect in the picture currently captured by the photographing device. 9. The method of claim 8 , wherein the step of moving the preset distance according to the current coordinate of the photographing device comprises: moving up, down, left, and right in sequence for the preset distance according to the current coordinate of the photographing device. 10. A method of correcting coordinates of an image acquiring device, comprising: acquiring a defect in a sample to be photographed detected in a preprocessing and a first coordinate of the defect; initializing a position of a photographing device according to the first coordinate of the defect, and acquiring a picture currently captured by the photographing device; if the defect in the picture currently captured by the photographing device is not located at the center of the picture, adjusting the position of the photographing device according to a position of the defect in the picture currently captured by the photographing device until the defect in the picture currently captured by the photographing device is located at the center of the currently captured picture; if the defect in the picture currently captured by the photographing device is located at the center of the currently captured picture, photographing the defect and recording a current coordinate of the defect as a second coordinate; and providing the second coordinate of the defect to a data management system, so that a subsequent processing locates the defect according to the second coordinate of the defect, and performs a corresponding operation to the defect. calculating a coordinate offset according to the second coordinate of the defect and the first coordinate of the defect detected by the preprocessing, so that if photographing a defect in another positions of the sample to be photographed, the position of the photographing device is initialized
Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects · CPC title
based on recognised objects · CPC title
Camera processing pipelines; Components thereof · CPC title
Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays (testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309) · CPC title
checking presence/absence · CPC title
Related publications grouped by family.
Answers are generated from the same data shown on this page.