Manufacturing method of radiation imaging apparatus
US-2024063247-A1 · Feb 22, 2024 · US
US10386505B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10386505-B2 |
| Application number | US-201715643909-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 7, 2017 |
| Priority date | Jul 8, 2016 |
| Publication date | Aug 20, 2019 |
| Grant date | Aug 20, 2019 |
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According to one embodiment, a scintillator includes a first layer provided on a surface of a substrate and including thallium activated cesium iodide; and a second layer provided on the first layer and including thallium activated cesium iodide. The second layer includes crystals having a [001] orientation partially diverted from a direction perpendicular to the surface of the substrate. Half width at half maximum of a frequency distribution curve of an angle between the direction perpendicular to the surface of the substrate and the [001] orientation, which is obtained by measuring the angle using EBSD method, is 2.4 degree or less.
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What is claimed is: 1. A scintillator, comprising: a first layer provided on a surface of a substrate and including thallium activated cesium iodide; and a second layer provided on the first layer and including thallium activated cesium iodide, the second layer including crystals having a [001] orientation partially diverted from a direction perpendicular to the surface of the substrate, wherein half width at half maximum of a frequency distribution curve of an angle between the direction perpendicular to the surface of the substrate and the [001] orientation, which is obtained by measuring the angle using EBSD method, is 2.4 degree or less. 2. The scintillator according to claim 1 , wherein a thallium concentration in the first layer is higher than a thallium concentration in the second layer. 3. The scintillator according to claim 1 , wherein a thallium concentration in the first layer is 3 wt % or less. 4. The scintillator according to claim 1 , wherein a thallium concentration in the first layer is 2 wt % or less. 5. The scintillator according to claim 1 , wherein a thallium concentration in the first layer is 1.5 wt % or less. 6. The scintillator according to claim 1 , wherein the first layer has a thickness of 3 μm or less. 7. The scintillator according to claim 1 , wherein the second layer includes a plurality of columnar crystals. 8. A scintillator panel, comprising: a substrate being transmissive for radiation; and a scintillator provided on the substrate, wherein: the scintillator comprises: a first layer provided on a surface of the substrate and including thallium activated cesium iodide, and a second layer provided on the first layer and including thallium activated cesium iodide, the second layer including crystals having a [001] orientation partially diverted from a direction perpendicular to the surface of the substrate; and half width at half maximum of a frequency distribution curve of an angle between the direction perpendicular to the surface of the substrate and the [001] orientation, which is obtained by measuring the angle using EBSD method, is 2.4 degree or less. 9. The scintillator panel according to claim 8 , wherein a thallium concentration in the first layer is higher than a thallium concentration in the second layer. 10. The scintillator panel according to claim 8 , wherein a thallium concentration in the first layer is 3 wt % or less. 11. The scintillator panel according to claim 8 , wherein a thallium concentration in the first layer is 2 wt % or less. 12. The scintillator panel according to claim 8 , wherein a thallium concentration in the first layer is 1.5 wt % or less. 13. The scintillator panel according to claim 8 , wherein the first layer has a thickness of 3 μm or less. 14. A radiation detector, comprising: a substrate including a plurality of photoelectric conversion elements; and the scintillator according to claim 1 , the scintillator being provided on a region of the substrate, and the plurality of photoelectric conversion elements being provided in the region. 15. A radiation detector, comprising: a substrate including a plurality of photoelectric conversion elements; and the scintillator panel according to claim 8 , the scintillator panel being provided on a region of the substrate, and the plurality of photoelectric conversion elements being provided in the region.
Optical details, e.g. reflecting or diffusing layers · CPC title
Halides · CPC title
Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section · CPC title
Products containing multiple oriented crystallites, e.g. columnar crystallites · CPC title
Selection of materials · CPC title
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