Device for in-situ measuring electrical properties of carbon nanotube array

Patent metadata

Field	Value
Publication number	US-10386316-B2
Application number	US-201715598205-A
Country	US
Kind code	B2
Filing date	May 17, 2017
Priority date	May 20, 2016
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

A device for in-situ measuring electrical properties of a carbon nanotube array comprises a chamber, a substrate, a first electrode, a connecting wire, a second electrode, a support structure, and a measuring meter. The substrate, the first electrode, the connecting wire, the second electrode, and the support structure are located inside of the chamber. The measuring meter is located outside of the chamber, and the measuring meter is electrically connected to the first electrode and the second electrode. The first electrode defines a cavity, and the substrate is suspended in the cavity by interaction of the support structure, the second electrode, and the connecting wire.

First claim

What is claimed is:

1. A device for in-situ measuring electrical properties of a carbon nanotube array, comprising:
a chamber, a substrate, a first electrode, a connecting wire, a second electrode, a support structure, and a measuring meter;
wherein the substrate, the first electrode, the connecting wire, the second electrode, and the support structure are located inside of the chamber; the measuring meter is located outside of the chamber, and the measuring meter is electrically connected to the first electrode and the second electrode; and the first electrode defines a cavity, and the substrate is suspended in the cavity and electrically connected to the second electrode.

2. The device of claim 1 , wherein the second electrode comprises a first end and a second end opposite to the first end, and the second end defines a first hole; a part of the connecting wire is inserted into the first hole; and the support structure defines a second hole, and the first end is inserted into the second hole.

3. The device of claim 1 , wherein the substrate comprises a growth substrate used for growing the carbon nanotube array, and the growth substrate is conductive at a growing temperature of the carbon nanotube array.

4. The device of claim 3 , wherein the substrate further comprises a support substrate used to support the growth substrate.

5. The device of claim 3 , wherein the growth substrate comprises a plurality of carbon nanotubes.

6. The device of claim 5 , wherein the plurality of carbon nanotubes are entangled with each other.

7. The device of claim 3 , wherein the connecting wire comprises a support element and a conductive thread, the support element is used to support the conductive thread; the conductive thread comprises a first thread end and a second thread end opposite to the first thread end, the first thread end is electrically connected to the second electrode, and the second thread end is electrically connected to the growth substrate.

8. The device of claim 7 , wherein the conductive thread helically surrounds an outside surface of the support element.

9. The device of claim 7 , wherein the conductive thread is buried inside of the support element, and two opposite ends of the conductive thread protrude out of the support element.

10. The device of claim 7 , wherein the support element is a quartz tube.

11. The device of claim 7 , wherein the conductive thread is a carbon nanotube wire structure comprising a plurality of carbon nanotubes joined end to end by van der Waals attractive force.

12. The device of claim 11 , wherein the plurality of carbon nanotubes are helically oriented around an axial direction of the carbon nanotube wire structure.

13. The device of claim 11 , wherein the plurality of carbon nanotubes substantially extends along the same direction.

14. The device of claim 1 , wherein the first electrode is a hollow cylinder.

15. The device of claim 1 , wherein the first electrode comprises a first conductive plate and a second conductive plate, wherein the first conductive plate is spaced from and electrically connected to the second conductive plate.

16. The device of claim 1 , wherein the second electrode comprises a material that is selected from the group consisting of graphite, carbon fiber, carbon nanotube, and graphene.

Assignees

• Univ Tsinghua
• Hon Hai Prec Ind Co Ltd

Inventors

• Wang Jiang-Tao
• Jin Xiang
• Liu Peng
• Wei Yang
• Jiang Kai-Li
• Fan Shou-Shan

Classifications

• H10P74/207

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G01R29/24

  Arrangements for measuring quantities of charge · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C23C16/26

  Deposition of carbon only · CPC title

• C01B2202/22

  Electronic properties · CPC title