Optical inspection device having a mirror for reflecting light rays, a method of producing a lens using the optical inspection device, and an optical inspection method using the optical inspection device

Patent metadata

Field	Value
Publication number	US-10386266-B2
Application number	US-201815961362-A
Country	US
Kind code	B2
Filing date	Apr 24, 2018
Priority date	Mar 10, 2016
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

An optical inspection device includes: an LED; a chart; a collimator; and a mirror. The LED irradiates the chart with light to deliver light rays to the collimator as on-axis light rays. This allows a pattern on the chart to be projected onto a center of an image sensor through the collimator and an optical system under inspection. The mirror reflects light rays delivered to the mirror through the collimator among the on-axis light rays. This allows the pattern on the chart to be projected onto a periphery of the image sensor through the optical system under inspection.

First claim

What is claimed is:

1. An optical inspection device for inspecting an optical performance of an optical system including at least one lens, the optical inspection device comprising:
a light emitter;
a chart on which a shape to be projected by the light emitter is drawn;
a collimating lens disposed between the chart and the optical system under inspection; and
a mirror disposed between the collimating lens and the optical system under inspection,
wherein the light emitter irradiates the chart with light to deliver light rays to the collimating lens as on-axis light rays, and to project the shape on the chart onto a center of an image sensor through the collimating lens and the optical system under inspection, and
wherein the mirror reflects light rays delivered to the mirror through the collimating lens among the on-axis light rays to project the reflected light rays onto a periphery of the image sensor through the optical system under inspection.

2. The optical inspection device according to claim 1 , wherein the mirror is one of a plurality of mirrors, and
wherein the plurality of the mirrors are arranged to be rotationally symmetrical around an axis which is substantially the same as a center axis of the collimating lens, and are each inclined with respect to the center axis at an angle depending on inspection of the optical system to be inspected.

3. The optical inspection device according to claim 2 , wherein the optical inspection device is configured such that the optical system to be inspected is placed in the optical inspection device so that an optical axis of the optical system to be inspected coincides with the center axis of the collimating lens, and
wherein, defining an incident angle of light necessary for inspection of the optical system under inspection as θ, each of the mirrors is inclined at θ/2 with respect to the center axis.

4. The optical inspection device according to claim 1 , wherein the shape on the chart is substantially circular, and
wherein an area around the shape on the chart is black.

5. The optical inspection device according to claim 1 , further comprising a stage that is movable along the center axis of the collimating lens, and
wherein the image sensor is placed on the stage.

6. The optical inspection device according to claim 1 , further comprising a stage that is movable along the center axis of the collimating lens, and
wherein the chart is placed on the stage.

7. A method of producing a lens of an optical system under inspection through inspection by an optical inspection device, the method comprising:
providing the optical inspection device configured to inspect an optical performance of the optical system under inspection including the lens, the optical inspection device having:
a light emitter;
a chart on which a shape to be projected by the light emitter is drawn;
a collimating lens disposed between the chart and the optical system under inspection; and
a mirror disposed between the collimating lens and the optical system under inspection,

irradiating the chart with light from the light emitter to deliver light rays to the collimating lens as on-axis light rays, and projecting the shape on the chart onto a center of an image sensor through the collimating lens and the optical system under inspection;
reflecting light rays delivered to the mirror through the collimating lens among the on-axis light rays to project the reflected light rays onto a periphery of the image sensor through the optical system under inspection;
obtaining measurements of the lens of the optical system through said irradiating, said projecting, and said reflecting performed by the optical inspection device; and
producing the lens based on the obtained measurements.

8. An optical inspection method for inspecting an optical system including at least one lens, wherein the method uses an optical inspection device including:
a light emitter;
a chart on which a shape to be projected by the light emitter is drawn;
a collimating lens disposed between the chart and the optical system under inspection; and
a mirror disposed between the collimating lens and the optical system under inspection,
the method comprising:

irradiating the chart with light from the light emitter to deliver light rays to the collimating lens as on-axis light rays, and projecting the shape on the chart onto a center of an image sensor through the collimating lens and the optical system under inspection, and
reflecting light rays delivered to the mirror through the collimating lens among the on-axis light rays to project the reflected light rays onto a periphery of the image sensor through the optical system under inspection.

Assignees

• Panasonic Ip Man Co Ltd

Inventors

• Ikawa Yoshihiro
• Chiba Hironobu
• Ueno Yoshihiro

Classifications

• G01M11/02

  Testing optical properties · CPC title

• G01M11/0207 Primary

  Details of measuring devices · CPC title

• G01M11/0292

  of objectives by measuring the optical modulation transfer function (photometry G01J) · CPC title