Mask frame assembly and manufacturing method of the same

Patent metadata

Field	Value
Publication number	US-10385441-B2
Application number	US-201614994906-A
Country	US
Kind code	B2
Filing date	Jan 13, 2016
Priority date	May 13, 2015
Publication date	Aug 20, 2019
Grant date	Aug 20, 2019

Abstract

A mask frame assembly and a manufacturing method of the same are provided. The mask frame assembly includes a frame unit having a plurality of frames to form an opening, a deposition mask extended in a first direction and fixed to the frame unit, and a gap adjusting unit installed between one frame and another frame disposed adjacent to the one frame among the plurality of frames, wherein the gap adjusting unit adjusts a distance between the one frame and the another frame.

First claim

What is claimed is:

1. A mask frame assembly, comprising:
a frame unit having a pair of first frames and a pair of second frames, each of the first frames extending in a first direction and spaced apart each other, each of the second frames extending in a second direction crossing the first direction and spaced apart each other, the second frames being disposed at both ends of the first frames to form an opening defined as an area surrounded by the first frames and the second frames;
a deposition mask extended in the first direction, both ends of the deposition mask being fixed to the second frames; and
gap adjusting units installed between the first frames and the second frames,
wherein the gap adjusting units adjust a distance between the first frames and the second frames to change the area of the opening, and
wherein the gap adjusting unit comprises: a guide member guiding the second frame to linearly move in the first direction; and a spring wire surrounding at least a portion of the guide member and having one end fixed to an end of the first frame and the other end fixed to an end of the second frame.

2. The mask frame assembly of claim 1 , wherein the first frames are shorter than the second frames.

3. The mask frame assembly of claim 1 , wherein the deposition mask is extended and then fixed to the second frames in a state that a distance between the first frames and the second frames is decreased by an external force applied to the frame unit.

4. The mask frame assembly of claim 3 , wherein, when the external force is removed from the frame unit, the distance between the first frames and the second frames changes to a predetermined distance according to a restoring force stored in the gap adjusting units.

5. The mask frame assembly of claim 3 , wherein the deposition mask comprises one or more deposition masks, and an amount of the external force applied to the frame unit is variable according to the number of the deposition masks.

6. The mask frame assembly of claim 3 , wherein the amount of the external force applied to the frame unit decreases when the number of the deposition masks increases.

7. The mask frame assembly of claim 1 , wherein the guide member is formed as a prismatic shape column and inserted into one of the second frames to linearly move in the first direction.

8. A mask frame assembly, comprising:
a pair of first frames arrayed in a first direction, and a pair of second frames arrayed in a second direction to form an opening surrounded by the first frames and the second frames;
a gap adjusting unit configured to connect the first frames and the second frames to adjust size of the opening;
a deposition mask extending in the first direction and fixed to the pair of second frames, and
wherein the gap adjusting unit comprises: a guide member guiding the second frame to linearly move in the first direction; and a spring wire surrounding at least a portion of the guide member and having one end fixed to an end of the first frame and the other end fixed to an end of the second frame.

9. The mask frame assembly of claim 8 , wherein the deposition mask is fixed to the pair of the second frames in a state that the size of the opening is reduced when the pair of the second frames contract in the first direction.

10. The mask frame assembly of claim 9 , wherein
the deposition mask comprises one or more deposition masks, and
an amount of external force applied to the second frames decreases when the number of the deposition masks increases.

Assignees

• Samsung Display Co Ltd

Inventors

• Oh Yoonchan
• Yang Jongho
• Cho Youngsun
• Hong Jaemin

Classifications

• C23C16/4585

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C23C16/042

  using masks · CPC title