Optical fiber base material manufacturing apparatus

Patent metadata

Field	Value
Publication number	US-10377659-B2
Application number	US-201715673417-A
Country	US
Kind code	B2
Filing date	Aug 10, 2017
Priority date	Dec 22, 2014
Publication date	Aug 13, 2019
Grant date	Aug 13, 2019

Abstract

An optical fiber base material manufacturing apparatus including a reaction chamber; a burner that has a portion thereof inserted into the reaction chamber through an insertion opening that creates a connection between the inside and outside of the reaction chamber, and emits a flame toward a starting member positioned within the reaction chamber; and a seal connection member that creates an air-tight seal between the burner and the reaction chamber at the insertion opening. One end of the seal connection member firmly contacts the burner inserted therethrough, another end of the seal connection member firmly contacts the reaction chamber and has a through-hole formed therein through which the burner is inserted without contacting the seal connection member, and the seal connection member includes a connecting portion that connects the one end to the other end, while preventing transfer of stress between the one end and the other end.

First claim

What is claimed is:

1. A method comprising:
inserting a portion of a burner into a reaction chamber through an insertion opening that creates a connection between the inside and outside of the reaction chamber;
emitting a flame, using the burner, toward a starting member positioned within the reaction chamber;
creating an air-tight seal, using a seal connection member, between the burner and the reaction chamber at the insertion opening; wherein
a first end of the seal connection member firmly contacts the burner inserted therethrough,
a second end of the seal connection member firmly contacts the reaction chamber and has a through-hole formed therein through which the burner is inserted without contacting the seal connection member,
the seal connection member includes a connecting portion that connects the first end to the second end, while preventing transfer of stress between the first end and the second end, and
an inner diameter of the seal connection member decreases from the second end of the seal connection member to the first end of the seal connection member.

2. The method according to claim 1 , further comprising:
raising and rotating, using a raising mechanism, the starting member positioned within the reaction chamber.

3. The method according to claim 1 , further comprising:
ejecting fluid, using an exhaust pipe, from the inside of the reaction chamber to the outside.

4. The method according to claim 1 , wherein
the seal connection member includes the connecting portion that has a curved cross-sectional shape in a cross section including a central axis of the burner.

5. The method according to claim 1 , further comprising creating air-tight contact of the seal connection member with a tip of a protruding portion that protrudes to the outside of the reaction chamber and connects the inside and the outside of the reaction chamber.

6. The method according to claim 5 , wherein
the reaction chamber includes a flange portion on a tip of the protruding portion that extends along a surface intersecting a protrusion direction of the protruding portion, and firmly contacts the seal connection member at the flange portion.

7. The method according to claim 6 , wherein
the seal connection member includes a flange portion at the second end that extends radially outward, and firmly contacts the flange portion of the protruding portion at the flange portion to create an air-tight connection.

8. The method according to claim 1 , wherein
the inner diameter is less than the outer diameter of the burner at the first end, and the seal connection member firmly contacts the burner due to a returning force of elastic deformation caused by insertion of the burner.

9. The method according to claim 8 , wherein
thickness of the connecting portion is less than thickness of the seal connection member at least at one of the first end and the second end, and when the at least one of the first end and the second end is deformed, deformation of the connecting portion prevents stress from being transferred between the first end and the second end.

10. The method according to claim 1 , wherein
the seal connection member has thermal resistance to maintain a shape against a flame emitted by the burner, and has oxidation resistance to restrict oxidation due to raw material gas introduced into the reaction chamber.

11. The method according to claim 1 , further comprising forming a portion of the seal connection member from a flexible material.

12. The method according to claim 11 , wherein
the flexible material includes resin.

13. The method according to claim 12 , further comprising forming the seal connection member from a material including at least one of silicon resin and modified silicon resin.

14. The method according to claim 13 , wherein
the inner diameter is greater than or equal to 80% and less than 100% of an outer diameter of the burner.

15. The method according to claim 13 , wherein
the connecting portion connecting the first end and the second end of the seal connection member has a thickness that is greater than or equal to 0.2 mm and less than or equal to 3 mm.

16. The method according to claim 15 , wherein
the connecting portion connecting the first end and the second end of the seal connection member has a durometer A hardness that is greater than or equal to 30 and less than or equal to 60.

17. The method according to claim 1 , wherein the seal connection member is dome-shaped.

18. A method of manufacturing an optical fiber base material using an optical fiber base material manufacturing apparatus that includes a reaction chamber, a burner, and a seal connection member, the method comprising:
emitting a flame from the burner toward a starting member positioned inside the reaction chamber through a portion of the burner inserted into the reaction chamber through an insertion opening that creates a connection between the inside and outside of the reaction chamber, the portion surrounded by the seal connection member, which creates an air-tight seal between the burner and the reaction chamber at the insertion opening, wherein
one end of the seal connection member firmly contacts the burner inserted therethrough,
another end of the seal connection member firmly contacts the reaction chamber and has a through-hole formed therein through which the burner is inserted without contacting the seal connection member,
the seal connection member includes a connecting portion that connects the one end to the another end, while preventing transfer of stress between the one end and the another end, and
an inner diameter of the seal connection member decreases from the another end of the seal connection member to the one end of the seal connection member.

Assignees

• Shinetsu Chemical Co

Inventors

• Terashima Masami
• Nagao Takaaki
• Matsunaga Yuichi

Classifications

• C03B37/01406

  Deposition reactors therefor · CPC title

• C03B37/0142 Primary

  Reactant deposition burners · CPC title

• C03B2207/42

  Assembly details; Material or dimensions of burner; Manifolds or supports · CPC title