Probe landing detection

Patent metadata

Field	Value
Publication number	US-10373799-B2
Application number	US-201615253680-A
Country	US
Kind code	B2
Filing date	Aug 31, 2016
Priority date	Aug 31, 2016
Publication date	Aug 6, 2019
Grant date	Aug 6, 2019

Abstract

Probe landing is detected by detecting a change in a vibration of the probe in a plane substantially parallel to the work piece surface as the probe is lowered toward the work piece. The vibration may be observed, for example, by acquiring multiple electron microscope images of the probe as it moves and analyzing the images the determine a characteristic, such as the amplitude of the vibration. When the probe contacts the work piece surface, the friction between the probe tip and the work piece surface will change the characteristic of the vibration, which can be detected to indicate that the probe has landed.

First claim

I claim as follows:

1. A method for detection of contact of a probe with a work piece surface, comprising:
moving the probe towards the work piece surface;
vibrating the probe to induce periodic oscillations of the probe in a plane substantially parallel to the work piece surface;
monitoring one or more vibration characteristics of the probe based on multiple images of at least a portion of the probe acquired by coordinating the acquisition of the multiple images with the periodic oscillations of the probe; and
detecting a change, caused by contacting the work piece surface with the probe, in at least one of the vibration characteristics.

2. The method of claim 1 , wherein the probe includes a probe tip and wherein acquiring multiple images of at least of the portion of the probe comprises acquiring multiple images of at least a portion of the probe tip.

3. The method of claim 1 , wherein acquiring multiple images of at least of the portion of the probe comprises acquiring multiple images with a scanning electron microscope.

4. The method of claim 1 , wherein detecting a change in at least one of the vibration characteristics comprises detecting the change by computer analysis of the multiple images.

5. The method of claim 1 , wherein detecting a change in at least one of the vibration characteristics comprises detecting a change in the amplitude of the vibration.

6. The method of claim 1 , wherein
each periodic oscillation corresponding to a different vibration cycle of the probe.

7. The method of claim 1 , wherein:
vibrating the probe comprises driving a probe base to provide the periodic oscillation; and
coordinating the acquisition of the multiple images with the periodic oscillations of the probe includes coordinating the acquisition of the multiple images with the phase of the periodic oscillation of the probe base.

8. The method of claim 1 , wherein acquiring multiple images of the portion of the probe includes acquiring at least 2 images per vibration cycle of the probe.

9. The method of claim 1 , further comprising terminating motion of the probe towards the workpiece surface when contact between the probe and the workpiece surface is detected.

10. The method of claim 1 , wherein the method is performed automatically.

11. The method of claim 1 , wherein the probe is a first probe and wherein one or more additional probes are moved and monitored simultaneously, at the same time as the first probe.

12. The method of claim 1 , wherein detecting a change in at least one of the vibration characteristics of the probe comprises detecting a change in phase of the vibration of the probe.

13. The method of claim 1 , wherein detecting a change in at least one of the vibration characteristics comprises detecting mechanical strain in the probe.

14. The method of claim 1 , in which:
vibrating the probe comprises moving an actuator connected to the probe; and
monitoring one or more vibration characteristics comprises monitoring an electrical current through the actuator, a power consumption of the actuator, or other electrical requirement of the actuator, during vibration of the probe by the actuator.

15. A method of detecting contact between a probe and a work piece surface, comprising:
moving the probe in a direction having a first component normal to the work piece surface and having a second component parallel to the work piece surface, wherein the probe is oscillated periodically parallel to the work piece surface;
monitoring the motion of the probe in the direction of the second component based on multiple images of at least a portion of the probe acquired by coordinating the acquisition of the multiple images with the periodic oscillations of the probe;
detecting a change in the motion of the probe in the direction of the second component, caused by the probe contacting the work piece surface; and
terminating the motion of the probe in a direction of the first component.

16. The method of claim 15 in which moving the probe in the direction having the first component normal to the work piece surface and having the second component parallel to the work piece surface comprises moving the probe toward the work piece surface while vibrating the probe parallel to the work piece surface.

17. An apparatus for testing a circuit, comprising:
a circuit probe assembly including a probe and at least one actuator configured to position the probe;
a monitoring device configured to monitor the probe;
a controller configured to control the monitoring device and to control the actuator to move the probe; and
a computer memory storing computer instructions for controlling the monitoring device and the actuator for:
moving the probe towards a work piece surface;
vibrating the probe to induce periodic oscillations of the probe in a plane substantially parallel to the work piece surface;
monitoring the vibration based on multiple images of at least a portion of the probe acquired by coordinating the acquisition of the multiple images with the periodic oscillations of the probe; and
detecting a change in the vibration caused by the probe contacting the work piece surface.

18. The apparatus of claim 17 in which the monitoring device comprises an electron microscope.

19. The apparatus of claim 17 in which the monitoring device comprises a strain gauge for monitoring the probe or an electrical meter for monitoring changes in actuator electrical requirements.

Assignees

• Fei Co

Inventors

• Neuman Yoav

Classifications

• G01V1/001

  Acoustic presence detection · CPC title

• H01J37/261 Primary

  Details · CPC title

• H01J2237/0203

  Protection arrangements · CPC title

• H01J2237/208

  Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems · CPC title

• G01Q20/00 Primary

  Monitoring the movement or position of the probe · CPC title