Integrated electronic device for detecting ultraviolet radiation

Patent metadata

Field	Value
Publication number	US-10371572-B2
Application number	US-201815900049-A
Country	US
Kind code	B2
Filing date	Feb 20, 2018
Priority date	May 29, 2015
Publication date	Aug 6, 2019
Grant date	Aug 6, 2019

Abstract

An integrated electronic device for detecting the composition of ultraviolet radiation includes a cathode region formed by a semiconductor material with a first type of conductivity. A first anode region and a second anode region are laterally staggered with respect to one another and are set in contact with the cathode region. The cathode region and the first anode region form a first sensor. The cathode region and the second anode region form a second sensor. In a spectral range formed by the UVA band and by the UVB band, the first and second sensors have, respectively, a first spectral responsivity and a second spectral responsivity different from one another.

First claim

The invention claimed is:

1. A system, comprising:
an integrated electronic device configured to detect the composition of ultraviolet radiation, the integrated electronic device including:
a cathode region formed by a semiconductor material, the cathode region having a surface;
a separation region formed on the surface of the cathode region;
a first patterned anode region and a second patterned anode region spaced apart on the surface of the cathode region, the separation region positioned between the first and second patterned anode regions and each of the first and second patterned anode regions including a plurality of sub-regions formed spaced apart on the surface of the cathode region, the plurality of sub-regions of the first patterned anode region being electrically coupled to one another and the plurality of sub-regions of the second patterned anode region being electrically coupled to one another;
a first sensor including the cathode region and the first anode region, the first sensor configured to generate a first electrical signal responsive to incident ultraviolet radiation having a spectral range corresponding to the UVA band and the UVB band, the first sensor having a first non-zero spectral efficiency for incident ultraviolet radiation in the spectral range;
a second sensor including the cathode region and the second anode region, the second sensor configured to generate a second electrical signal responsive to incident ultraviolet radiation in the spectral range, the second sensor having a second non-zero spectral efficiency different than the first spectral efficiency;

a notification device configured to provide a notification; and
a processor coupled to the integrated electronic device and to the notification device, the processor configured to determine an estimate of the power of the ultraviolet radiation in the UVA band and an estimate of the power of ultraviolet radiation in the UVB band as a function of the first and second electric signals, and to control the notification device to provide notifications of the estimated powers of ultraviolet radiation in the UVA and UVB bands.

2. The system of claim 1 , wherein the processor is further configured to provide an ultraviolet index notification indicating a total amount of incident ultraviolet radiation.

3. The system of claim 2 , wherein the notification device comprises a display.

4. The system of claim 1 , wherein the processor comprises a microcontroller.

5. The system of claim 1 , wherein the processor is configured to determine the estimate of the power of ultraviolet radiation in the UVA band on the basis of the second electrical signal, and wherein said processing stage is further configured to determine the estimate of the power of ultraviolet radiation in the UVB band on the basis of the first electrical signal and of the estimate of the power of ultraviolet radiation in the UVA band.

6. The system of claim 1 further comprising:
a first transimpedance amplifier coupled to receive the first electrical signal;
a second transimpedance amplifier coupled to receive the second electrical signal;
an analog-to-digital converter coupled to the first and second transimpedance amplifiers and to the processor, the analog-to-digital converter configured to digitize the first and second electrical signals and provide these digitized first and second electrical signals to the processor.

7. The system of claim 6 , wherein the first and second sensors are formed in a first die and the first and second transimpedance amplifiers, analog-to-digital converter, and the processor are formed in a second die.

8. The system of claim 1 , wherein each of the first and patterned anode regions are formed from a material that is substantially transparent to ultraviolet radiation.

9. The system of claim 1 , wherein each of the first and patterned anode regions are formed from nickel silicide.

10. The system of claim 1 , wherein each of the first and second patterned anode regions are formed from a semiconductor material.

11. The system of claim 1 , wherein the cathode region comprises an epitaxial layer.

12. An integrated electronic device, comprising:
a cathode region having a surface;
a first anode region and a second anode region laterally staggered with respect to one another and formed on the surface of the cathode region;
a separation region of insulating material formed on the surface of the cathode region;
a first sensor including the cathode region and the first anode region that in operation generates a first electrical signal responsive to incident ultraviolet radiation, the ultraviolet radiation having a spectral range corresponding to the UVA band and the UVB band and the first sensor having a first non-zero spectral efficiency for incident ultraviolet radiation in the spectral range;
a second sensor including the cathode region and the second anode region that in operation generates a second electrical signal responsive to incident ultraviolet radiation in the spectral range, the second electrical signal independent of the first electrical signal and the second sensor having a second non-zero spectral efficiency different than the first spectral efficiency.

13. The integrated electronic device of claim 12 , wherein the first sensor has a nonzero spectral efficiency in the spectral range and the second sensor has a substantially zero spectral efficiency in one of the UVA band and the UVB band.

14. The integrated electronic device of claim 12 , wherein the each of the first and second anode regions comprises one of nickel silicide and a semiconductor material.

15. A method, comprising:
forming a cathode region of semiconductor material having a surface;
forming a first patterned anode region on the surface of cathode region, the first patterned anode region including a plurality of sub-regions having portions of the surface of the cathode region exposed between adjacent ones of the sub-regions;
forming a second patterned anode region on the surface of the cathode region, the second patterned anode region including a plurality of sub-regions having portions of the surface of the cathode region exposed between adjacent ones of the sub-regions;
forming a filtering region in association with one of the first and second patterned anode regions to form a first sensor including the cathode region and the first patterned anode region and having a spectral range of the UVA and UVB bands and a first spectral efficiency over these bands, and a second sensor including the cathode region and the second patterned anode region having a spectral range of the UVA and UVB bands and a second spectral efficiency over these bands that is different from the first spectral efficiency.

16. The method of claim 15 , wherein forming a cathode region of semiconductor material having the surface comprises epitaxially growing the cathode region on a substrate.

17. The method of claim 15 , wherein forming the first and second patterned anode regions comprise forming a material that is substantially transparent to ultraviolet radiation on the surface of the cathode region and patterning the material to form the first and second patterned anode regions.

18. The method of claim 15 , wherein forming the first and second patterned anode regions comprise forming a layer formed from one of nickel silicide and a semiconductor material on the surface of the cathode region and patterning the layer to form the first and second patterned anode regions.

19. The method of claim 15 further comprising for

Assignees

• St Microelectronics Srl

Inventors

• Mazzillo Massimo Cataldo
• SCIUTO Antonella
• Badalà Paolo

Classifications

• H01L27/14621

  Electricity · mapped topic

• H01L27/14683

  Electricity · mapped topic

• G01J1/429 Primary

  applied to measurement of ultraviolet light (using counting tubes G01T) · CPC title

• H01L31/108

  Electricity · mapped topic

• H01L31/1013

  Electricity · mapped topic