Method for determining height information of a sample, and scanning microscope

Patent metadata

Field	Value
Publication number	US-10371501-B2
Application number	US-201715419166-A
Country	US
Kind code	B2
Filing date	Jan 30, 2017
Priority date	Mar 7, 2016
Publication date	Aug 6, 2019
Grant date	Aug 6, 2019

Abstract

The invention relates to a method for determining height information of a sample, and to a scanning microscope. The method comprises the following steps: generating an illumination spot; illuminating the sample with the illumination spot; capturing an image of a reflection of the illumination spot at the sample; evaluating the lateral distribution of the image; determining the height information from the lateral distribution; wherein the illumination spot has a three dimensional illumination pattern and/or the image in a detection beam path has a three dimensional detection pattern. The scanning microscope is characterized in that an illumination device (07) and/or a detector device comprise(s) a means for generating a three dimensional pattern with a change in the lateral intensity distribution that is asymmetrical along the optical axis, and an evaluation device is configured to determine height information from the detector signal.

First claim

The invention claimed is:

1. A method for determining height information of a sample, the method comprising:
generating an illumination spot;
illuminating the sample with the illumination spot;
capturing an image of a reflection of the illumination spot at the sample;
evaluating the lateral distribution of the image;
determining the height information from the lateral distribution;
wherein the illumination spot has a three dimensional illumination pattern and/or the image in a detection beam path has a three dimensional detection pattern.

2. The method of claim 1 , wherein at least one of the illumination pattern and the detection pattern have a change in the lateral intensity distribution which is asymmetrical along the optical axis, wherein the optical axis runs parallel to a plane normal of a sample plane in which the sample is positioned.

3. The method of claim 1 , wherein a phase profile is used for generating at least one of the illumination pattern and the detection pattern.

4. The method of claim 3 , wherein the phase profile is linear.

5. The method of claim 1 , wherein intensity information of the image is furthermore determined.

6. The method of claim 1 , wherein the illumination pattern is generated by the use of a laser beam with a rotating intensity distribution.

7. The method of claim 1 , wherein a plurality of illumination spots is scanned simultaneously over the sample plane.

8. A scanning microscope, comprising
an illumination device for illuminating a sample with an illumination spot;
a scanning apparatus for scanning the illumination spot over the sample;
a detector device for the spatially resolved detection of the illumination spot reflected by the sample;
an evaluation device for evaluating the signal of the detector device;
characterized in that
wherein at least one of the illumination device and the detector device is configured to generate a three dimensional pattern with a change in the lateral intensity distribution that is asymmetrical along the optical axis; and
the evaluation device is configured to determine height information from the detector signal.

9. The scanning microscope of claim 8 , wherein at least one of the illumination device and the detector device comprises a phase element configured to generate the three dimensional pattern.

10. The scanning microscope of claim 9 , wherein the phase element comprises a glass wedge which is arranged in a pupil plane of the scanning microscope, and covers at least part of the illumination spot and/or of the image.

11. The scanning microscope of claim 10 , wherein the glass wedge is a first glass wedge and the phase element comprises a second glass wedge, wherein the first glass wedge and the second glass wedge are arranged in opposite directions and each cover half of the illumination pattern.

12. The scanning microscope of claim 8 , wherein at least one of the illumination device and the detector device comprises a laser beam with a rotating intensity distribution that is configured to generate the illumination pattern is.

13. The scanning microscope of claim 8 , wherein the detector device is a quadrant photodiode.

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Kalkbrenner Thomas
• Lippert Helmut

Classifications

• G02B21/008

  Details of detection or image processing, including general computer control · CPC title

• G02B21/006

  focusing arrangements; selection of the plane to be imaged · CPC title

• G02B21/0056

  based on optical coherence, e.g. phase-contrast arrangements, interference arrangements · CPC title

• G02B21/0032

  Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title

• G02B21/0016

  Technical microscopes, e.g. for inspection or measuring in industrial production processes · CPC title