Method of using chemically patterned guide layers in chemoepitaxy directing of block co-polymers

Patent metadata

Field	Value
Publication number	US-10366887-B2
Application number	US-201715724662-A
Country	US
Kind code	B2
Filing date	Oct 4, 2017
Priority date	Oct 4, 2016
Publication date	Jul 30, 2019
Grant date	Jul 30, 2019

Abstract

The present invention is broadly concerned with materials, processes, and structures that allow an underlayer to be imaged directly using conventional lithography, thus avoiding the photoresist processing steps required by prior art directed self-assembly (DSA) processes. The underlayers can be tailored to favor a selected block of the DSA block co-polymers (BCP), depending on the pattern, and can be formulated either to initially be neutral to the BCP and switch to non-neutral after photoexposure, or can initially be non-neutral to the BCP and switch to neutral after exposure. These materials allow fast crosslinking to achieve solvent resistance and possess good thermal stability.

First claim

We claim:

1. A method of forming a microelectronic structure, said method comprising: providing a stack comprising:
a substrate having a surface; and
one or more optional intermediate layers on said substrate surface;
forming a patternable layer having first and second surfaces, said first surface being on said intermediate layers, if present, or on said substrate surface, if no intermediate layers are present, and said second surface being remote from said first surface, said patternable layer having an initial surface property at said second surface;
exposing said patternable layer to radiation so as to selectively alter said initial surface property to yield an altered surface property at the areas of exposure, forming a patterned layer;
without altering said patterned layer, applying a self-assembling composition to the second surface of said patterned layer, said composition comprising a block copolymer comprising a first block and a second block; and
causing said composition to self-assemble into a self-assembled layer in response to the initial surface property, the altered surface property, or both, wherein said self-assembled layer comprises a first self-assembled region and a second self-assembled region different from said first self-assembled region, wherein:
said initial surface property is a lack of affinity towards one of said first and second blocks over the other of said first and second blocks; and
during said exposing, an affinity to one of said first and second blocks over the other of said first and second blocks develops, said affinity being the altered surface property.

2. The method of claim 1 , wherein said initial surface property comprises an initial surface energy and the altered surface property comprises an altered surface energy that is different from said initial surface energy.

3. The method of claim 2 , wherein:
the dispersive and polar components of said initial surface energy are from about 33 dyne/cm to about 41 dyne/cm and from about 3 dyne/com to about 10 dyne/cm, respectively; and
the dispersive and polar components of said altered surface energy are from about 25 dyne/cm to about 36 dyne/cm and from about 8 dyne/cm to about 13 dyne/cm, respectively.

4. The method of claim 1 , wherein said affinity is towards the first block, and during said causing the first block assembles and forms said first self-assembled region at said altered surface property.

5. The method of claim 1 , wherein said patternable layer comprises a polymer dispersed or dissolved in a solvent system, said polymer comprising recurring monomers that comprise functional groups selected from the group consisting of photo-labile groups, electron-labile groups, acid-labile groups, and combinations of the foregoing.

6. The method of claim 5 , wherein said recurring monomers comprise an aromatic-containing moiety bonded with an acid moiety, and the bond between said aromatic-containing moiety and said acid moiety being broken during said exposure.

7. The method of claim 5 , wherein said functional group is selected from the group consisting of anthracenyl groups, o-nitrobenzyl groups, benzoin groups, phenacyl groups, oumaryl groups, benzyl groups, phenyl-containing tertbutyl esters, and combinations thereof.

8. The method of claim 5 , wherein said polymer further comprises recurring crosslinkable monomers.

9. The method of claim 1 , wherein said patterned layer has a thickness at any given location at the time of applying that is within about 5% of the thickness of said patterned layer at the same location immediately after light exposure.

10. The method of claim 1 , wherein said patternable layer is the only photosensitive or imaging layer that is used or present during or between said providing, forming, exposing, applying, and causing.

11. The method of claim 1 , wherein said first block possesses at least one property that is different from said second block, where said property is selected from the group consisting of functionality, polarity, water affinity, and etch resistance.

12. The method of claim 1 , further comprising removing one of said first self-assembled region or second self-assembled region to yield a pattern in said self-assembled layer.

13. The method of claim 12 , further comprising transferring said pattern into said intermediate layer, if present, and into said substrate, wherein said pattern comprises a plurality of features selected from the group consisting of trenches, spaces, via holes, contact holes having an average feature size of less than about 20 nm.

14. The method of claim 1 , wherein said first and second blocks are individually selected from the group consisting of polystyrene, poly(methyl methacrylate), poly(lactic acid), poly(ethylene oxide), polydimethylsiloxane, and polyvinylpyrrolidone.

15. The method of claim 1 , wherein said causing comprises heating said self-assembling composition to at least about the glass transition temperature of said block copolymer, wherein said self-assembling composition self-assembles during said heating.

16. The method of claim 1 , wherein said substrate is a semiconductor substrate selected from the group consisting of silicon, SiGe, SiO 2 , Si 3 N 4 , SiON, aluminum, tungsten, tungsten silicide, gallium arsenide, germanium, tantalum, tantalum nitride, Ti 3 N 4 , hafnium, HfO 2 , ruthenium, indium phosphide, coral, black diamond, glass, or mixtures of the foregoing.

17. A method of forming a microelectronic structure, said method comprising:
providing a stack comprising:
a substrate having a surface; and
one or more optional intermediate layers on said substrate surface;

forming a patternable layer having first and second surfaces, said first surface being on said intermediate layers, if present, or on said substrate surface, if no intermediate layers are present, and said second surface being remote from said first surface, said patternable layer having an initial surface property at said second surface and comprising a polymer dispersed or dissolved in a solvent system, said polymer comprising recurring monomers comprising —OH groups;
exposing said patternable layer to radiation so as to selectively alter said initial surface property to yield an altered surface property at the areas of exposure, forming a patterned layer;
without altering said patterned layer, applying a self-assembling composition to the second surface of said patterned layer, said composition comprising a block copolymer comprising a first block and a second block; and
causing said composition to self-assemble into a self-assembled layer in response to the initial surface property, the altered surface property, or both, wherein said self-assembled layer comprises a first self-assembled region and a second self-assembled region different from said first self-assembled region, wherein:
said initial surface property is an affinity towards one of said first and second blocks over the other of said first and second blocks; and
during said exposing, said affinity disappears so that said altered surface property is neutral towards said first and second blocks.

18. The method of claim 17 , wherein:
the dispersive and polar of said initial surface energy are from about 25 dyne/cm to about 36 dyne/cm, and from about 8 dyne/cm to about 13 dyne/cm, respectively; and
the dispersive and polar of said altered surface energy is from about 33 dyne/cm to about 41 dyne/cm, and from about 3 dyne/com to about 10 dyne/cm, respectively.

19. The method of claim 17 , wherein said polymer compris

Assignees

• Brewer Science Inc

Inventors

• Dai Jinhua
• Lowes Joyce

Classifications

• H10P76/4085

  characterised by the processes involved to create the masks · CPC title

• H10P76/20

  of masks comprising organic materials · CPC title

• H10P14/6536

  by exposure to radiation, e.g. visible light · CPC title

• H10P14/6506

  Formation of intermediate materials · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title