Analysis system and analysis method

Patent metadata

Field	Value
Publication number	US-10365324-B2
Application number	US-201415515686-A
Country	US
Kind code	B2
Filing date	Oct 9, 2014
Priority date	Oct 9, 2014
Publication date	Jul 30, 2019
Grant date	Jul 30, 2019

Abstract

A system and a method capable of identifying a heat source position corresponding to a failure portion are provided. An analysis system according to the present invention is an analysis system that identifies a heat source position inside a semiconductor device, and includes a tester that applies an AC signal to the semiconductor device, an infrared camera that detects light from the semiconductor device according to the AC signal and outputs a detection signal, and a data analysis unit that identifies the heat source position based on the detection signal.

First claim

The invention claimed is:

1. An analysis system identifying a heat source position inside a measurement object, the analysis system comprising:
an applying unit configured to apply an AC signal to the measurement object;
a light detector configured to detect light from the measurement object according to the AC signal and outputting a detection signal; and
an analyzer configured to identify the heat source position based on the detection signal,
wherein the applying unit is configured to apply the AC signal with an amplitude in an OFF period of a lock-in cycle that is smaller than in an ON period of the lock-in cycle according to a trigger signal with a predetermined lock-in cycle.

2. The analysis system according to claim 1 ,
wherein the applying unit is configured to set the amplitude of the AC signal to 0 in the OFF period of the lock-in cycle.

3. The analysis system according to claim 1 ,
wherein the applying unit is configured to change a phase of the AC signal every lock-in cycle so that the amplitude of the AC signal is canceled when AC signals with a plurality of lock-in cycles are integrated.

4. The analysis system according to claim 1 ,
wherein the applying unit is configured to cause a frequency of the AC signal to be higher than a frequency of the trigger signal.

5. The analysis system according to claim 1 ,
wherein the analyzer is configured to identify the heat source position by deriving a phase delay amount of the detection signal relative to the trigger signal.

6. The analysis system according to claim 1 ,
wherein the light detector comprises an infrared camera that is configured to detect infrared rays from a heat source as the light from the measurement object.

7. The analysis system according to claim 1 , further comprising:
a setting unit configured to set a measurement point for the measurement object; and
a light irradiator configured to irradiate the measurement object with light,
wherein the light detector comprises a photodetector detecting light reflected from the measurement point as the light from the measurement object.

8. An analysis method for identifying a heat source position inside a measurement object, the analysis method comprising:
applying an AC signal to the measurement object;
detecting light from the measurement object according to the AC signal and outputting a detection signal; and
identifying the heat source position based on the detection signal,
wherein applying the AC signal comprises applying the AC signal with an amplitude in an OFF period of a lock-in cycle that is smaller than in an ON period of the lock-in cycle according to a trigger signal with a predetermined lock-in cycle.

9. The analysis method according to claim 8 ,
wherein applying the AC signal comprises setting the amplitude of the AC signal to 0 in the OFF period of the lock-in cycle.

10. The analysis method according to claim 8 ,
wherein applying the AC signal comprises changing a phase of the AC signal every lock-in cycle so that the amplitude of the AC signal is canceled when AC signals with a plurality of lock-in cycles are integrated.

11. The analysis method according to claim 8 ,
wherein applying the AC signal comprises causing a frequency of the AC signal to be higher than a frequency of the trigger signal.

12. The analysis method according to claim 8 ,
wherein identifying the heat source position comprises identifying the heat source position by deriving a phase delay amount of the detection signal relative to the trigger signal.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Nakamura Tomonori

Classifications

• G01K17/08

  based upon measurement of temperature difference {or of a temperature} · CPC title

• G01K17/16

  using electrical {or magnetic} means for both measurements · CPC title

• G01J5/0066

  for hot spots detection · CPC title

• G01N21/88

  Investigating the presence of flaws or contamination · CPC title

• G01N25/20

  by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity (calorimeters per se G01K) · CPC title