Apparatus and methods for deposition of materials on interior surfaces of hollow components

Patent metadata

Field	Value
Publication number	US-10364489-B2
Application number	US-201715696836-A
Country	US
Kind code	B2
Filing date	Sep 6, 2017
Priority date	Sep 15, 2016
Publication date	Jul 30, 2019
Grant date	Jul 30, 2019

Abstract

This disclosure provides systems, methods, and apparatus related to deposition techniques using laser ablation. In one aspect, an optical fiber and target of a material to be deposited on a first region of an interior surface of a hollow component are positioned in the hollow component. A first end of the optical fiber is coupled to a laser system. A second end of the optical fiber is proximate the target. The material is deposited on the first region of the interior surface of the hollow component by directing a first laser pulse from the laser system through the optical fiber to impinge on the target.

First claim

What is claimed is:

1. A method comprising:
(a) positioning an optical fiber and a target of a material to be deposited on a first region of an interior surface of a hollow component in the hollow component, the hollow component being curved, a first end of the optical fiber coupled to a laser system, and a second end of the optical fiber proximate the target; and
(b) depositing the material on the first region of the interior surface of the hollow component by directing a first laser pulse from the laser system through the optical fiber to impinge on the target.

2. The method of claim 1 , further comprising:
(c) after operation (b), translating the optical fiber and the target a distance in the hollow component; and
(d) depositing the material on a second region of an interior surface of the hollow component by directing a second laser pulse from the laser system through the optical fiber to impinge on the target.

3. The method of claim 1 , further comprising:
after operation (b), adjusting a position of the second end of the optical fiber to increase an amount of the material deposited on the first region of the interior surface of the hollow component when operation (b) is repeated or adjusting a position of the target to increase an amount of the material deposited on the first region of the interior surface of the hollow component when operation (b) is repeated.

4. The method of claim 1 , wherein the first laser pulse in one of a plurality of laser pulses.

5. The method of claim 1 , wherein operation (b) is performed in a vacuum of about 1×10 −1 torr or lower.

6. The method of claim 1 , wherein operation (b) is performed in an atmosphere containing a gas selected from a group consisting of oxygen, a nitrogen-containing gas, a carbon-containing gas, and mixtures thereof.

7. The method of claim 1 , wherein the second end of the optical fiber and the target are positioned about 1 millimeter to 10 millimeters from each other.

8. The method of claim 1 , wherein the first laser pulse has a pulse energy of at least about 100 microjoules and a wavelength of about 800 nm.

9. The method of claim 1 , wherein the optical fiber comprises a hollow core bandgap fiber.

10. The method of claim 9 , wherein an inert gas is flowing through a hollow core of the hollow core bandgap fiber during operation (b).

11. The method of claim 1 , wherein the target comprises a cylinder of the material having a diameter of about 3 millimeters or less.

12. The method of claim 1 , wherein the material comprises a metal selected from a group consisting of niobium, zirconium, titanium, vanadium, hafnium, combinations thereof, and alloys thereof.

13. The method of claim 1 , wherein the hollow component comprises a tube with an inner diameter of about 6 millimeters or less.

14. The method of claim 1 , wherein the material deposited on the first region of the interior surface of the hollow component has a thickness of about 100 nanometers to 3 microns.

15. A method comprising:
(a) positioning an optical fiber and a target of a material to be deposited on a first region of an interior surface of a hollow component in the hollow component, a first end of the optical fiber coupled to a laser system, and a second end of the optical fiber proximate the target;
(b) depositing the material on the first region of the interior surface of the hollow component by directing a first laser pulse from the laser system through the optical fiber to impinge on the target;
(c) measuring a resistance between the hollow component and the target;
(d) repeating operation (b); and
(e) changing a position of the optical fiber, the target, or both the optical fiber and the target to decrease the resistance between the hollow component and the target when operation (b) is repeated.

16. The method of claim 15 , wherein the second end of the optical fiber and the target are positioned about 1 millimeter to 10 millimeters from each other.

17. The method of claim 15 , wherein the hollow component comprises a tube with an inner diameter of about 6 millimeters or less.

18. The method of claim 15 , wherein the optical fiber comprises a hollow core bandgap fiber, and wherein an inert gas is flowing through a hollow core of the hollow core bandgap fiber during operation (b).

19. The method of claim 15 , wherein the target comprises a cylinder of the material having a diameter of about 3 millimeters or less.

20. The method of claim 15 , wherein the hollow component is curved.

Assignees

• Anders Andre
• Univ California

Inventors

• Anders Andre

Classifications

• C23C14/046

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• H05H7/14

  Vacuum chambers (H05H5/03 takes precedence) · CPC title

• C23C14/28 Primary

  by wave energy or particle radiation (C23C14/32 - C23C14/48 take precedence) · CPC title

• C23C14/14

  Metallic material, boron or silicon · CPC title