Method for manufacturing liquid ejection head
US-2017297336-A1 · Oct 19, 2017 · US
Method of forming space for use in analysis devices
US10364142B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10364142-B2 |
| Application number | US-201715661918-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 27, 2017 |
| Priority date | Aug 3, 2016 |
| Publication date | Jul 30, 2019 |
| Grant date | Jul 30, 2019 |
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- Title
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Abstract
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A method of forming a space includes a step of tenting, on a substrate having a recessed portion, a dry film including a dry film material that is to be a top plate on the recessed portion. The step of tenting the dry film includes a press period and a release period and performs a press-release cycle of the press period and the release period a plurality of times, a pressed state in which the dry film is pressed against the substrate by using a pressing member is maintained during the press period, and a released state in which the pressed state is released is maintained during the release period.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of forming a space, comprising: a step of tenting, on a substrate having a recessed portion, a dry film including a dry film material that is to be a top plate on the recessed portion, wherein the step of tenting the dry film includes a press period and a release period and performs a press-release cycle of the press period and the release period a plurality of times, a pressed state in which the dry film is pressed against the substrate by using a pressing member is maintained during the press period, and a released state in which the pressed state is released is maintained during the release period, wherein the step of tenting the dry film includes starting the press period in a vacuum state, performing the press-release cycle in the vacuum state a plurality of times, and subsequently starting ventilation, wherein the step of tenting the dry film includes cooling a process temperature to a temperature equal to or less than a glass-transition temperature of the dry film material while maintaining the pressed state during the press period of a final cycle of the press-release cycle performed a plurality of times, and subsequently starting the ventilation. 2. The method of forming a space according to claim 1 , wherein the pressing member has a flat shape. 3. The method of forming a space according to claim 1 , wherein a duration of the press-release cycle is within a range of a duration for which a loss tangent that the dry film material has is 1.0 or less. 4. The method of forming a space according to claim 1 , wherein a process temperature in the step of tenting the dry film is equal to or more than a glass-transition temperature of the dry film material. 5. The method of forming a space according to claim 1 , wherein the release period is longer than the press period in the step of tenting the dry film. 6. The method of forming a space according to claim 1 , wherein the space is to be a liquid channel of a liquid-discharging head. 7. The method of forming a space according to claim 6 , wherein the dry film material is to be a mold for the liquid channel, and wherein the step of tenting the dry film includes forming, on at least a part of the substrate, an adhesion layer that ensures adhesion between the substrate and a wall member to form a wall and a ceiling of the liquid channel, and subsequently tenting the dry film on a step between the substrate and the adhesion layer. 8. The method of forming a space according to claim 6 , wherein the dry film material is a negative resist material, and wherein the step of tenting the dry film includes tenting the dry film on the substrate having a liquid discharge port, a liquid channel in communication with the liquid discharge port, a supply port in communication with the liquid channel, and a common liquid chamber.
Assignees
Inventors
Classifications
- B81C1/00047Primary
Cavities · CPC title
characterised by the manufacture of the container or its components · CPC title
Biosensors; Chemical sensors · CPC title
Processes for releasing structures not provided for in group B81C1/00476 · CPC title
Cavities · CPC title
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- What does patent US10364142B2 cover?
- A method of forming a space includes a step of tenting, on a substrate having a recessed portion, a dry film including a dry film material that is to be a top plate on the recessed portion. The step of tenting the dry film includes a press period and a release period and performs a press-release cycle of the press period and the release period a plurality of times, a pressed state in which the …
- Who is the assignee on this patent?
- Canon Kk
- What technology area does this patent fall under?
- Primary CPC classification B81C1/00047. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Jul 30 2019 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 3 related publications on this page (citations in our corpus or others sharing the same primary CPC).