Fluidized bed reactor for producing polycrystalline silicon granules and method for the assembly of such a fluidized bed reactor

Patent metadata

Field	Value
Publication number	US-10363534-B2
Application number	US-201515525631-A
Country	US
Kind code	B2
Filing date	Nov 3, 2015
Priority date	Nov 10, 2014
Publication date	Jul 30, 2019
Grant date	Jul 30, 2019

Abstract

Assembly of a fluidized bed reactor for the preparation of polycrystalline silicon granules by chemical vapor deposition of silicon onto seed particles and removal of polycrystalline silicon granules is facilitated without breakage and with gas tightness by a specific assembly sequence.

First claim

The invention claimed is:

1. A method for assembling a fluidized bed reactor for producing polycrystalline silicon granules, comprising the steps hereinafter in the stated sequence:
a) provide a base plate and connect the base plate to gas supply lines for fluidizing gas and reaction gas and a product take-off line;
b) equip the base plate with at least one fluidizing nozzle and with at least one reaction gas nozzle;
c) insert a bottom reactor tube seal into the base plate;
d) position a reactor tube on the bottom reactor tube seal;
e) position a reactor section with heater, electrodes and insulation sections over the reactor tube;
f) provide an upper reactor tube clamp with an upper reactor tube seal;
g) assemble the reactor head; and
h) assemble a seed feed appliance and off-gas pipeline.

Assignees

• Wacker Chemie Ag

Inventors

• Weckesser Dirk
• Forstpointner Gerhard
• Hertlein Harald

Classifications

• B01J2208/00407

  outside the reactor bed · CPC title

• B01J2219/00018

  Construction aspects · CPC title

• B01J8/1836

  Heating and cooling the reactor (B01J8/42 takes precedence) · CPC title

• B01J8/1818 Primary

  Feeding of the fluidising gas (B01J8/44 takes precedence) · CPC title

• C23C16/24

  Deposition of silicon only · CPC title