Exposure apparatus and prevention method and system for image offset thereof

Patent metadata

Field	Value
Publication number	US-10359709-B2
Application number	US-201715743871-A
Country	US
Kind code	B2
Filing date	Aug 31, 2017
Priority date	Jan 11, 2017
Publication date	Jul 23, 2019
Grant date	Jul 23, 2019

Abstract

Provided are an exposure apparatus and a prevention method and system for image offset of the exposure apparatus. The dust cover which is made of transparent material and arranged and arranged at one end of the bearing connected to the lifter enables to check whether the bearing is abraded via manual vision or machine vision, thereby enhancing the yield of the glass substrates achieved by photoetching in the photo process and thus improving the production efficiency of the photo process.

First claim

What is claimed is:

1. A prevention method for image offset of an exposure apparatus, the exposure apparatus comprising a main shell, a carrier, an exposure component and a lifter bearing, wherein the carrier, the exposure component and the lifter bearing are arranged in the main shell, the lifter bearing is mechanically connected to the carrier and the exposure component, the lifter bearing comprises: a bearing mechanically connected to the exposure component; a lifter mechanically connected to the bearing and configured to rotate around the bearing to control the lift up and down of the exposure component; and a dust cover arranged at the external side of one end of the bearing connected to the lifter, the dust cover is made of transparent material, the method comprises:
checking whether the bearing is abraded by viewing through the dust cover made of transparent material;
when the bearing is abraded, sending an alarm message indicating that the bearing is abraded.

2. The method according to claim 1 , wherein
the checking whether the bearing is abraded comprises:
acquiring a present bearing image;
comparing an offset between the present bearing image and a prestored bearing image with a preset offset range;
when the offset is within the preset offset range, determining that the bearing is not abraded; when the offset is not within the preset offset range, determining that the bearing is abraded.

3. The method according to claim 2 , wherein
the section of the bearing in the prestored bearing image is circular.

4. A prevention system for image offset of an exposure apparatus, the exposure apparatus comprising a main shell, a carrier, an exposure component and a lifter bearing, wherein the carrier, the exposure component and the lifter bearing are arranged in the main shell, the lifter bearing is mechanically connected to the carrier and the exposure component, the lifter bearing comprises: a bearing mechanically connected to the exposure component; a lifter mechanically connected to the bearing and configured to rotate around the bearing to control the up and down of the exposure component; and a dust cover arranged at the external side of one end of the bearing connected to the lifter, the dust cover is made of transparent material, the system comprises: at least one processor and a memory connected to the processor,
wherein the memory stores instructions executable by the at least one processor, the at least one processor executes the instructions to perform operations of;
checking whether the bearing is abraded by viewing through the dust cover made of transparent material; and
when the bearing is abraded, sending an alarm message indicating that the bearing is abraded.

5. The system according to claim 4 , wherein
the at least one processor executes the instructions to perform operations of:
acquiring a present bearing image;
comparing an offset between the present bearing image and a prestored bearing image with a preset offset range; and
when the offset is within the preset offset range, determining that the bearing is not abraded; when the offset is not within the preset offset range, determining that the bearing is abraded.

6. The system according to claim 5 , wherein
the section of the bearing in the prestored bearing image is circular.

7. The system according to claim 5 , further comprising:
a communication interface, a bus and a camera, wherein
the communication among the at least one processor, the communication interface, the memory and the camera is performed through the bus.

8. The system according to claim 6 , wherein
the camera is configured to acquire the bearing image.

9. The system according to claim 4 , wherein
the alarm message indicating that the bearing is abraded is a voice, a text, an image or the combination thereof.

10. The system according to claim 4 , wherein
the comparison of the offset between the present bearing image and the prestored bearing image comprises: comparing the pixels at the same place between the present bearing image and the prestored bearing image; when the number of the pixels with difference is larger than a first threshold, determining that the bearing is abraded.

Assignees

• Hkc Corp Ltd
• Chongqing Hkc Optoelectronics Tech Co Ltd

Inventors

• Wen Chun-Bin

Classifications

• G03F7/70883 Primary

  of optical system · CPC title

• G03F7/70016

  by discharge lamps · CPC title

• G03F7/7085

  Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load · CPC title

• G03F7/70716 Primary

  Stages · CPC title

• G03F7/70816 Primary

  Bearings · CPC title