Detection of foreign material on a substrate chuck
US-2016327462-A1 · Nov 10, 2016 · US
US10359356B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10359356-B2 |
| Application number | US-201414189564-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 25, 2014 |
| Priority date | Mar 6, 2013 |
| Publication date | Jul 23, 2019 |
| Grant date | Jul 23, 2019 |
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A tool abnormality detection system corrects a monitoring range for a load on a tool in an M th cycle by using load data of at least one of 1 st to (M−1) th cycles (where M is an integer of 2 or more), wherein processing work on a single workpiece corresponds to a single cycle, and the load data is data about the load on the tool in the cycle.
Opening claim text (preview).
What is claimed is: 1. A tool abnormality determination system for detecting abnormalities in a tool according to a state of the tool, by automatically and continuously performing correction of a monitoring range for detecting the abnormalities, the tool abnormality determination system comprising: a processor; a display; and at least one motor drive circuit connected to a respective at least one motor, the at least one motor drive circuit driving the at least one motor so as to process work by a tool on a workpiece, wherein the processor is configured to: set an offset amount; detect load data of the at least one motor at predetermined intervals; and use the load data of at least one of 1 st to (M−1) th cycles to correct a monitoring range for a load on the tool in an M th cycle (where M is an integer of 2 or more), the monitoring range is a difference between: (i) a first current value, which is an upper limit threshold at a given time in a first cycle; and (ii) a second current value, which is a lower limit threshold at the given time in a second cycle, the first current value and the second current value being peak current values, the lower limit threshold is determined by using the offset amount to correct a low load-side peak hold value, and the upper limit threshold is determined by using the offset amount to correct a high load-side peak hold value, processing the work on the workpiece by using the tool corresponds to a single cycle, the load data is an indicator of the load on the tool in the single cycle, the load data includes a plurality of current values, when a current value, of the plurality of current values, is out of the monitoring range, the processor is further configured to count a number of consecutive times the current value is out of the monitoring range, when the number of consecutive times does not exceed a number-of-consecutive-times threshold, the processor is further configured to continue to monitor the current value, and when the number of consecutive times exceeds the number-of-consecutive-times threshold, the processor is further configured to stop processing the work on the workpiece as soon as the current value is out of the monitoring range and display guidance on the display, the guidance prompting a user to confirm whether or not the tool is actually in an abnormal state. 2. The tool abnormality determination system according to claim 1 , wherein the processor is further configured to: perform an air-cut step of moving the tool so as to bring the tool into contact with the workpiece; and perform an actual processing step of processing the workpiece by using the tool, wherein the air-cut step and the actual processing step are performed during the cycle, and the actual processing step is performed after the air-cut step, wherein a plurality of pieces of the load data which are detected in or before the air-cut step in the M th cycle have early-stage data including at least one piece of the load data, and later-stage data including at least one piece of the load data which is detected later than the load data detected last in the early-stage data, and wherein the processor is further configured to: use a load ratio between the early-stage data and the later-stage data to correct the monitoring range in the actual processing step of the M th cycle. 3. The tool abnormality determination system according to claim 2 , wherein the processor is further configured to: perform a teaching process which includes at least one of the cycles, and setting the monitoring range by using the load data detected in the at least one of the cycles; and perform a processing process which includes at least one of the cycles, and processing the workpiece while monitoring the load on the tool by using the monitoring range, and wherein the early-stage data is detected in the cycle of the teaching process. 4. The tool abnormality determination system according to claim 3 , wherein the processor is further configured to: perform the air-cut step in the cycle of the teaching process, the air-cut step performed in the cycle of the teaching process being a first air-cut step; detect the early-stage data in the first air-cut step; perform the air-cut step in the cycle of the processing process, the air-cut step performed in the cycle of the processing process being a second air-cut step; and detect the later-stage data in the second air-cut step. 5. The tool abnormality determination system according to claim 3 , wherein the processor is further configured to: perform the actual processing step in the cycle of the teaching process, the actual processing step performed in the cycle of the teaching process being a first actual processing step; detect the early-stage data in the first actual processing step; perform the actual processing step in the cycle of the processing process, the actual processing step performed in the cycle of the processing process being a second actual processing step; and detect the later-stage data in the second actual processing step in the cycle of the processing process. 6. The tool abnormality determination system according to claim 5 , wherein the processor is further configured to: detect the later-stage data in the actual processing step in the (M−1) th cycle. 7. The tool abnormality determination system according to claim 5 , wherein the processor further configured to: detect the later-stage data in the actual processing steps in a plurality of the cycles including the (M−1) th cycle.
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