Wafer processing apparatus and wafer processing method
US-2024395512-A1 · Nov 28, 2024 · US
US10358712B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10358712-B2 |
| Application number | US-201515508298-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 3, 2015 |
| Priority date | Sep 3, 2014 |
| Publication date | Jul 23, 2019 |
| Grant date | Jul 23, 2019 |
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This surface-coated cutting tool includes a cutting tool body made of tungsten carbide-based cemented carbide and a hard coating layer deposited on a surface of the cutting tool body, in which the hard coating layer has at least one (Ti 1-x Al x )N layer (0.4≤X≤0.7, X is an atomic ratio) with an average layer thickness of 0.5 to 10 μm, the (Ti, Al)N layer has a cubic crystal structure, and Ia−Ib<5 is satisfied when Ia (%) is an average absorptance of the hard coating layer at a wavelength of 400 to 500 nm and Ib (%) is an average absorptance of the hard coating layer at a wavelength of 600 to 700 nm.
Opening claim text (preview).
The invention claimed is: 1. A surface-coated cutting tool, comprising: a cutting tool body made of tungsten carbide-based cemented carbide; and a hard coating layer deposited on a surface of the cutting tool body, wherein (a) the hard coating layer has at least one (Ti, Al)N layer with an average layer thickness of 0.5 to 10 μm, in a case where a composition of the (Ti, Al)N layer is expressed by a composition formula: (Ti1-xAlx)N, X is an atomic ratio which satisfies 0.4≤X≤0.7, and the (Ti, Al)N layer has a cubic crystal structure, and (b) in a case where an optical absorption spectrum of a surface of the hard coating layer is measured using a spectrophotometer, Ia (%) is an average absorptance at a wavelength of 400 to 500 nm, Ib (%) is an average absorptance at a wavelength of 600 to 700 nm, and (Ia−Ib)<5 is satisfied, and wherein the hard coating layer is produced such that a maximum magnetic flux density gradient when being measured in an arbitrary surface range of 10 mm at a center of a surface of a Ti—Al alloy target is 6 G/mm or greater. 2. The surface-coated cutting tool according to claim 1 , wherein the hard coating layer is produced such that a maximum magnetic field magnetic flux density is in the range of 100 to 250 G. 3. A method of manufacturing a surface-coated cutting tool including a cutting tool body made of tungsten carbide-based cemented carbide and a hard coating layer deposited on a surface of the cutting tool body, wherein the hard coating layer has at least one (Ti, Al)N layer, the method comprising: depositing the (Ti, Al)N layer on the surface of the cutting tool body using the Ti—Al alloy target while a maximum magnetic flux density gradient when being measured in an arbitrary surface range of 10 mm at a center of a surface of a Ti—Al alloy target is adjusted to 6 G/mm or greater and a maximum magnetic field magnetic flux density is adjusted to 100 to 250 G.
Titanium aluminium nitride · CPC title
Details of hard metal, i.e. cemented carbide · CPC title
with specified thickness · CPC title
applied by physical vapour deposition [PVD] · CPC title
Tools for drilling machines · CPC title
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