Gimbal for cmp tool conditioning disk having flexible metal diaphragm
US-2019283215-A1 · Sep 19, 2019 · US
US10357869B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10357869-B2 |
| Application number | US-201615763011-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 29, 2016 |
| Priority date | Sep 30, 2015 |
| Publication date | Jul 23, 2019 |
| Grant date | Jul 23, 2019 |
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An abrasive sawing or polishing substrate includes a substrate, a binder C1 covering at least a portion of the substrate, and abrasive particles having an at least partial coating, C2. The abrasive sawing or polishing substrate also includes a coating C3 coating binder C1 and the abrasive particles coated with C2 and at least one light-emitting compound. The abrasive particles coated with C2 are in contact with binder C1 and with coating C3.
Opening claim text (preview).
The invention claimed is: 1. An abrasive sawing or polishing substrate, comprising: a substrate; a binder C 1 covering at least a portion of the substrate; abrasive particles having an at least partial coating, C 2 ; a coating C 3 coating binder C 1 and the abrasive particles coated with C 2 ; at least one light-emitting compound; the abrasive particles coated with C 2 being in contact with binder C 1 and with coating C 3 , and wherein the substrate is selected from the group comprising: a steel wire; a textile; and a metal plate; wherein binder C 1 is made of at least one layer of a nickel/cobalt alloy having a cobalt content in the range from 20% to 85% by weight with respect to the weight of the Ni/Co alloy; wherein coating C 2 of the abrasive particles is made of a material selected from the group comprising nickel; cobalt; iron; copper; and titanium; and wherein coating C 3 is made of at least one layer of a nickel/cobalt alloy having a cobalt content in the range from 10% to 90% by weight with respect to the weight of the Ni/Co alloy. 2. An abrasive sawing or polishing substrate, comprising: a substrate; a binder C 1 covering at least a portion of the substrate; abrasive particles having an at least partial coating, C 2 ; a coating C 3 coating binder C 1 and the abrasive particles coated with C 2 ; at least one light-emitting compound: the abrasive particles coated with C 2 being in contact with binder C 1 and with coating C 3 , wherein said substrate comprises a light-emitting compound CL 1 in binder C 1 . 3. An abrasive sawing or polishing substrate, comprising: a substrate; a binder C 1 covering at least a portion of the substrate; abrasive particles having an at least partial coating, C 2 ; a coating C 3 coating binder C 1 and the abrasive particles coated with C 2 ; at least one light-emitting compound: the abrasive particles coated with C 2 being in contact with binder C 1 and with coating C 3 , wherein said substrate comprises a light-emitting compound CL 2 in coating C 2 . 4. An abrasive sawing or polishing substrate, comprising: a substrate; a binder C 1 covering at least a portion of the substrate; abrasive particles having an at least partial coating, C 2 ; a coating C 3 coating binder C 1 and the abrasive particles coated with C 2 ; at least one light-emitting compound: the abrasive particles coated with C 2 being in contact with binder C 1 and with coating C 3 , wherein said substrate comprises a light-emitting compound CL 3 in coating C 3 . 5. The abrasive substrate of claim 1 , wherein the substrate comprises: a light-emitting compound CL 1 in binder C 1 ; a light-emitting compound CL 2 in coating C 2 ; a light-emitting compound CL 3 in coating C 3 ; CL 1 , CL 2 , and CL 3 being different from one another. 6. The abrasive substrate of claim 1 , wherein the abrasive particles are made of a material selected from the group comprising silicon carbide SiC; silica SiO 2 ; tungsten carbide WC; silicon nitride Si 3 N 4 ; cubic boron nitride cBN; chromium dioxide CrO 2 ; aluminum oxide Al 2 O 3 ; diamond; and diamonds pre-coated with nickel, iron, cobalt, copper, or titanium, or with alloys thereof. 7. The abrasive substrate of claim 1 , wherein the light-emitting compound is selected from the group comprising metal oxide; metal sesquioxide; metal oxyfluoride; metal vanadate; metal fluoride; and mixtures thereof. 8. A method of manufacturing an abrasive sawing or polishing substrate having (i) a substrate, (ii) a binder C 1 covering at least a portion of the substrate, (iii) abrasive particles having at least a partial coating, C 2 , (iv) a coating C 3 coating binder C 1 and the abrasive particles coated with C 2 , and (v) at least one light-emitting compound, wherein the abrasive particles coated with C 2 are in contact with binder C 1 and with coating C 3 , the method comprising the steps of: forming of an abrasive substrate by electrodeposition on a substrate of a binder C 1 and of abrasive particles, by passing through an electrolyte bath B 1 containing abrasive particles, said abrasive particles having an at least partial coating, C 2 , binder C 1 at least partially covering the substrate; electrodeposition of a coating C 3 , by passing through an electrolyte bath B 2 , coating C 3 at least partially covering binder C 1 and the abrasive particles, the abrasive particles being in contact with binder C 1 and coating C 3 ; integration of at least one light-emitting compound in at least one layer from among binder C 1 , coating C 2 , or coating C 3 , wherein the substrate is selected from the group comprising: a steel wire; a textile; and a metal plate; wherein binder C 1 is made of at least one layer of a nickel/cobalt alloy having a cobalt content in the range from 20% to 85% by weight with respect to the weight of the Ni/Co alloy; wherein coating C 2 of the abrasive particles is made of a material selected from the group comprising nickel; cobalt; iron; copper; and titanium; and wherein coating C 3 is made of at least one layer of a nickel/cobalt alloy having a cobalt content in the range from 10% to 90% by weight with respect to the weight of the Ni/Co alloy. 9. The method of manufacturing the abrasive substrate of claim 8 , wherein the light-emitting compound is introduced in the form of an aqueous solution of light-emitting nanoparticles or nanocolloids into bath B 1 or B 2 .
characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties · CPC title
by electrolytic deposition · CPC title
involving optical means · CPC title
utilised during polishing, or grinding operation · CPC title
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