Method for determining set value of pressure for inspection in wafer inspection apparatus
US-2016069951-A1 · Mar 10, 2016 · US
US10355717B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10355717-B2 |
| Application number | US-201715666975-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 2, 2017 |
| Priority date | Aug 4, 2016 |
| Publication date | Jul 16, 2019 |
| Grant date | Jul 16, 2019 |
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An encoder signal processing device detects position data at every predetermined time interval from an original signal which is an analog amount generated in an encoder according to movement of a measurement target. The encoder signal processing device includes: an approximate curve calculation unit that calculates an approximate curve of a detection error included in the original signal on the basis of the detection error of the position data at at least three or more points; an approximate error computation unit that computes an approximate value of the detection error of the position data at an arbitrary time point on the basis of the approximate curve of the detection error; and a position data correction unit that corrects the detection error of the position data at the arbitrary time point on the basis of the approximate value of the detection error of the position data.
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What is claimed is: 1. An encoder signal processing device that detects position data at every predetermined time interval from an original signal which is an analog amount generated in an encoder according to movement of a measurement target, the encoder signal processing device comprising: an approximate curve calculation unit that calculates an approximate curve of a detection position on the basis of the position data at at least three or more points acquired at equal intervals within one cycle of the original signal generated by the encoder; an approximate error computation unit that computes an approximate value of a detection error of the position data at an arbitrary time point on the basis of the approximate curve of the detection position calculated by the approximate curve calculation unit; and a position data correction unit that corrects the detection error of the position data at the arbitrary time point on the basis of the approximate value of the detection error of the position data computed by the approximate error computation unit. 2. The encoder signal processing device according to claim 1 , wherein the approximate curve calculation unit calculates a detection position approximate curve that approximates detection position at an arbitrary time point within (M+1) points (M≥2) from the position data at the (M+1) points located before and after an arbitrary time point among the time points obtained by evenly dividing a period between items of position data at both ends of a position data group at predetermined time intervals, the position data group being composed of at least three items of continuously detected (n+1) position data (n≥2), when the measurement target moves within a predetermined velocity range having a velocity variation within a predetermined value, and calculates detection errors of the position within the (M+1) points. 3. The encoder signal processing device according to claim 2 , wherein the approximate curve calculation unit calculates an M th -order curve that passes through the (M+1) points as the approximate curve of the detection position. 4. The encoder signal processing device according to claim 3 , wherein the M th -order curve is an odd-number-order curve. 5. The encoder signal processing device according to claim 1 , wherein the approximate error computation unit calculates and stores detection errors at positions located at equal intervals on the basis of the approximate curve of the detection position in advance and linearly interpolates the stored detection errors to calculate the detection error at the arbitrary position. 6. An encoder that detects position data at every predetermined time interval from an original signal which is an analog amount generated according to movement of a measurement target, the encoder comprising: an approximate curve calculation unit that calculates an approximate curve of a detection position on the basis of the position data at at least three or more points acquired at equal intervals within one cycle of the original signal generated by the encoder; an approximate error computation unit that computes an approximate value of a detection error of the position data at an arbitrary time point on the basis of the approximate curve of the detection position calculated by the approximate curve calculation unit; and a position data correction unit that corrects the detection error of the position data at the arbitrary time point on the basis of the approximate value of the detection error of the position data computed by the approximate error computation unit. 7. An encoder signal processing method for detecting position data at every predetermined time interval from an original signal which is an analog amount generated in an encoder according to movement of a measurement target, the encoder signal processing method comprising: an approximate curve calculation step of calculating an approximate curve of a detection position on the basis of the position data at at least three or more points acquired at equal intervals within one cycle of the original signal generated by the encoder; an approximate error computation step of computing an approximate value of a detection error of the position data at an arbitrary time point on the basis of the approximate curve of the detection position calculated in the approximate curve calculation step; and a position data correction step of correcting the detection error of the position data at the arbitrary time point on the basis of the approximate value of the detection error of the position data computed in the approximate error computation step. 8. A non-transitory computer-readable recording medium storing a program for causing a computer that forms an encoder signal processing device that detects position data at every predetermined time interval from an original signal which is an analog amount generated in an encoder according to movement of a measurement target to implement: an approximate curve calculation function of calculating an approximate curve of a detection position on the basis of the position data at at least three or more points acquired at equal intervals within one cycle of the original signal generated by the encoder; an approximate error computation function of computing an approximate value of a detection error of the position data at an arbitrary time point on the basis of the approximate curve of the detection position calculated by the approximate curve calculation function; and a position data correction function of correcting the detection error of the position data at the arbitrary time point on the basis of the approximate value of the detection error of the position data computed by the approximate error computation function.
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