Shutter

Patent metadata

Field	Value
Publication number	US-10354854-B2
Application number	US-201615744124-A
Country	US
Kind code	B2
Filing date	May 16, 2016
Priority date	Jul 13, 2015
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

A shutter moves along a surface of a partition wall provided between two spaces different in pressure, which faces the space higher in pressure, to open and close an aperture formed on the partition wall with an amount of force smaller than conventional shutters require. The shutter includes: a plate-shaped first member arranged in a manner of moving along a surface of the partition wall, which faces one of the two spaces higher in pressure, to open and close the aperture, the first member being provided, in a region which corresponds to the aperture, with a small aperture having an area smaller than the area of the aperture, and a plate-shaped second member arranged in a manner of moving along a surface of the first member, which faces the space higher in pressure, to open and close the small aperture.

First claim

The invention claimed is:

1. A shutter for use in opening and closing an aperture in a partition wall provided between two spaces different in pressure, the shutter comprising:
a first member arranged in a manner of moving along a surface of the partition wall, which faces one of the two spaces higher in pressure, the first member being provided, at a position which corresponds to the aperture, with a small aperture having an area smaller than an area of the aperture;
a second member arranged in a manner of moving along a surface of the first member, which faces the space higher in pressure
a bar attached to the second member;
an actuator capable of applying a force to the bar such that the bar moves; and
wherein the bar is configured to move the first member and the second member such that the shutter shifts between a full-open state and a full-closed state, the first member being moved by the bar via the second member,
wherein the shutter passes through an intermediately-opened state with the aperture partially closed and the small aperture opened when the shutter is shifted from the full-open state with the aperture opened to the full-closed state with the aperture and the small aperture both closed, as well as from the full-closed state to the full-open state,
wherein the aperture is covered by the first member and the second member in the full-closed state, and
wherein the small aperture is covered by the second member in the full-closed state.

2. The shutter according to claim 1 , further comprising:
a spring connecting the first member and the second member, the spring urging the second member in a direction for opening the small aperture.

3. The shutter according to claim 1 , wherein:
a long hole extending in the moving direction of the second member is formed in one of the first member and the second member, while a convex portion inserted into the long hole is formed in another one of the first member and the second member;
the convex portion is in contact with one end of the long hole in a state that the small aperture is closed by the second member, while the convex portion is in contact with another end of the long hole in a state that the small aperture is opened by the second member; and
the bar closes the aperture by moving the first member by moving the second member in a direction for closing the small aperture beyond a position where the convex portion is in contact with the one end of the long hole, and the bar opens the aperture by moving the first member by moving the second member in a direction for opening the small aperture beyond a position where that the convex portion is in contact with the other end of the long hole.

4. The shutter according to claim 1 , further comprising:
a plug having a portion composed of an elastic material at a position corresponding to an outer periphery of the aperture in a state that the aperture is closed by the first member.

5. A shutter mechanism comprising:
two shutters including at least a shutter that is the shutter according to claim 1 ,
wherein:
each of the two shutters includes a bar to be operated for moving the shutter; and
the bar of each of the two shutters has one end connected to a connection member commonly used by the two shutters.

6. The shutter mechanism according to claim 5 , wherein
the bar of one of the two shutters includes an extendable member extendable in a direction along which the shutter moves, and a restriction member that restricts extension of the extendable member to a predetermined distance.

7. A mass spectrometer comprising the shutter mechanism according to claim 5 .

8. The mass spectrometer according to claim 7 , comprising a plasma ionization source to be used under a condition of atmospheric pressure.

9. A mass spectrometer comprising the shutter according to claim 1 .

10. The mass spectrometer according to claim 9 , comprising a plasma ionization source to be used under a condition of atmospheric pressure.

11. The shutter according to claim 1 , further comprising
a plug having a portion composed of an elastic material at a position corresponding to an outer periphery of the small aperture in a state that the small aperture is closed by the second member.

Assignees

• Shimadzu Corp

Inventors

• Nakano Tomohito

Classifications

• F16K3/029

  with two or more gates · CPC title

• H01J49/0495 Primary

  Vacuum locks; Valves (valves per se F16K) · CPC title

• F16K3/246

  Combination of a sliding valve and a lift valve · CPC title

• H01J49/24 Primary

  Vacuum systems, e.g. maintaining desired pressures · CPC title

• F16K3/0209

  the valve having a particular passage, e.g. provided with a filter, throttle or safety device · CPC title