Compact mass spectrometer
US-9530631-B2 · Dec 27, 2016 · US
US10354847B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10354847-B2 |
| Application number | US-201816020482-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 27, 2018 |
| Priority date | May 31, 2013 |
| Publication date | Jul 16, 2019 |
| Grant date | Jul 16, 2019 |
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A miniature mass spectrometer is disclosed comprising an atmospheric pressure ionization source 701 , a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of the first vacuum chamber and a third vacuum chamber located downstream of the second vacuum chamber. A first vacuum pump 707 is arranged and adapted to pump the first vacuum chamber, wherein the first vacuum pump 707 is arranged and adapted to maintain the first vacuum chamber at a pressure <10 mbar. A first RF ion guide 702 is located within the first vacuum chamber. An ion detector 705 is located in the third vacuum chamber. The ion path length from the atmospheric pressure sampling orifice or capillary to an ion detecting surface of the ion detector 705 is ≤400 mm. The mass spectrometer further comprises a split flow turbomolecular vacuum pump 706 comprising an intermediate or interstage port connected to the second vacuum chamber and a high vacuum (“HV”) port connected to the third vacuum chamber. The first vacuum pump 707 is also arranged and adapted to act as a backing vacuum pump to the split flow turbomolecular vacuum pump 706 . The first vacuum pump has a maximum pumping speed ≤10 m 3 /hr (2.78 L/s).
Opening claim text (preview).
The invention claimed is: 1. A miniature mass spectrometer comprising: an atmospheric pressure ionisation source; a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of said first vacuum chamber and a third vacuum chamber located downstream of said second vacuum chamber; a first vacuum pump arranged and adapted to pump said first vacuum chamber, wherein said first vacuum pump is arranged and adapted to maintain said first vacuum chamber at a pressure <10 mbar; an RF ion guide located in said second vacuum chamber; a mass analyser arranged in said third vacuum chamber; and an ion detector located in said third vacuum chamber; wherein the ion path length from said atmospheric pressure sampling orifice or capillary to an ion detecting surface of said ion detector is ≤400 mm; wherein said mass spectrometer further comprises: a split flow turbomolecular vacuum pump comprising an intermediate or interstage port connected to said second vacuum chamber and a high vacuum (“HV”) port connected to said third vacuum chamber; and wherein said first vacuum pump is arranged and adapted to act as a backing vacuum pump to said split flow turbomolecular vacuum pump. 2. A miniature mass spectrometer as claimed in claim 1 , wherein said atmospheric pressure ionisation source comprises an Electrospray ionisation (“ESI”) ion source. 3. A miniature mass spectrometer as claimed in claim 1 , wherein said atmospheric pressure ionisation source comprises an Atmospheric Pressure Chemical Ionisation (“APCI”) ion source. 4. A miniature mass spectrometer as claimed in claim 1 , further comprising a liquid chromatography or gas chromatography device upstream of said ionisation source. 5. A miniature mass spectrometer as claimed in claim 1 , wherein the product of the pressure P 1 in the first vacuum chamber and the length L 1 of said first vacuum chamber is in the range 10-100 mbar-cm. 6. A miniature mass spectrometer as claimed in claim 5 , wherein the product of the pressure P 2 in the vicinity of said RF ion guide and the length L 2 of said RF ion guide is in the range 0.05-0.3 mbar-cm. 7. A miniature mass spectrometer as claimed in claim 1 , further comprising a differential pumping aperture or orifice between said first vacuum chamber and said second vacuum chamber. 8. A miniature mass spectrometer as claimed in claim 1 , wherein said second vacuum chamber is arranged to be maintained at pressure in the range 0.001-0.1 mbar. 9. A miniature mass spectrometer as claimed in claim 1 , further comprising a differential pumping aperture or orifice between said second vacuum chamber and said third vacuum chamber. 10. A miniature mass spectrometer as claimed in claim 1 , wherein said third vacuum chamber is arranged to be maintained at pressure <0.0003 mbar. 11. A method of mass spectrometry comprising: providing a miniature mass spectrometer comprising an atmospheric pressure ionisation source, a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of said first vacuum chamber and a third vacuum chamber located downstream of said second vacuum chamber, a first vacuum pump arranged and adapted to pump said first vacuum chamber, an RF ion guide located in said second vacuum chamber, a mass analyser arranged in said third vacuum chamber, an ion detector located in said third vacuum chamber, a split flow turbomolecular vacuum pump comprising an intermediate or interstage port connected to said second vacuum chamber and a high vacuum (“HV”) port connected to said third vacuum chamber, wherein the ion path length from said atmospheric pressure sampling orifice or capillary to an ion detecting surface of said ion detector is ≤400 mm, wherein said first vacuum pump is arranged and adapted to act as a backing vacuum pump to said split flow turbomolecular vacuum pump, and wherein no RF ion guide is arranged in said first vacuum chamber; operating said first vacuum pump to maintain said first vacuum chamber at a pressure <10 mbar; and passing analyte ions through said first RF ion guide located within said first vacuum chamber. 12. A method as claimed in claim 11 , further comprising: maintaining said second vacuum chamber at a pressure in the range 0.001-0.1 mbar; and maintaining said third vacuum chamber at a pressure <0.0003 mbar. 13. A miniature mass spectrometer as claimed in claim 11 , wherein the product of the pressure P 2 in the vicinity of said hexapole ion guide and the length L 2 of said hexapole ion guide is in the range 0.05-0.3 mbar-cm. 14. A miniature mass spectrometer comprising: an atmospheric pressure ionisation source; a first vacuum chamber having an atmospheric pressure sampling orifice or capillary, a second vacuum chamber located downstream of said first vacuum chamber and a third vacuum chamber located downstream of said second vacuum chamber; a first vacuum pump arranged and adapted to pump said first vacuum chamber, wherein said first vacuum pump is arranged and adapted to maintain said first vacuum chamber at a pressure <10 mbar; an RF ion guide located in said second vacuum chamber; a quadrupole mass analyser arranged in said third vacuum chamber; and an ion detector located in said third vacuum chamber; wherein the ion path length from said atmospheric pressure sampling orifice or capillary to an ion detecting surface of said ion detector is ≤400 mm; wherein said mass spectrometer further comprises: a split flow turbomolecular vacuum pump comprising an intermediate or interstage port connected to said second vacuum chamber and a high vacuum (“HV”) port connected to said third vacuum chamber; wherein said first vacuum pump is arranged and adapted to act as a backing vacuum pump to said split flow turbomolecular vacuum pump; wherein said second vacuum chamber is arranged to be maintained at pressure in the range 0.001-0.1 mbar; and wherein said third vacuum chamber is arranged to be maintained at pressure <0.0003 mbar. 15. A miniature mass spectrometer as claimed in claim 1 , wherein said first vacuum pump has a maximum pumping speed ≤10 m 3 /hr (2.78 L/s).
Vacuum systems, e.g. maintaining desired pressures · CPC title
Step by step routines describing the use of the apparatus (H01J49/0081 takes precedence) · CPC title
Ion guides (linear ion traps performing mass selection H01J49/4225, mass filters H01J49/421) · CPC title
Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components · CPC title
using surface ionisation, e.g. field-, thermionic- or photo-emission · CPC title
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