Electron emission source and method for fabricating the same

Patent metadata

Field	Value
Publication number	US-10354827-B2
Application number	US-201715697272-A
Country	US
Kind code	B2
Filing date	Sep 6, 2017
Priority date	Jan 25, 2017
Publication date	Jul 16, 2019
Grant date	Jul 16, 2019

Abstract

Provided is an electron emission source including a substrate, a fixed structure provided on the substrate, and an electron emission yarn provided between the substrate and the fixed structure. The fixed structure includes a first portion having a first width and a second portion having a second width greater than the first width, and the electron emission yarn extends on a first sidewall of the first portion of the fixed structure from between the fixed structure and the substrate.

First claim

What is claimed is:

1. An electron emission source comprising:
a substrate;
a fixed structure provided on the substrate and including at least one first portion and at least one second portion that are laterally arranged in a first direction, the first direction being parallel to a top surface of the substrate; and
an electron emission yarn provided on the substrate and including a first part and a second part,
wherein the first portion has a first width in a second direction and the second portion has a second width in the second direction, the second width being greater than the first width, the second direction being parallel to the top surface of the substrate and crossing the first direction,
wherein the first part of the electron emission yarn is provided between the substrate and the first portion of the fixed structure, and
wherein the second part of the electron emission yarn extends, along a third direction that is perpendicular to the top surface of the substrate, on a first one of two sidewalls of the first portion of the fixed structure from the first part of the electron emission yarn, the two sidewalls of the first portion facing each other in the second direction.

2. The electron emission source of claim 1 , wherein the second part of the electron emission yarn protrudes from a top surface of the fixed structure.

3. The electron emission source of claim 2 , wherein the second part of the electron emission yarn protrudes by several nanometers to several micrometers from the top surface of the fixed structure.

4. The electron emission source of claim 1 , wherein the electron emission yarn further includes a third part, the third part of the electron emission yarn extends, along the third direction, on a second one of the two sidewalls of the first portion from the first part of the electron emission yarn.

5. The electron emission source of claim 1 , wherein the electron emission yarn comprises a plurality of electron emission yarns having end portions extending, along the third direction, from the first part of the electron emission yarn, the end portions having the same heights.

6. The electron emission source of claim 1 , wherein the fixed structure comprises a plurality of first portions and a plurality of second portions, and the plurality of first portions and the plurality of second portions are alternately arranged in the first direction.

7. The electron emission source of claim 6 , wherein the electron emission source comprises a plurality of fixed structures, and the plurality of fixed structures are arranged in the second direction.

8. The electron emission source of claim 7 , further comprising support structures provided on a side surface of each of fixed structures disposed outmost along the second direction among the plurality of fixed structures, wherein the support structures are arranged in the second direction together with the plurality of fixed structures.

9. The electron emission source of claim 1 , wherein the electron emission yarn has an end portion extending, along the third direction, from the first part of the electron emission yarn, and the end portion is disposed lower than a top surface of the fixed structure.

10. The electron emission source of claim 1 , wherein the electron emission yarn is provided to surround the two sidewalls, a top surface, and a bottom surface of the first portion of the fixed structure.

Assignees

• Electronics & Telecommunications Res Inst
• Electronics & Telecommunications Res Institute

Inventors

• Jeong Jin-Woo
• Song Yoon-Ho

Classifications

• H01J1/3048 Primary

  Distributed particle emitters · CPC title

• H01J1/304 Primary

  Field-emissive cathodes · CPC title

• H01J19/24

  Cold cathodes, e.g. field-emissive cathode · CPC title

• H01J9/025

  of field emission cathodes · CPC title

• H01J63/02

  Details, e.g. electrode, gas filling, shape of vessel · CPC title