MEMS microphone system and method

Patent metadata

Field	Value
Publication number	US-10349188-B2
Application number	US-201715787003-A
Country	US
Kind code	B2
Filing date	Oct 18, 2017
Priority date	Oct 18, 2017
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

A Microelectromechanical system (MEMS) microphone comprises a base unit and a driving system disposed on the base unit. The driving system comprises a first diaphragm, a second diaphragm spaced apart from the first diaphragm, and a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms. The driving system further comprises a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region and the sealed electrode region having an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

First claim

What is claimed is:

1. A microelectromechanical system (MEMS) microphone comprising:
a base unit;
a driving system disposed on the base unit, the driving system comprising:
a first diaphragm;
a first stationary comb finger electrode extending from the first diaphragm;
a second diaphragm spaced apart from the first diaphragm; and
a second stationary comb finger electrode extending from the second diaphragm and spaced apart from the first stationary comb finger electrode;

a comb finger counter electrode assembly comprising a moving comb finger electrode member configured for movement relative to the first stationary comb finger electrode and the second stationary comb finger electrode, the counter electrode assembly extending from the first diaphragm and the second diaphragm, and the moving comb finger electrode member interdigitated with the first stationary comb finger electrode and the second stationary comb finger electrode; and
a side wall mechanically coupled to the first diaphragm and to the second diaphragm, the first diaphragm, the second diaphragm, and the side wall defining a sealed electrode region;
wherein the sealed electrode region has an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

2. The MEMS microphone of claim 1 wherein the first diaphragm is substantially made of a material having a low conductivity and the second diaphragm is substantially made of a material having a low conductivity.

3. The MEMS microphone of claim 1 wherein the moving comb finger electrode member is substantially made of a material having a conductivity.

4. The MEMS microphone of claim 2 wherein one or more of the first diaphragm and the second diaphragm are substantially made of a material having a tensile residual stress.

5. The MEMS microphone of claim 1 wherein the comb finger counter electrode assembly comprising a material having a tensile residual stress.

6. The MEMS microphone of claim 1 further comprising:
a connecting member extending directly from the first diaphragm and the second diaphragm and configured to mechanically couple the comb finger counter electrode assembly to the first diaphragm and the second diaphragm.

7. The MEMS microphone of claim 6 further comprising:
one or more pillars formed within the driving system.

8. A microelectromechanical (MEMS) microphone comprising:
a base unit;
a driving system disposed on the base unit, the driving system comprising:
a first diaphragm; and
a second diaphragm spaced apart from the first diaphragm;

a comb finger counter electrode assembly comprising a moving electrode member, the counter electrode assembly is mechanically coupled to the first and second diaphragms; and
a side wall mechanically coupled the first diaphragm to the second diaphragm defining a sealed electrode region;
one or more pillars formed within the driving system; and
a leak hole formed on the one or more pillars,
wherein the sealed electrode region has an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

9. The MEMS microphone of claim 5 wherein the comb finger counter electrode assembly comprises at least two moving comb finger electrode members formed within the sealed electrode region.

10. A driving system for a microelectromechanical system (MEMS) microphone comprising:
an electrode assembly comprising:
a first diaphragm;
a first stationary comb finger electrode extending from the first diaphragm;
a second diaphragm spaced apart from the first diaphragm;
a second stationary comb finger electrode extending from the second diaphragm and spaced apart from the first stationary comb finger electrode; and
a gap formed between the first and second diaphragm;

a comb finger counter electrode assembly formed within the first and second diaphragms, the comb finger counter electrode assembly comprising:
a moving comb finger electrode member configured for movement relative to the first stationary comb finger electrode and the second stationary comb finger electrode, and the moving comb finger electrode member interdigitated with the first stationary comb finger electrode and the second stationary comb finger electrode;
and

a side wall mechanically coupled to the first stationary comb finger electrode, the second stationary comb finger electrode, the first diaphragm, and the second diaphragm, with the first diaphragm, the second diaphragm, and the side wall defining a sealed electrode region;
wherein the sealed electrode region has an encapsulated gas pressure and the comb finger counter electrode assembly is disposed within the sealed electrode region.

11. The driving system of claim 10 wherein the first diaphragm is substantially made of a material having a low conductivity and the second diaphragm is substantially made of a material having a low conductivity.

12. The driving system of claim 10 wherein the moving comb finger electrode member is substantially made of a material having a conductivity.

13. The driving system of claim 11 wherein one or more of the diaphragms are substantially made of a material having a tensile residual stress.

14. The driving system of claim 10 wherein the comb finger counter electrode assembly comprising a material having a tensile residual stress.

15. The driving system of claim 10 further comprising a connecting member mechanically coupled the counter electrode assembly to the first and second diaphragms.

16. The driving system of claim 15 further comprising one or more pillars formed within the driving system.

17. The driving system of claim 16 further comprising a leak hole formed on the one or more pillars.

18. The driving system of claim 14 wherein the comb finger counter electrode assembly comprises at least two moving comb finger electrode member formed within the sealed electrode region.

Assignees

• Akustica Inc
• Bosch Gmbh Robert

Inventors

• Meisel Daniel C
• Gehl Bernhard
• Zhang Yujie
• Doller Andrew
• Hatipoglu Gokhan

Classifications

• B81B2203/0136

  Comb structures · CPC title

• B81B7/0061

  suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound · CPC title

• H04R2201/003

  Mems transducers or their use · CPC title

• B81B2203/04

  Electrodes · CPC title

• H04R19/04 Primary

  Microphones (H04R19/01 takes precedence) · CPC title