Semiconductor devices and systems including memory cells and related methods of fabrication

Patent metadata

Field	Value
Publication number	US-10347637-B2
Application number	US-201514927721-A
Country	US
Kind code	B2
Filing date	Oct 30, 2015
Priority date	Sep 16, 2011
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

A memory cell is disclosed. The memory cell includes a transistor and a capacitor. The transistor includes a source region, a drain region, and a channel region including an indium gallium zinc oxide (IGZO, which is also known in the art as GIZO) material. The capacitor is in operative communication with the transistor, and the capacitor includes a top capacitor electrode and a bottom capacitor electrode. Also disclosed is a semiconductor device including a dynamic random access memory (DRAM) array of DRAM cells. Also disclosed is a system including a memory array of DRAM cells and methods for forming the disclosed memory cells and arrays of cells.

First claim

What is claimed is:

1. A semiconductor device comprising:
a dynamic random access memory (DRAM) array comprising:
DRAM cells, each DRAM cell comprising a channel region comprising indium gallium zinc oxide, opposing ends of the channel region in direct contact with a metal material, a first DRAM cell of the DRAM cells supported by a material, a second DRAM cell of the DRAM cells positioned above the first DRAM cell of the DRAM cells, and a first channel material of the first DRAM cell perpendicular to a second channel material of the second DRAM cell.

2. A semiconductor device comprising:
a dynamic random access memory (DRAM) array comprising:
DRAM cells, each DRAM cell comprising a channel region comprising indium gallium zinc oxide, opposing ends of the channel region in direct contact with a metal material, and at least one DRAM cell of the DRAM cells comprising:
a transistor comprising the channel region comprising indium gallium zinc oxide; and
a capacitor comprising:
a bottom capacitor electrode configured to provide a drain region of the transistor.

3. The semiconductor device of claim 2 , wherein the channel region of each DRAM cell is oriented vertically relative to a surface of a material supporting the semiconductor device.

4. The semiconductor device of claim 2 , wherein the transistor is oriented vertically relative to a surface of a material on which the transistor is located.

5. The semiconductor device of claim 2 , further comprising an insulative material directly contacting sidewalls of the channel region.

6. The semiconductor device of claim 2 , further comprising another insulative material surrounding the channel region.

7. The semiconductor device of claim 5 , wherein an upper surface of the channel region is substantially coplanar with an upper surface of the insulative material.

8. The semiconductor device of claim 2 , wherein the capacitor further comprises a top capacitor electrode and a capacitor dielectric material between the bottom capacitor electrode and the top capacitor electrode.

9. The semiconductor device of claim 2 , wherein a first channel region of a first DRAM cell is parallel to a second channel region of a second DRAM cell.

10. The semiconductor device of claim 9 , further comprising a gate electrode in operative communication with the first channel region and the second channel region.

11. The semiconductor device of claim 9 , further comprising an additional metal material in contact with the first channel region and the second channel region.

12. A method of forming a semiconductor device comprising:
forming a dynamic random access memory (DRAM) array comprising DRAM cells, forming the DRAM cells comprising at least a first DRAM cell and at least a second DRAM cell, comprising:
forming a first transistor of the first DRAM cell comprising:
forming a source region supported by a material;
forming a gate electrode isolated within an insulative material above the source region;
forming an opening in the insulative material to expose at least a portion of each of the source region and the gate electrode; and
forming a first channel material comprising indium gallium zinc oxide in the opening at a temperature less than or equal to about 800 degrees Celsius to form a first channel region comprising indium gallium zinc oxide, opposing ends of the channel region in direct contact with a metal material; and

forming a first capacitor of the first DRAM cell in electrical connection with the channel material; and
forming the second DRAM cell positioned above the first DRAM cell comprising:
forming a second transistor of the second DRAM cell above the first capacitor, the second transistor comprising a second channel material perpendicular to the first channel material; and
forming a second capacitor of the second DRAM cell above the second transistor.

13. The method of claim 12 , wherein forming a first capacitor of the first DRAM cell comprises:
forming a bottom capacitor electrode over the first channel material;
forming a capacitor dielectric material over the bottom capacitor electrode; and
forming a top capacitor electrode over the capacitor dielectric material;
wherein the bottom capacitor electrode is integrated with a drain region of the first transistor.

14. A semiconductor device comprising:
a dynamic random access memory (DRAM) array comprising DRAM cells, each DRAM cell comprising:
a transistor comprising an indium gallium zinc oxide channel region isolated from a gate electrode by an insulative material; and
a capacitor in operative communication with the transistor, the capacitor comprising a bottom capacitor electrode, a top capacitor electrode, and a capacitor dielectric material between the bottom capacitor electrode and the top capacitor electrode and the bottom capacitor electrode of the capacitor configured to provide a drain region of the transistor.

15. The semiconductor device of claim 14 , wherein the bottom capacitor electrode of the capacitor is aligned with a length of the indium gallium zinc oxide channel region.

16. The semiconductor device of claim 14 , wherein the bottom capacitor electrode of the capacitor comprises segments in contact with a portion of the indium gallium zinc oxide channel region.

17. The semiconductor device of claim 14 , wherein a first DRAM cell of the DRAM cells occupies a horizontal plane also occupied by a second DRAM cell of the DRAM cells.

18. The semiconductor device of claim 14 , wherein the gate electrode comprises a single gate electrode.

19. The semiconductor device of claim 14 , wherein the gate electrode comprises an access line.

Assignees

• Micron Technology Inc

Inventors

• Sandhu Gurtej S

Classifications

• H01L28/60

  Electricity · mapped topic

• H01L27/1085

  Electricity · mapped topic

• H01L27/10876

  Electricity · mapped topic

• H01L27/10805 Primary

  Electricity · mapped topic

• H01L27/10873

  Electricity · mapped topic