Hall sensor readout system with offset determination using the Hall element itself

Patent metadata

Field	Value
Publication number	US-10345394-B2
Application number	US-201415034738-A
Country	US
Kind code	B2
Filing date	Nov 6, 2014
Priority date	Nov 6, 2013
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

A method for providing offset compensation in a Hall sensor comprising at least one Hall element having a plate-shaped sensor element made of a doped semiconductor material, comprises using measurements on the Hall element itself. The method comprises obtaining a first readout signal (V H ) from the at least one Hall element which is substantially dependent on the magnetic field, obtaining a second readout signal (V P ) from the at least one Hall element which is substantially independent of the magnetic field, and using the second readout signal (V P ) for obtaining a prediction ({circumflex over (V)} O ) of the offset (V O ) on the first readout signal (V H ).

First claim

The invention claimed is:

1. A method for offset determination in a Hall sensor for measuring a magnetic field,
the Hall sensor comprising: at least one Hall element having a plate-shaped sensor element made of a doped semiconductor material,
the method comprising:
i) obtaining a first readout signal (V H ) from the at least one Hall element by using a first technique which makes use of measurements on the Hall element and yields a result that is substantially dependent on the magnetic field to be measured including an offset (V O ) to be determined,
ii) obtaining a second readout signal (V P ) from the at least one Hall element by using a second technique which makes use of measurements on the Hall element and yields a result that is substantially independent of the magnetic field but is correlated to said offset (V O ),
wherein obtaining the second readout signal comprises making linear combinations of readout signals with at least two Hall-type measurements, so that the magnetic field component is cancelled out or comprises at least one Van der Pauw type measurement, and
wherein the second readout signal is measured, during operation, in the presence of the magnetic field, and
iii) using the second readout signal (V P ) for obtaining a prediction ({circumflex over (V)} O ) of the offset (V O ) on the first readout signal (V H ) as a linear function of the second readout signal (V P ), expressed as {circumflex over (V)} O =a+b V P , a and b being parameters in the linear function, wherein the parameters a and b are optimized by means of a calibration procedure that includes
bringing the Hall sensor in a reference state,
bringing the Hall sensor in an environment with a known magnetic field and at a known temperature (T) selected from a first set of temperatures, and
recording, for each temperature (T) of the first set of temperatures, the first readout signal obtained by using the first technique, to obtain a first reference curve (V Oref (T)), and the second readout signal obtained by using the second technique to obtain a second reference curve (V Pref (T)).

2. The method according to claim 1 , wherein the parameters a and b in the offset prediction ({circumflex over (V)} O ) are temperature dependent.

3. The method according to claim 1 , further comprising determining the parameter b by means of a calibration procedure comprising the steps of:
bringing the Hall sensor in an environment with known magnetic field and at a known temperature selected from a second set of temperatures, and
recording, for each temperature of the second set of temperatures, the first readout signal (V H ) obtained by using the first technique as a third reference signal (V Osec (T)), and the second readout signal (V P ) obtained by using the second technique as a fourth reference signal (V Psec (T)), and
determining the parameter b from the recorded reference signals as a scale factor between (V Osec −V Oref ) and (V Psec −V Pref ), with the assumption that the reference signals are interpolated when they need to be determined at a temperature for which no direct measurement is available.

4. The method according to claim 1 , wherein obtaining the second readout signal (V P ) from the at least one Hall element of step ii) comprises making linear combinations of readout signals with at least two Hall-type measurements, so that the magnetic field component is cancelled out.

5. The method according to claim 1 ,
wherein obtaining the second readout signal (V P ) from the at least one Hall element of step ii) comprises readout of a configuration comprising at least two neighbouring Hall elements which are interconnected such that the magnetic field components of the individual Hall elements cancel one another out; and/or
wherein obtaining the second readout signal (V P ) from the at least one Hall element of step ii) comprises averaging of measurement signals obtained from geometric spinning measurements on a plurality of neighbouring Hall elements.

6. The method according to claim 1 , at least one Hall element comprising at least four nodes, wherein obtaining a second readout signal (V P ) from the at least one Hall element of step ii) comprises obtaining measurement signals in a Van der Pauw-type measurement set-up of the Hall element wherein nodes that have a same function appear consecutive when going over the nodes in an order defined by following the edge of the plate-shaped sensor element, the second readout signal (V P ) being obtained by differencing two Van der Pauw-type measurements on the at least one Hall element.

7. The method according to claim 6 ,
wherein either differencing two Van der Pauw-type measurements includes differencing two Van der Pauw measurements obtained sequentially; or
wherein differencing two Van der Pauw-type measurements is obtained by performing a single measurement on an interconnection of at least two Hall plates.

8. The method according to claim 6 , wherein obtaining a second readout signal (V P ) from the at least one Hall element of step ii) comprises taking a linear combination of a plurality of Van der Pauw-type measurements on the at least one Hall element.

9. The method according to claim 1 , wherein obtaining the second readout signal (V P ) from the at least one Hall element of step ii) comprises making linear combinations of readout signals with at least two Hall-type measurements, in such a way that the magnetic field component comprises at least one Van der Pauw type measurement.

10. The method according to claim 1 ,
furthermore comprising measuring the actual temperature (Ta) and using this actual temperature (Ta) in the offset prediction; and/or
further comprising the step of iv) removing the offset prediction ({circumflex over (V)} O ) from the first readout signal (V H ) to compensate the offset (V O ).

11. A semiconductor chip comprising a Hall sensor, the Hall sensor comprising:
at least one Hall element, each Hall element having a plate-shaped sensor element made of a doped semiconductor material,
sensor means for obtaining a first readout signal (V H ) from the at least one Hall element using a first technique that makes use of measurements on the Hall element and yields a result which is substantially dependent on the magnetic field and has an offset (V O ) to be determined,
sensor means for obtaining a second readout signal (V P ) from the at least one Hall element using a second technique that makes use of measurements on the Hall element and yields a result which is substantially independent of the magnetic field but is correlated to said offset (V O ),
wherein obtaining the second readout signal comprises making linear combinations of readout signals with at least two Hall-type measurements, so that the magnetic field component is cancelled out or comprises at least one Van der Pauw type measurement, and
wherein the second readout signal is measured, during operation, in the presence of the magnetic field, and
means for obtaining a prediction ({circumflex over (V)} O ) of the offset (V O ) on the first readout signal (V H ) as a linear function of the second readout signal (V P ), expressed as {circumflex over (V)} O =a+b V P , a and b being parameters in the linear function, wherein the parameters a and b are optimized by means of a calibration procedure that includes
bringing the Hall sensor in a reference state,
bringing the Hall sensor in an environment with a known magnetic field and at a known temperature (T) selected from a first set of temperatures, and
recording, for each temperature (T) of the first set of temperatures, the first readout signal obtained by using the first technique, to obtain a first reference curve (V Oref

Assignees

• Melexis Technologies Nv

Inventors

• Raman Johan
• Rombouts Pieter

Classifications

• G01R33/0035 Primary

  Calibration of single magnetic sensors, e.g. integrated calibration · CPC title

• G01R33/07

  Hall effect devices · CPC title

• G01R33/0082

  Compensation, e.g. compensating for temperature changes · CPC title

• G01R33/0029

  Treating the measured signals, e.g. removing offset or noise · CPC title

• G01R33/075

  Hall devices configured for spinning current measurements · CPC title