Infrared sensing devices and methods

Patent metadata

Field	Value
Publication number	US-10345154-B2
Application number	US-201815997836-A
Country	US
Kind code	B2
Filing date	Jun 5, 2018
Priority date	Jul 17, 2015
Publication date	Jul 9, 2019
Grant date	Jul 9, 2019

Abstract

An infrared sensor assembly for sensing infrared radiation comprises infrared sensing elements and the infrared sensing compensation elements that are different so that, for a same flux on the infrared sensing elements and the infrared sensing compensation elements, the radiation responsive element of the infrared sensing elements absorbs more radiation than the radiation responsive element of the infrared sensing compensation elements, as to receive substantially more radiation than the radiation responsive element of the infrared sensing compensation elements. An output of the sensor array is a subtractive function of a sum of the signals of the plurality of infrared sensing elements and a sum of the signals of the plurality of the infrared sensing compensation elements such that at least linear and/or non-linear parasitic thermal fluxes are at least partly compensated for.

First claim

The invention claimed is:

1. An infrared sensor assembly for sensing infrared radiation from an object, the infrared sensor assembly comprising:
a sensor array comprising a plurality of sensing elements, provided on or embedded in a substrate extending in a substrate plane, wherein the sensor array comprises:
at least two infrared sensing elements, each infrared sensing element having a radiation responsive element providing a proportionate electrical signal in response to infrared radiation incident thereto; and responsive to parasitic thermal fluxes,
at least two infrared sensing compensation elements, at least one of said infrared sensing compensation elements being interspersed among the at least two infrared sensing elements, each of said two infrared sensing compensation elements having a radiation responsive element providing a proportionate electrical signal in response to infrared radiation incident thereto and responsive to parasitic thermal fluxes, and

the infrared sensing elements and the infrared sensing compensation elements being different so that, for a same flux on the infrared sensing elements and the infrared sensing compensation elements, the radiation responsive element of the infrared sensing elements absorbs more radiation than the radiation responsive element of the infrared sensing compensation elements, as to receive substantially more radiation than the radiation responsive element of the infrared sensing compensation elements,
wherein an output of the sensor array is a subtractive function of a sum of the signals of the plurality of infrared sensing elements and a sum of the signals of the plurality of the infrared sensing compensation elements such that at least linear and/or non-linear parasitic thermal fluxes are at least partly compensated for.

2. The infrared sensor assembly according to claim 1 , wherein an absorption layer is positioned above the infrared sensing compensation element, adjacent to the top of the infrared sensing compensation element, in the infrared sensing compensation element, or adjacent to the top of the radiation responsive element of the infrared sensing compensation element.

3. The infrared sensor assembly according to claim 1 , wherein an absorption coefficient of the radiation responsive element of the infrared sensing compensation element is substantially smaller than an absorption coefficient of the radiation responsive element of the infrared sensing element.

4. The infrared sensor assembly according to claim 1 , wherein an absorption layer is positioned above the infrared sensing compensation element, adjacent to the top of the infrared sensing compensation element, in the infrared sensing compensation element, or adjacent to the top of the radiation responsive element of the infrared sensing compensation element.

5. The infrared sensor assembly according to claim 4 , wherein furthermore a reflective layer is positioned at a bottom side of the radiation responsive element of the infrared sensing element.

6. The infrared sensor assembly according to claim 1 , wherein said subtractive function corresponds with a sum of the signals of the plurality of the infrared sensing elements minus a multiplication of a proportionality factor and a sum of the signals of the plurality of blind sensing elements and/or wherein said subtractive function is achieved by placing the sensors in circuit according to an anti-series schematic.

7. The infrared sensor assembly according to claim 1 , wherein any of said sum of the signals of the plurality of the infrared sensing elements and/or said sum of the signals of the plurality of blind sensing elements is a weighted sum wherein for each of the pixels a weighing factor is taken into account.

8. The infrared sensor assembly according to claim 1 , wherein each of the infrared sensing compensation elements and the infrared sensing elements have a full field of view that corresponds with the field of view of the infrared sensor assembly.

9. The infrared sensor assembly according to claim 1 , the infrared sensor assembly comprising a cap covering the sensor array, wherein the center of the sensor array is matched with the center of the cap covering the sensor array or the center of the sensor array is matched to an external environment that induces non-linear thermal gradients.

10. The infrared sensor assembly according to claim 1 , further comprising a processor for processing of the electrical signal output of the infrared sensing elements and of the infrared sensing compensation elements, thus cancelling the signal distortion caused by thermal gradients of the sensor array, and/or further comprising a processor programmed for subtractive processing of the electrical signal output of the plurality of the infrared sensor elements of the sensor array together with the output of the plurality of infrared sensing compensation elements of the sensor array, thus cancelling the signal distortion caused by thermal gradients of the sensor array.

11. The infrared sensor assembly according to claim 1 , further comprising means for sampling and digitizing the output of the plurality of infrared sensing elements of the sensor array together with the plurality of infrared sensing compensation elements of the sensor array and/or wherein parasitic thermal fluxes include a convolution of thermal gradients over the sensor array and wherein for each infrared sensing elements an infrared sensing compensation element is positioned on an isotherm in the pixel array, the isotherm being corresponding with one of the thermal gradients in the convoluted thermal gradients.

12. The infrared sensor assembly according to claim 1 , wherein each row and/or each column of the sensor array comprises at least one infrared sensing compensation element.

13. The infrared sensor assembly according to claim 1 , wherein the sensor array comprises a same amount of infrared sensing elements and infrared sensing compensation elements and/or wherein each row and/or each column of the sensor array comprises a same amount of infrared sensing elements and infrared sensing compensation elements, and the sensor elements are arranged in a checkerboard arrangement.

14. The infrared sensor assembly according to claim 1 , wherein the sensor array is a 2×2 sensor array wherein the main diagonal elements of the sensor array only comprise infrared sensing compensation elements or wherein each corner of the sensor array comprises an infrared sensing compensation element and whereby the sensor array further comprises at least one infrared sensing compensation element interspersed in between the at least two infrared sensing elements and/or wherein the sensor array comprises a same amount of rows and columns.

15. The infrared sensor assembly according to claim 1 , further comprising a scanning shift register for selecting a row of the sensor array to be read out.

16. The infrared sensor assembly according to claim 3 , wherein the infrared sensing elements and infrared sensing compensation elements each have a same layout.

17. The infrared sensor assembly according to claim 1 , wherein channels are provided between the infrared sensing elements and infrared sensing compensation elements of the sensor array.

18. An infrared sensor assembly comprising a sensor array for providing an image signal of a scene, the sensor array comprising a plurality of infrared sensing elements and infrared sensing compensation elements, wherein the sensor array comprises channels which are provided between the plurality of infrared sensing elements and infrared sens

Assignees

• Melexis Technologies Nv

Inventors

• Van Buggenhout Carl
• Maes Ben
• Vanroye Karel
• Reekmans Stijn

Classifications

• G01J2005/067

  Physics · mapped topic

• G01J5/045

  Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements (getter arrangements per se H10W76/48, H10P36/03) · CPC title

• G01J5/10

  using electric radiation detectors · CPC title

• G01J2005/106

  Arrays · CPC title

• G01J5/06 Primary

  Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity (for adjusting of solid angle of collected radiation G01J5/07; means for wavelength selection G01J5/0801) · CPC title