Sulfonium salt, chemically amplified resist composition, and pattern forming process
US-9221742-B2 · Dec 29, 2015 · US
US10343973B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10343973-B2 |
| Application number | US-201816170113-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 25, 2018 |
| Priority date | Mar 28, 2014 |
| Publication date | Jul 9, 2019 |
| Grant date | Jul 9, 2019 |
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A method for producing a bifunctional compound of formula (3) wherein R 2 represents H, CH 3 or C 2 H 5 , the method comprising reducing a bifunctional compound of formula (1): wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 , or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 , in the presence of a catalyst having hydrogenation activity and hydrogen.
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The invention claimed is: 1. A method for producing a bifunctional compound of formula (3): wherein R 2 represents H, CH 3 or C 2 H 5 , the method comprising reducing a bifunctional compound of formula (1): wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 , in the presence of a catalyst having hydrogenation activity and hydrogen. 2. The method according to claim 1 , wherein the catalyst having hydrogenation activity comprises at least one element selected from the group consisting of copper, chromium, iron, zinc, aluminium, nickel, cobalt and palladium. 3. The method according to claim 1 , further comprising producing the bifunctional compound of (1) by subjecting a monoolefin of formula (2): wherein R 1 represents COOCH 3 , COOC 2 H 5 , COOC 3 H 7 , COOC 4 H 9 or CHO; and R 2 represents H, CH 3 or C 2 H 5 , provided that when R 1 represents CHO, R 2 represents C 2 H 5 , carbon monoxide and hydrogen gases to a hydroformylation reaction in the presence of a rhodium compound and an organic phosphorous compound. 4. The method according to claim 3 , further comprising performing the hydroformylation reaction using: the rhodium compound in an amount of 0.1 to 60 μmol relative to 1 mol of the monoolefins of formula (2); and the organic phosphorous compound in an amount of 300 to 10000 times the molar quantity of the rhodium compound.
saturated · CPC title
having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, [IMAGE cpc-sch-C07C-0958.gif] groups,[IMAGE cpc-sch-C07C-0959.gif] groups, or[IMAGE cpc-sch-C07C-0960.gif] in the acid moiety · CPC title
of polycyclic acids · CPC title
by addition to unsaturated carbon-to-carbon bonds · CPC title
having a —CHO group on a condensed ring system · CPC title
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