Electronic device, method for producing electronic device, electronic apparatus, and moving object

Patent metadata

Field	Value
Publication number	US-10340440-B2
Application number	US-201615086620-A
Country	US
Kind code	B2
Filing date	Mar 31, 2016
Priority date	Apr 3, 2015
Publication date	Jul 2, 2019
Grant date	Jul 2, 2019

Abstract

An electronic device includes a base material, a first metal film disposed on the base material and containing nitrogen and chromium, and a second metal film disposed on the first metal film and containing gold. In the first metal film, the number of nitrogen atoms may be between 20% to 100% of the number of chromium atoms. Further, the distribution of nitrogen atoms in the first metal film is larger in a third region sandwiched between a first region on the base material side of the first metal film and a second region on the second metal film side than in the first region and in the second region.

First claim

What is claimed is:

1. An electronic device, comprising:
a base material having a first surface;
a first metal film disposed on the first surface and containing nitrogen and chromium; and
a second metal film disposed on a surface of the first metal film on the opposite side to the first surface and containing gold, wherein:
the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 20% to 100% of the number of chromium atoms.

2. The electronic device according to claim 1 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 20% to 50% of the number of chromium atoms.

3. The electronic device according to claim 1 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 40% to 100% of the number of chromium atoms.

4. The electronic device according to claim 1 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 40% to 50% of the number of chromium atoms.

5. The electronic device according to claim 1 , wherein the base material contains at least one of quartz crystal, glass, and silicon.

6. The electronic device according to claim 1 further comprising:
a piezoelectric substrate;
an excitation electrode disposed on the piezoelectric substrate; and
a connection electrode disposed on the piezoelectric substrate and electrically connected to the excitation electrode, wherein
the base material is the piezoelectric substrate, and
at least one of the excitation electrode and the connection electrode includes the first metal film and the second metal film.

7. An electronic apparatus comprising the electronic device according to claim 1 .

8. A moving object comprising the electronic device according to claim 1 .

9. An electronic device, comprising:
a base material having a first surface;
a first metal film disposed on the first surface and containing nitrogen and chromium; and
a second metal film disposed on a surface of the first metal film on the opposite side to the first surface and containing gold, wherein:
the first metal film includes a first region located on the base material side, a second region located on the second metal film side, and a third region interposed between the first region and the second region, and
the third region includes a region in which the distribution of nitrogen atoms is larger than in the first region and in the second region.

10. The electronic device according to claim 9 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 20% to 100% of the number of chromium atoms.

11. The electronic device according to claim 9 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 20% to 50% of the number of chromium atoms.

12. The electronic device according to claim 9 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 40% to 100% of the number of chromium atoms.

13. The electronic device according to claim 9 , wherein the first metal film includes a region in which the number of nitrogen atoms in the first metal film is between 40% to 50% of the number of chromium atoms.

14. The electronic device according to claim 9 , wherein the base material contains at least one of quartz crystal, glass, and silicon.

15. The electronic device according to claim 9 further comprising:
a piezoelectric substrate;
an excitation electrode disposed on the piezoelectric substrate; and
a connection electrode disposed on the piezoelectric substrate and electrically connected to the excitation electrode, wherein
the base material is the piezoelectric substrate, and
at least one of the excitation electrode and the connection electrode includes the first metal film and the second metal film.

16. An electronic apparatus comprising the electronic device according to claim 9 .

Assignees

• Seiko Epson Corp

Inventors

• Otsuki Tetsuya
• Murakami Shiro
• Arai Tomohiro
• Wada Mitsuhiro
• Ito Hiroshi
• Shiraki Manabu
• Kondo Manabu
• Hama Muneyoshi

Classifications

• H03H9/131

  consisting of a multilayered structure · CPC title

• H03H9/0509

  consisting of adhesive elements · CPC title

• C23C14/0036

  Reactive sputtering · CPC title

• C23C14/025

  Metallic sublayers · CPC title

• H03H9/0547

  consisting of a vertical arrangement (H03H9/0566 takes precedence) · CPC title