Systems and methods for automated multi-zone detection and modeling

Patent metadata

Field	Value
Publication number	US-10340165-B2
Application number	US-201715451038-A
Country	US
Kind code	B2
Filing date	Mar 6, 2017
Priority date	Mar 29, 2016
Publication date	Jul 2, 2019
Grant date	Jul 2, 2019

Abstract

A semiconductor tool includes an illumination source to generate an illumination beam, one or more illumination optical elements to direct a portion of the illumination beam to a sample, a detector, one or more collection optical elements to direct radiation emanating from the sample to the detector, and a controller communicatively coupled to the detector. The controller is configured to measure alignment at a plurality of locations across the sample to generate alignment data, select an analysis area for alignment zone determination, divide the analysis area into two or more alignment zones having different alignment signatures; model the alignment data of at least a first alignment zone of the two or more alignment zones using a first alignment model, and model the alignment data of at least a second alignment zone of the two or more alignment zones using a second alignment model different than the first alignment model.

First claim

What is claimed:

1. A semiconductor tool comprising:
an illumination source configured to generate an illumination beam;
one or more illumination optical elements configured to direct a portion of the illumination beam to a sample;
a detector;
one or more collection optical elements configured to direct radiation emanating from the sample to the detector; and
a controller communicatively coupled to the detector, the controller including one or more processors configured to execute program instructions configured to cause the one or more processors to:
measure alignment at a plurality of locations across the sample to generate alignment data based on the collection of radiation emanating from the sample by the detector in response to illumination from the illumination beam;
select an analysis area for alignment zone determination including at least some of the plurality of locations across the sample;
determine one or more zone boundaries dividing the analysis area into two or more alignment zones having different alignment signatures by minimizing, within a selected tolerance providing a selected trigger condition, interzone variations of portions of the alignment data associated with difference locations within the two or more alignment zones;
model the portions of the alignment data associated with the two or more alignment zones using two or more alignment models when the specified trigger condition is met; and
provide overlay data to correct for overlay errors in at least one of the sample or one or more additional samples, wherein the overlay data is based on the two or more alignment models applied to the two or more alignment zones when the specified trigger condition is met.

2. The semiconductor tool of claim 1 , wherein selecting the analysis area for alignment zone determination comprises:
selecting a candidate analysis area, the candidate analysis area including at least some of the plurality of locations across the sample;
defining a sweep parameter such that each value of the sweep parameter bounded by the analysis area divides the analysis area into a first region and a second region;
evaluating, for a plurality of values of the sweep parameter bounded by the analysis area, whether the specified trigger condition is met; and
defining the candidate analysis area as the analysis area if the specified trigger condition is met for at least one value of the sweep parameter.

3. The semiconductor tool of claim 2 , wherein the specified trigger condition comprises:
an absolute value difference between a mean value of a portion of the alignment data associated with the first region and a mean value of a portion of the alignment data associated with the second region is greater than a specified percentage of a mean value of a portion of the alignment data associated with the candidate analysis area.

4. The semiconductor tool of claim 3 , wherein the specified percentage is within a range of 10% to 20%.

5. The semiconductor tool of claim 3 , wherein the specified percentage is approximately 15%.

6. The semiconductor tool of claim 1 , wherein selecting the analysis area for alignment zone determination comprises:
including regions of the sample having statistically significant alignment data.

7. The semiconductor tool of claim 1 , wherein determining the one or more zone boundaries dividing the analysis area into the two or more alignment zones comprises:
defining a sweep parameter such that each value of the sweep parameter bounded by the analysis area divides the analysis area into a first region and a second region; and
selecting a value of the sweep parameter as a zone boundary to minimize, within a specified tolerance, a difference between an alignment signal metric applied to the first region and the alignment signal metric applied to the second region, wherein the zone boundary divides the analysis area into the first alignment zone and the second alignment zone.

8. The semiconductor tool of claim 7 , wherein selecting the value of the sweep parameter as the zone boundary comprises:
selecting the value of the sweep parameter as the zone boundary to minimize, within the specified tolerance, a difference between a standard deviation of the portion of the alignment data associated with the first region and a standard deviation of the portion of the alignment data associated with the second region.

9. The semiconductor tool of claim 1 , wherein determining the one or more zone boundaries dividing the analysis area into the two or more alignment zones comprises:
defining a sweep parameter such that each value of the sweep parameter bounded by the analysis area divides the analysis area into a first region and a second region;
applying, for a plurality of values of the sweep parameter bounded by the analysis area, a first alignment model to a portion of the alignment data associated with the first region and a second alignment model to a portion of the alignment data associated with the second region; and
selecting the value of the sweep parameter as a zone boundary to minimize, within the specified tolerance, residual values associated with the first alignment model and the second alignment model.

10. The semiconductor tool of claim 1 , wherein the alignment data comprises:
at least one of alignment data associated with an alignment measurement of a lithography system prior the fabrication of a semiconductor layer, or overlay data associated with an alignment of two or more fabricated semiconductor layers.

11. The semiconductor tool of claim 1 , wherein the alignment data comprises:
at least one of raw data or residual data.

12. The semiconductor tool of claim 1 , wherein the sweep parameter comprises:
a radial location on the sample.

13. The semiconductor tool of claim 1 , wherein the sweep parameter comprises:
a polar angle on the sample.

14. The semiconductor tool of claim 1 , wherein the one or more processors are further configured to execute program instructions configured to cause the one or more processors to apply a data processing operation to the alignment data.

15. The semiconductor tool of claim 14 , wherein the data processing operation comprises:
at least one of a data smoothing operation, a data interpolation operation, a data filtering operation, a discontinuity analysis, or a derivative analysis.

16. The semiconductor of claim 1 , wherein determining the one or more zone boundaries dividing the analysis area in to the two or more alignment zones comprises:
defining a sweep parameter such that each value of the sweep parameter bounded by the analysis area divides the analysis area into a first region and a second region;
evaluating, for a plurality of values of the sweep parameter bounded by the analysis area, whether the specified trigger condition is met; and
determining a zone boundary of the one or more zone boundaries as the sweep parameter if the specified trigger condition is met for at least one value of the sweep parameter.

17. The semiconductor tool of claim 16 , wherein the specified trigger condition comprises:
an absolute value difference between a mean value of a portion of the alignment data associated with the first region and a mean value or a portion of the alignment data associated with the second region is greater than a specified percentage of a mean value of a portion of the alignment data associated with the candidate analysis area.

18. The semiconductor tool of claim 17 , wherein the specified percentage is within a range of 10% to 20%.

19. A se

Assignees

• Kla Tencor Corp

Inventors

• Nabeth Jeremy
• Demirer Onur N
• Karur-Shanmugam Ramkumar
• Hoong Hoo Choon (George)
• Sparka Christian
• Heo Hoyoung
• Sherwin Stuart
• Anis Fatima
• Smith Mark D
• Pierson William

Classifications

• H10P72/0606 Primary

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• G01B11/002 Primary

  for measuring two or more coordinates · CPC title

• G03F9/7046

  Strategy, e.g. mark, sensor or wavelength selection · CPC title

• G01B11/272

  using photoelectric detection means · CPC title

• G01B2210/56

  Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth · CPC title