Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US10336860B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10336860-B2 |
| Application number | US-201515513761-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 17, 2015 |
| Priority date | Sep 25, 2014 |
| Publication date | Jul 2, 2019 |
| Grant date | Jul 2, 2019 |
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A polymer compound having an excellent crosslinking ability is provided. The polymer compound has at least one terminal constitutional unit represented by the formula (1) and a constitutional unit represented by the formula (2): In the constitutional unit represented by formula (1), mT represents an integer of 0 to 5, nT represents an integer of 1 to 4, cT represents an integer of 0 to 1, Q T represents a crosslinkable group, K T represents an alkylene group or the like and Ar T represents an aromatic hydrocarbon group or the like. In the constitutional unit represented by formula (2), mA represents an integer of 0 to 5, n represents an integer of 1 to 4, Ar 1 represents an aromatic hydrocarbon group or the like, K A represents an alkylene group or the like and Q 1 represents a crosslinkable group.
Opening claim text (preview).
The invention claimed is: 1. A polymer compound comprising: at least one terminal constitutional unit represented by the following formula (1) and a constitutional unit represented by the following formula (2): wherein mT represents an integer of 0 to 5, nT represents an integer of 1 to 4, and cT represents 1, and when there are a plurality of mT, they can be the same or different, Q T represents a crosslinkable group represented by the following formula (XL-1), (XL-7), (XL-16) or (XL-17), and when there are a plurality of Q T , they can be the same or different, K T represents an alkylene group, a cycloalkylene group, an arylene group, a divalent heterocyclic group, a group represented by —NR′—, an oxygen atom or a sulfur atom, the foregoing groups each optionally having a substituent, wherein R′ represents a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, the foregoing groups each optionally having a substituent, and when there are a plurality of K T , they can be the same or different, and Ar T represents a group obtained by removing from a benzene ring optionally having a substituent, a fluorene ring optionally having a substituent, a naphthalene ring optionally having a substituent, a phenanthrene ring optionally having a substituent or a dihydrophenanthrene ring optionally having a substituent (nT+1) hydrogen atoms attached directly to carbon atoms constituting the ring; wherein mA represents an integer of 0 to 5, and n represents 1 or 2, and when there are a plurality of mA, they can be the same or different, Ar 1 represents an aromatic hydrocarbon group optionally having a substituent, K A represents an alkylene group, a cycloalkylene group, an arylene group, an oxygen atom or a sulfur atom, the foregoing groups each optionally having a substituent, and when there are a plurality of K A , they can be the same or different, and Q 1 represents a crosslinkable group selected from Group A of crosslinkable groups, and when there are a plurality of Q 1 , they can be the same or different; wherein Group A is a crosslinkable group selected from the group consisting of: wherein R X L represents a methylene group, an oxygen atom or a sulfur atom, and n X L represents an integer of 0 to 5, and when there are a plurality of R X L , they can be the same or different, and when there are a plurality of n X L , they can be the same or different, and * represents a binding site, the foregoing crosslinkable groups each optionally having a substituent. 2. The polymer compound according to claim 1 , wherein Q 1 is a crosslinkable group represented by the formula (XL-1), (XL-7), (XL-16) or (XL-17). 3. The polymer compound according to claim 1 , further comprising a constitutional unit represented by the following formula (X): wherein a 1 and a 2 each independently represent an integer of 0 or more, Ar X 1 and Ar X 3 each independently represent an arylene group or a divalent heterocyclic group, the foregoing groups each optionally having a substituent, Ar X 2 and Ar X 4 each independently represent an arylene group, a divalent heterocyclic group or a divalent group in which at least one type of arylene group and at least one type of divalent heterocyclic group are bonded directly to each other, the foregoing groups each optionally having a substituent, and when there are a plurality of Ar X 2 or Ar X 4 , they can be the same or different at each occurrence, and R X 1 , R X 2 and R X 3 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or a monovalent heterocyclic group, the foregoing groups each optionally having a substituent, and when there are a plurality of R X 2 or R X 3 , they can be the same or different at each occurrence. 4. The polymer compound according to claim 1 , further comprising a constitutional unit represented by the following formula (Y): Ar Y1 (Y) wherein Ar Y 1 represents an arylene group, a divalent heterocyclic group or a divalent group in which at least one type of arylene group and at least one type of divalent heterocyclic group are bonded directly to each other, the foregoing groups each optionally having a substituent. 5. The polymer compound according to claim 4 , wherein the constitutional unit represented by the formula (Y) is a constitutional unit represented by the following formula (Y-1) or a constitutional unit represented by the following formula (Y-2): wherein R Y1 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkoxy group, an aryl group or a monovalent heterocyclic group, the foregoing groups each optionally having a substituent, and the plurality of R Y 1 can be the same or different, and adjacent groups R Y 1 can be combined together to form a ring together with the carbon atoms to which they are attached: wherein R Y 1 is as defined above, and X Y 1 represents a group represented by —C(R Y 2 ) 2 —, —C(R Y 2 )═C(R Y 2 )— or —C(R Y 2 ) 2 —C(R Y 2 ) 2 —, wherein R Y 2 represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a cycloalkoxy group, an aryl group or a monovalent heterocyclic group, the foregoing groups each optionally having a substituent, and the plurality of R Y 2 can be the same or different, and groups R Y 2 can be combined together to form a ring together with the carbon atoms to which they are attached. 6. The polymer compound according to claim 1 , wherein the terminal constitutional unit represented by the formula (1) is contained in an amount of 0.1 mol % to 20 mol % with respect to the total amount of constitutional units contained in the polymer compound. 7. A method for producing a polymer compound comprising: at least one terminal constitutional unit represented by the following formula (1) and at least one type of constitutional unit selected from the group consisting of constitutional units represented by the following formula (2) and constitutional units represented by the following formula (2′), wherein the terminal constitutional unit represented by the formula (1) is contained in an amount of 0.1 mol % to 20 mol % with respect to the total amount of constitutional units contained in the polymer compound, the method comprising: a step of condensation-polymerizing at least one type of compound selected from the group consisting of a compound represented by the following formula (2M) and a compound represented by the following formula (2′M), and a step of end capping with a compound represented by the following formula (1M): wherein mT represents an integer of 0 to 5, nT represents an integer of 1 to 4, and cT represents 0 or 1, and when there are a plurality of mT, they can be the same or different, and nT is 1 when cT is 0, Q T represents a crosslinkable group represented by the following formula (XL-1), (XL-7), (XL-16) or (XL-17), a
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