Semiconductor nanowire photoelectric device

Patent metadata

Field	Value
Publication number	US-10333013-B2
Application number	US-201815961218-A
Country	US
Kind code	B2
Filing date	Apr 24, 2018
Priority date	Oct 27, 2017
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

A photoelectric semiconductor nanowire device and a method for manufacturing the same. The photoelectric semiconductor nanowire device includes a semiconductor nanowire doped with a dopant of a first conductivity type and including crystal semiconductor segments which include at least one porous semiconductor segment and are connected to opposite ends of the porous semiconductor segment. A first electrode and a second electrode respectively are disposed in the crystal semiconductor segments around the porous semiconductor segment to provide an electrical connection. The crystal semiconductor segment includes a crystal semiconductor, and the porous semiconductor segment includes a porous semiconductor. The semiconductor nanowire provides a current according to the intensity of an external light when the external light is irradiated to the porous semiconductor segment.

First claim

What is claimed is:

1. A photoelectric semiconductor nanowire device comprising:
a semiconductor nanowire doped with a dopant of a first conductivity type and including crystal semiconductor segments which include at least one porous semiconductor segment and are connected to opposite ends of the porous semiconductor segment; and
a first electrode and a second electrode respectively disposed in the crystal semiconductor segments around the porous semiconductor segment to provide an electrical connection,
wherein the crystal semiconductor segment includes a crystal semiconductor,
wherein the porous semiconductor segment includes a porous semiconductor, and
wherein the semiconductor nanowire provides a current according to intensity of an external light when the external light is irradiated to the porous semiconductor segment.

2. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
the semiconductor nanowire includes silicon.

3. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
a porosity of the porous semiconductor segment is between 50 and 80 percent.

4. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
in the semiconductor nanowire, a diameter of the porous semiconductor segment is smaller than or equal to that of the crystal semiconductor segment.

5. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
the first electrode and the second electrode include at least one of Ti, Cr, Au, Pt, Pd, Al, Ag, and a combination thereof.

6. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
a diameter of the semiconductor nanowire is between 20 and 220 nm, and
a length of the porous semiconductor segment is between 10 and 1200 nm.

7. The photoelectric semiconductor nanowire device as set forth in claim 1 ,
wherein the first conductivity type of the semiconductor nanowire is n-type, and
wherein a doping concentration of an n-type dopant is between 10 15 /cm 3 and 10 19 /cm 3 .

8. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
a portion of the semiconductor nanowire which is in contact with the first electrode and the second electrode has a higher concentration than other portions.

9. The photoelectric semiconductor nanowire device as set forth in claim 1 ,
wherein the semiconductor nanowire includes a first porous semiconductor segment and a second porous semiconductor segment which are spaced apart from each other, and
wherein the first porous semiconductor segment and the second porous semiconductor segment are connected to each other by the crystal semiconductor region.

10. The photoelectric semiconductor nanowire device as set forth in claim 9 , further comprising:
a third electrode disposed on the crystal semiconductor segment disposed between the first porous semiconductor segment and the second porous semiconductor segment.

11. The photoelectric semiconductor nanowire device as set forth in claim 1 ,
wherein the semiconductor nanowire includes a first porous semiconductor segment and a second porous semiconductor segment which are spaced apart from each other,
wherein the photoelectric semiconductor nanowire device further comprising: a third electrode disposed between the first electrode and the second electrode to be adjacent to and spaced apart from the first electrode, and
the first porous semiconductor segment and the second porous semiconductor segment are not disposed between the first electrode and the third electrode.

12. The photoelectric semiconductor nanowire device as set forth in claim 1 ,
wherein the semiconductor nanowire further includes a semiconductor contact region directly connected to opposite ends of the semiconductor nanowire,
wherein the semiconductor contact region has a larger area than the semiconductor nanowire, and
wherein each of the first electrode and the second electrode is disposed on the semiconductor contact region.

13. The photoelectric semiconductor nanowire device as set forth in claim 1 ,
wherein the semiconductor nanowire is a phototransistor.

14. The photoelectric semiconductor nanowire device as set forth in claim 1 ,
wherein the semiconductor nanowire operates as a photodetector.

15. The photoelectric semiconductor nanowire device as set forth in claim 1 , wherein
the semiconductor nanowire operates as a logic device.

16. A photoelectric semiconductor nanowire device comprising:
a semiconductor substrate;
an insulating layer disposed on the semiconductor substrate;
a semiconductor nanowire disposed on the insulating layer, doped with a dopant of a first conductivity type, and including porous semiconductor segments which include at least one porous semiconductor segment and are connected to opposite ends of the porous semiconductor segment; and
a first electrode and a second electrode respectively disposed in the crystal semiconductor segments around the porous semiconductor segment to provide an electrical connection,
wherein the crystal semiconductor segment includes a crystal semiconductor,
wherein the porous semiconductor segment includes a porous semiconductor, and
wherein the semiconductor nanowire provides a current according to intensity of an external light when the external light is irradiated to the porous semiconductor segment.

Assignees

• Univ Korea Res & Bus Found

Inventors

• Lee Hu-Cheol
• Park Hong-Gyu
• Hwang Min-Soo
• Kim Jungkil

Classifications

• H10P14/3462

  Nanowires · CPC title

• H01L31/10

  Electricity · mapped topic

• H01L31/035227

  Electricity · mapped topic

• H01L31/0284 Primary

  Electricity · mapped topic

• H01L31/1129

  Electricity · mapped topic