Piezoelectric pressure sensor

Patent metadata

Field	Value
Publication number	US-10330550-B2
Application number	US-201615351685-A
Country	US
Kind code	B2
Filing date	Nov 15, 2016
Priority date	Dec 3, 2015
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

A piezoelectric pressure sensor includes a membrane for capturing a force; a piezoelectric transducer having a front face onto which the force is applied from the membrane and generates electric polarization charges; and an electrode that receives generated electric polarization charges and transmits them via a charge transmission. The electrode includes a charge pick-off and at least one electrode strip. The charge pick-off is arranged parallel to the front face of the piezoelectric transducer. Material bonding in certain areas of the electrode strip connects the charge transmission to the electrode strip.

First claim

The invention claimed is:

1. A piezoelectric pressure sensor, comprising:
a membrane for capturing a force;
a piezoelectric transducer defining a front face disposed relative to the membrane so that the captured force generates electric polarization charges onto the front face;
a charge transmission;
an electrode that includes at least one electrode strip connected to the charge transmission by means of material bonding in certain areas of the at least one electrode strip, the electrode further including a charge pick-off arranged parallel to the front face of the piezoelectric transducer and that receives and transmits the received generated electric polarization charges via the charge transmission; and
an anti-strain sleeve receiving said electrode and defining at least one electrode opening, wherein the electrode strip protrudes through the at least one electrode opening of the anti-strain sleeve.

2. The piezoelectric pressure sensor according to claim 1 wherein the charge pick-off and the electrode strip are essentially disposed in an electrode plane.

3. The piezoelectric pressure sensor according to claim 1 , wherein the electrode is foil-like in design and that the electrode has a thickness of less than or equal to 200 μm.

4. The piezoelectric pressure sensor according to claim 1 , wherein the electrode strip is connected to the charge pick-off essentially free of mechanical stresses.

5. The piezoelectric pressure sensor according to claim 1 , wherein the electrode strip comprises a contact surface at its outer end; and that the contact surface of the electrode strip is accessible from outside the anti-strain sleeve.

6. The piezoelectric pressure sensor according to claim 1 , wherein a plurality of electrode strips are connected to the charge pick-off by material bonding for redundantly transmitting electric polarization charges to the charge pick-off.

7. The piezoelectric pressure sensor according to claim 1 , wherein the electrode is foil-like in design and has a thickness of less than or equal to 20 μm.

Assignees

• Kistler Holding Ag

Inventors

• Brunner Simon
• Haefner Markus

Classifications

• G01L19/0084

  to the outside of the housing (other details about the housing see G01L19/14) · CPC title

• G01L9/008 Primary

  using piezoelectric devices (piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025) · CPC title

• G01L9/0042

  Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms (details about the integration or bonding of piezoresistor in or on the diaphragm G01L9/0052 and G01L9/0057 respectively) · CPC title

• G01L9/0001

  Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means (G01L9/0026, G01L9/0033, G01L9/0082, G01L9/0089, G01L9/0091 take precedence) · CPC title

• H02N2/04

  Constructional details · CPC title