Flow rate sensor correction device, program for correction device, and correction method

Patent metadata

Field	Value
Publication number	US-10330519-B2
Application number	US-201615377803-A
Country	US
Kind code	B2
Filing date	Dec 13, 2016
Priority date	Dec 15, 2015
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

In order to reduce a flow rate error over the entire range of a sensor output value even when the relationship between the sensor output value and a flow rate value is poor in linearity, a flow rate sensor correction device includes: a sensitivity setting part adapted to set a sensitivity coefficient on the basis of an initial value and a sensitivity correction value and adjust the sensitivity of the flow rate sensor; a function calculation part adapted to calculate a corrected flow rate characteristic function on the basis of a function correction value, which is determined on the basis of the flow rate value, and a standard flow rate characteristic function; and a function modification part adapted to make a function storage part store, as a flow rate characteristic function, a final flow rate characteristic function based on the corrected flow rate characteristic.

First claim

The invention claimed is:

1. A correction device that corrects a flow rate characteristic function of a flow rate sensor comprising: a sensor mechanism adapted to output an output signal corresponding to a flow rate of fluid flowing through a flow path; a sensor output calculation part adapted to calculate a sensor output value x on a basis of a value indicated by the output signal and a sensitivity coefficient; a function storage part adapted to store the flow rate characteristic function with the sensor output value x as an input and a flow rate value y as an output; and a flow rate calculation part adapted to calculate the flow rate value y on a basis of the sensor output value x calculated by the sensor output calculation part and the flow rate characteristic function, the correction device comprising:
a sensitivity setting part adapted to set the sensitivity coefficient on a basis of an initial value and a sensitivity correction value m and adjust a sensitivity of the flow rate sensor;
a function calculation part adapted to calculate a corrected flow rate characteristic function g(x) on a basis of a function correction value n and a standard flow rate characteristic function f(x), the function correction value n being determined on a basis of the flow rate value y outputted from the flow rate sensor after the sensitivity coefficient of the flow rate sensor has been changed by the sensitivity setting part; and
a function modification part adapted to make the function storage part store, as the flow rate characteristic function, a final flow rate characteristic function h(x) based on the corrected flow rate characteristic function g(x) calculated by the function calculation part.

2. The correction device according to claim 1 , further comprising
a first measured value storage part adapted to, when the fluid flowing through the flow path at a first flow rate value F 1 , store the first flow rate value F 1 and a sensitivity-unadjusted flow rate value S 1 that is the flow rate value y outputted from the flow rate sensor in an initial state where the sensitivity coefficient is set to the initial value, wherein
the sensitivity setting part is configured to change the sensitivity correction value m depending on a difference between the first flow rate value F 1 and the sensitivity-unadjusted flow rate value S 1 .

3. The correction device according to claim 2 , wherein
the sensitivity setting part comprises:
an adjustment effect storage part adapted to store an adjustment effect relationship that is a relationship between the sensitivity correction value m and a difference between when setting the sensitivity coefficient based on the sensitivity correction value m, an actual flow rate value y newly produced at a predetermined sensor output value x and the flow rate value y outputted from the flow rate sensor; and
a sensitivity determination part adapted to, on a basis of the adjustment effect relationship, determine the sensitivity correction value m that cancels out the difference between the first flow rate value F 1 and the sensitivity-unadjusted flow rate value S 1 .

4. The correction device according to claim 2 , wherein
the first flow rate value F 1 is a flow rate value y smaller than a span of the flow rate value y, the span being set in the flow rate sensor.

5. The correction device according to claim 1 , further comprising
a second measured value storage part adapted to, when the fluid flowing through the flow path at a second flow rate value F 2 , store the second flow rate value F 2 and a sensitivity-adjusted flow rate value S 2 that is the flow rate value y outputted from the flow rate sensor after sensitivity adjustment, wherein
the function calculation part is configured to multiply the standard flow rate characteristic function f(x) by as the function correction value n, a value obtained by dividing the second flow rate value F 2 by the sensitivity-adjusted flow rate value S 2 .

6. The correction device according to claim 5 , wherein
the second flow rate value F 2 is a span of the flow rate value y, the span being set in the flow rate sensor.

7. The correction device according to claim 1 , further comprising
a correction term calculation part adapted to calculate a correction term on a basis of thermal conductivity λ of the fluid and the sensitivity correction value m, wherein
the function modification part is configured to calculate the final flow rate characteristic function h(x) by adding the correction term to the corrected flow rate characteristic function g(x), and make the function storage part store the final flow rate characteristic function h(x).

8. The correction device according to claim 7 , wherein
the correction term is one obtained by multiplying a product of the sensitivity correction value m and a square of a reciprocal of the thermal conductivity λ of the fluid by a fourth power of the sensor output value x.

9. A flow rate sensor configured to output a flow rate value y on a basis of the final flow rate characteristic function h(x) stored by the correction device according to claim 1 .

10. A flow rate control device comprising the flow rate sensor according to claim 9 .

11. An apparatus comprising: a processor, and memory storing instructions that, when executed by the processor, cause the apparatus to: output an output signal corresponding to a flow rate of fluid flowing through a flow path; calculate a sensor output value x on a basis of a value indicated by the output signal and a sensitivity coefficient; store a flow rate characteristic function with the sensor output value x as an input and a flow rate value y as an output; calculate a flow rate value y on a basis of the sensor output value x and the flow rate characteristic function;
set the sensitivity coefficient on a basis of an initial value and a sensitivity correction value m and adjust a sensitivity of a flow rate sensor by changing the sensitivity coefficient of the flow rate sensor;
calculate a corrected flow rate characteristic function g(x) on a basis of a function correction value n and a standard flow rate characteristic function f(x), the function correction value being determined on a basis of the flow rate value y outputted from the flow rate sensor; and
store, as the flow rate characteristic function, a final flow rate characteristic function h(x) based on the corrected flow rate characteristic function g(x).

12. A correction method that corrects a flow rate characteristic function of a flow rate sensor comprising: a sensor mechanism adapted to output an output signal corresponding to a flow rate of fluid flowing through a flow path; a sensor output calculation part adapted to calculate a sensor output value x on a basis of a value indicated by the output signal and a sensitivity coefficient; a function storage part adapted to store the flow rate characteristic function with the sensor output value x as an input and a flow rate value y as an output; and a flow rate calculation part adapted to calculate a flow rate value y on a basis of the sensor output value x calculated by the sensor output calculation part and the flow rate characteristic function, the correction method comprising steps of:
setting the sensitivity coefficient on a basis of an initial value and a sensitivity correction value m and adjusting a sensitivity of the flow rate sensor by changing the sensitivity coefficient of the flow rate sensor;
calculating a corrected flow rate characteristic function g(x) on a basis of a function correction value n and a standard flow rate characteristic function f(x), the function correction value n being determined on a basis of the flow rate value y

Assignees

• Horiba Stec Co Ltd

Inventors

• Okano Hiroyuki

Classifications

• G01F15/04

  of gases to be measured · CPC title

• G01F1/68

  by using thermal effects · CPC title

• G01F25/0007 Primary

  Physics · mapped topic

• G01F25/10 Primary

  of flowmeters · CPC title

• G01F1/6965 Primary

  comprising means to store calibration data for flow signal calculation or correction · CPC title