Measuring apparatus, on-chip instrumentation device and measuring method
US-12181278-B2 · Dec 31, 2024 · US
US10330460B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10330460-B2 |
| Application number | US-201715621230-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 13, 2017 |
| Priority date | Jun 13, 2017 |
| Publication date | Jun 25, 2019 |
| Grant date | Jun 25, 2019 |
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A calibration system for calibrating a tilt angle of the fast steering mirror includes a position sensing device configured to generate a beam of electromagnetic radiation, and a diffractive optical element, positioned between the position sensing device and the fast steering mirror, the diffractive optical element being configured to divide the input beam into a plurality of output beams directed to the fast steering mirror. The position sensing device is configured to determine a tilt angle of the fast steering mirror. A method to calibrate a tilt angle of the fast steering mirror is further disclosed.
Opening claim text (preview).
What is claimed is: 1. A calibration system for calibrating a tilt angle of fast steering mirror, the calibration system comprising: a position sensing device configured to generate a beam of electromagnetic radiation; and a diffractive optical element, positioned between the position sensing device and the fast steering mirror, the diffractive optical element being configured to divide the input beam into a plurality of output beams directed to the fast steering mirror, wherein the position sensing device is configured to determine a tilt angle of the fast steering mirror. 2. The calibration system of claim 1 , wherein the position sensing device includes an interferometer attached to a fixed surface. 3. The calibration system of claim 2 , wherein the interferometer is configured to generate light. 4. The calibration system of claim 1 , wherein each output beam retains the same optical characteristics as the input beam, including size, polarization and phase. 5. The calibration system of claim 1 , wherein the diffractive optical element is configured to generate one of a 1-dimensional beam array and a 2-dimensional beam matrix. 6. The calibration system of claim 5 , wherein the diffractive optical element is configured to be used with monochromatic light generated by the position sensing device, and is designed for a specific wavelength and angle of separation between output beams. 7. The calibration system of claim 1 , wherein the diffractive optical element includes a computer generated hologram. 8. The calibration system of claim 1 , wherein the fast steering mirror includes a reflective surface, and is configured to manipulate the reflective surface to control a direction of the reflection of electromagnetic radiation off of the reflective surface. 9. The calibration system of claim 8 , wherein the fast steering mirror further includes a fixed base, a pivot flexure or bearing, which couples the reflective surface to the base, and several actuators each configured to move the reflective surface relative to the base. 10. A method to calibrate a tilt angle of fast steering mirror, the method comprising: generating an input beam of electromagnetic radiation from a position sensing device; dividing the input beam into a plurality of output beams directed to the fast steering mirror; and determining a tilt angle of the fast steering mirror based on a reflection of the output beams by the fast steering mirror. 11. The method of claim 10 , wherein the input beam is generated by a position sensing device, and the plurality of output beams are created by a diffractive optical element between the position sensing device and the fast steering mirror. 12. The method of claim 11 , wherein the position sensing device includes an interferometer attached to a fixed surface, the interferometer being configured to generate light. 13. The method of claim 10 , wherein each output beam retains the same optical characteristics as the input beam, including size, polarization and phase. 14. The method of claim 10 , wherein diffractive optical element is configured to generate one of a 1-dimensional beam array and a 2-dimensional beam matrix. 15. The method of claim 14 , wherein the diffractive optical element is configured to be used with monochromatic light generated by the position sensing device, and is designed for a specific wavelength and angle of separation between output beams. 16. The method of claim 10 , wherein diffractive optical element includes a computer generated hologram. 17. The method of claim 10 , wherein the fast steering mirror includes a reflective surface, and is configured to manipulate the reflective surface to control a direction of the reflection of electromagnetic radiation off of the reflective surface. 18. The method of claim 17 , wherein the fast steering mirror further includes a fixed base, a pivot flexure or bearing, which couples the reflective surface to the base, and several actuators each configured to move the reflective surface relative to the base.
the reflecting element being a flexible sheet or membrane, e.g. for varying the focus (flexible mirrors for cosmetic use A45D42/24) · CPC title
by means of one or more reflecting elements · CPC title
Motorised alignment · CPC title
Synthesising holograms, {i.e. holograms synthesized from objects or objects from holograms}(using electric digital computers G06F; G06T) · CPC title
Synchronization of light source or manipulator and detector · CPC title
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