Protecting an interior of a hollow body with an ALD coating

Patent metadata

Field	Value
Publication number	US-10329662-B2
Application number	US-201415123019-A
Country	US
Kind code	B2
Filing date	Mar 3, 2014
Priority date	Mar 3, 2014
Publication date	Jun 25, 2019
Grant date	Jun 25, 2019

Abstract

An apparatus and method for protecting an interior of a hollow body, where an inlet and exhaust manifold include a port assembly attachable to an opening of the hollow body is provided. The interior of the hollow body is exposed to sequential self-saturating surface reactions by sequential inlet of reactive gases via the port assembly and the opening into the interior of the hollow body, and excess gases is pumped via the opening and the port assembly out from the hollow body.

First claim

The invention claimed is:

1. A method of protecting an interior of a hollow body, the method comprising:
providing an inlet and exhaust manifold comprising a port assembly attachable to an opening of the hollow body;
exposing the interior of the hollow body to sequential self-saturating surface reactions by sequential inlet of reactive gases via said port assembly and said opening into the interior of the hollow body;
removing excess gases via said opening and said port assembly out from the hollow body;
guiding inactive purge gas into an intermediate space between the hollow body and a surrounding chamber wall; and
pumping said inactive purge gas out from the intermediate space.

2. The method of claim 1 , comprising attaching said port assembly to said opening of the hollow body.

3. The method of claim 1 , comprising pumping reaction residue and purge gas from the interior of the hollow body by a vacuum pump attached to an exhaust side of the inlet and exhaust manifold.

4. The method of claim 1 , wherein a gas discharge point within the hollow body is arranged at a different level than a gas exhaust point.

5. The method of claim 1 , wherein the hollow body is used as a reaction vessel sealed by a sealing part comprised by the port assembly.

6. The method of claim 5 , wherein said sealing part comprises a tapered thread detachably attachable to said opening of the hollow body.

7. The method of claim 5 , wherein said port assembly comprises a fitting part attachable to the sealing part allowing the sealing part to twist to tighten against said opening of the hollow body.

8. The method of claim 1 , wherein the inlet and exhaust manifold comprises one or more in-feed lines with their controlling elements controlled by a computer-implemented control system.

9. An apparatus for protecting an interior of a hollow body, comprising:
an inlet and exhaust manifold comprising a port assembly attachable to an opening of the hollow body, the apparatus being configured to expose the interior of the hollow body to sequential self-saturating surface reactions by sequential inlet of reactive gases via said port assembly and said opening into the interior of the hollow body;
a pump configured to remove excess gases via said opening and said port assembly out from the hollow body; and
a chamber surrounding the hollow body and an inactive gas in-feed line configured to guide inactive purge gas into an intermediate space between the hollow body and a surrounding chamber wall.

10. The apparatus of claim 9 , wherein a gas discharge point provided by the inlet and exhaust manifold is arranged at a different level than a gas exhaust point provided by the inlet and exhaust manifold.

11. The apparatus of claim 9 , wherein the inlet and exhaust manifold comprises precursor vapor and purge gas in-feed lines and their controlling elements.

12. The apparatus of claim 9 , wherein the inlet and exhaust manifold comprises a hollow body-specific port assembly configured to attach the inlet and exhaust manifold into said opening of the hollow body thereby forming a fluid communication path between the inlet and exhaust manifold and the interior of the hollow body.

13. The apparatus of claim 9 , wherein the port assembly comprises a sealing part attachable to the opening of the hollow body.

14. The apparatus of claim 13 , wherein the sealing part comprises a tapered thread.

15. The apparatus of claim 9 , wherein the apparatus is mobile.

Assignees

• Picosun Oy

Inventors

• Kostamo Juhana
• Malinen Timo
• Sammelselg Väino
• Aarik Jaan
• Aarik Lauri

Classifications

• C23C16/45555

  applied in non-semiconductor technology · CPC title

• C23C16/045 Primary

  Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates · CPC title

• C23C16/4412

  Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps · CPC title

• C23C16/45544

  characterized by the apparatus · CPC title

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title